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<p class="MsoNormal">Hi Bruce<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">There are 2 ways I know of, an inexpensive way and an expensive way. The inexpensive way is to use thermal dots sold here:<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a href="https://www.mcmaster.com/temperature-indicating-dots/">https://www.mcmaster.com/temperature-indicating-dots/</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Expensive way is using SensArray. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a href="https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management">https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management</a>.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dave LaFleur<o:p></o:p></p>
<p class="MsoNormal">Harvard University<o:p></o:p></p>
<p class="MsoNormal">CNS<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span style="font-size:12.0pt;color:black">From: </span></b><span style="font-size:12.0pt;color:black">"labnetwork-bounces@mtl.mit.edu" <labnetwork-bounces@mtl.mit.edu> on behalf of Bruce Tolleson <betemc@rit.edu><br>
<b>Date: </b>Wednesday, June 23, 2021 at 11:42 AM<br>
<b>To: </b>"labnetwork@mtl.mit.edu" <labnetwork@mtl.mit.edu><br>
<b>Subject: </b>[labnetwork] Plasmatherm Apex ICP High Temperature Operation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Dear Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"> Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C. We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature
has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?<o:p></o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E. Tolleson</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester Institute of Technology</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY 14623-5604</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">(585) 478-3836</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:navy"><img border="0" width="90" height="60" style="width:.9375in;height:.625in" id="Picture_x0020_1" src="cid:image001.jpg@01D76832.031573B0" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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