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Hi Darick,</div>
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One tip is that room temperate reactive sputtering with V and O2 results in V2O5. Achieving VO2 requires a deposition temp around 200C or higher.</div>
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Best,</div>
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Bob</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Darick Baker <darick@uw.edu><br>
<b>Sent:</b> Wednesday, June 9, 2021 7:43 PM<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] vanadium dioxide sputtering</font>
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<div dir="ltr">We have a lab user who is interested in sputtering vanadium dioxide. I realize this has been asked before without an answer, but I thought I'd try again. Does anybody have a VO2 process running and would be willing to do some depositions for
us?
<div>Barring that, does anybody have any tips or successes with reactively sputtering VO2?</div>
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<div>Thanks for the help.<br clear="all">
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<div dir="ltr">Darick Baker, PhD<br>
Business Outreach and Customer Development<br>
New User Orientation<br>
Research Engineer - Deposition<br>
Washington Nanofabrication Facility (WNF)<br>
University of Washington<br>
Fluke Hall 115, Box 352143<br>
Desk: 206.221.8265 Cell: 206.395.4049<br>
<a href="mailto:fab-support@wnf.uw.edu">fab-support@wnf.uw.edu</a><br>
<a href="https://www.wnf.washington.edu/">https://www.wnf.washington.edu/</a><br>
Pronouns: he/him<br>
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