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<p>The trick with the dots is that you need to press them hard and
flat to the wafer, as the vacuum tries to pull them up and away
from the surface, thus defeating the purpose of measuring the
temperature of a surface.</p>
<p>Also leave the wafer in there for a few minutes- or wait <i>and</i>
don't wait with separate dots and see the difference!</p>
<p><br>
</p>
<p>Jeremy Clark</p>
<p>Cornell Nanoscale Facility<br>
</p>
<div class="moz-cite-prefix">On 6/23/21 1:16 PM, LaFleur, David W
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:FCCA0298-202C-41E7-92B1-20E041D5FF20@cns.fas.harvard.edu">
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<p class="MsoNormal">Hi Bruce<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">There are 2 ways I know of, an inexpensive
way and an expensive way. The inexpensive way is to use
thermal dots sold here:<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a
href="https://www.mcmaster.com/temperature-indicating-dots/"
moz-do-not-send="true">https://www.mcmaster.com/temperature-indicating-dots/</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Expensive way is using SensArray. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a
href="https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management"
moz-do-not-send="true">https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management</a>.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dave LaFleur<o:p></o:p></p>
<p class="MsoNormal">Harvard University<o:p></o:p></p>
<p class="MsoNormal">CNS<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div style="border:none;border-top:solid #B5C4DF
1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span
style="font-size:12.0pt;color:black">From: </span></b><span
style="font-size:12.0pt;color:black"><a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu">"labnetwork-bounces@mtl.mit.edu"</a>
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a> on behalf of Bruce
Tolleson <a class="moz-txt-link-rfc2396E" href="mailto:betemc@rit.edu"><betemc@rit.edu></a><br>
<b>Date: </b>Wednesday, June 23, 2021 at 11:42 AM<br>
<b>To: </b><a class="moz-txt-link-rfc2396E" href="mailto:labnetwork@mtl.mit.edu">"labnetwork@mtl.mit.edu"</a>
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork@mtl.mit.edu"><labnetwork@mtl.mit.edu></a><br>
<b>Subject: </b>[labnetwork] Plasmatherm Apex ICP High
Temperature Operation<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<p class="MsoNormal">Dear Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"> Our Plasmatherm Apex ICP has the high
temperature option installed to run as high as 200°C. We are
trying to determine the actual temperature of the lower
electrode to substrate contact. The display temperature verses
actual temperature has an offset and we are trying to
determine what that offset is. Has anyone else been able to
measure this?<o:p></o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E.
Tolleson</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester
Institute of Technology</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb
Memorial Drive, Bldg 17-2627</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY
14623-5604</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">(585) 478-3836</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:navy"><img
style="width:.9375in;height:.625in" id="Picture_x0020_1"
src="cid:part3.7C5B524D.5A726DF2@cnf.cornell.edu"
alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"
class="" width="90" height="60" border="0"></span><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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