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<p class="MsoNormal">Bruce,<o:p></o:p></p>
<p class="MsoNormal"> One way to measure the actual wafer temp is with a T/C wafer (Sensarray). These are designed with cemented T/C junctions on the wafer itself. The leads are encapsulated in a plastic ribbon which is designed to cross an O ring. You will
find that the wafer will sit at a much lower temperature than the chuck under vacuum since there is no surrounding air to allow for convection. I would recommend testing the temperature with the wafer unclamped. Clamped, and clamped with He backing. You may
be surprised at the results!<o:p></o:p></p>
<p class="MsoNormal"> Equipment Dood<o:p></o:p></p>
<p class="MsoNormal">
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:14.0pt">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Bruce Tolleson<br>
<b>Sent:</b> Wednesday, June 23, 2021 9:14 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Plasmatherm Apex ICP High Temperature Operation<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"> Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C. We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature
has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?<o:p></o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(585) 478-3836<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:navy"><img width="90" height="60" style="width:.9375in;height:.625in" id="Picture_x0020_1" src="cid:image001.jpg@01D76832.54B8F520" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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