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<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US">I did cover thermal dots with Kapton tape or discs to check the wafer temperature during plasma etching. I did not see any issue in vacuum although the temperature did not exceeded 100</span><span lang="EN-CA" style="mso-fareast-language:EN-US">⁰</span><span lang="EN-CA" style="mso-fareast-language:EN-US">C.
Kapton tape can withstand temperatures up to 260</span><span lang="EN-CA" style="mso-fareast-language:EN-US">⁰</span><span lang="EN-CA" style="mso-fareast-language:EN-US">C, so it should be ok.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-CA" style="font-family:"Lucida Calligraphy"">Lino Eugene, P.Eng., Ph.D.,</span></b><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Micro/nanofabrication process engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Quantum-Nano Fabrication and Characterization Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">QNC 1611<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">University of Waterloo<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">200 University Avenue West<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Waterloo, ON, Canada <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">N2L 3G1<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Ph: +1 519-888-4567 #37788<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Cell: +1 226-929-1685</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Website: <a href="https://qnfcf.uwaterloo.ca/">
<span style="color:windowtext">https://qnfcf.uwaterloo.ca/</span></a></span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="FR">De :</span></b><span lang="FR"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>De la part de</b> Jeremy Clark<br>
<b>Envoyé :</b> 23 juin 2021 16:20<br>
<b>À :</b> labnetwork@mtl.mit.edu<br>
<b>Objet :</b> Re: [labnetwork] Plasmatherm Apex ICP High Temperature Operation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p>The trick with the dots is that you need to press them hard and flat to the wafer, as the vacuum tries to pull them up and away from the surface, thus defeating the purpose of measuring the temperature of a surface.<o:p></o:p></p>
<p>Also leave the wafer in there for a few minutes- or wait <i>and</i> don't wait with separate dots and see the difference!<o:p></o:p></p>
<p><o:p> </o:p></p>
<p>Jeremy Clark<o:p></o:p></p>
<p>Cornell Nanoscale Facility<o:p></o:p></p>
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<p class="MsoNormal">On 6/23/21 1:16 PM, LaFleur, David W wrote:<o:p></o:p></p>
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<p class="MsoNormal">Hi Bruce<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">There are 2 ways I know of, an inexpensive way and an expensive way. The inexpensive way is to use thermal dots sold here:<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><a href="https://www.mcmaster.com/temperature-indicating-dots/">https://www.mcmaster.com/temperature-indicating-dots/</a><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Expensive way is using SensArray. <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><a href="https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management">https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management</a>.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Dave LaFleur<o:p></o:p></p>
<p class="MsoNormal">Harvard University<o:p></o:p></p>
<p class="MsoNormal">CNS<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:12.0pt;color:black">From: </span></b><span style="font-size:12.0pt;color:black"><a href="mailto:labnetwork-bounces@mtl.mit.edu">"labnetwork-bounces@mtl.mit.edu"</a>
<a href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a> on behalf of Bruce Tolleson
<a href="mailto:betemc@rit.edu"><betemc@rit.edu></a><br>
<b>Date: </b>Wednesday, June 23, 2021 at 11:42 AM<br>
<b>To: </b><a href="mailto:labnetwork@mtl.mit.edu">"labnetwork@mtl.mit.edu"</a> <a href="mailto:labnetwork@mtl.mit.edu">
<labnetwork@mtl.mit.edu></a><br>
<b>Subject: </b>[labnetwork] Plasmatherm Apex ICP High Temperature Operation</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Dear Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"> Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C. We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature
has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?<o:p></o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E. Tolleson</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester Institute of Technology</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY 14623-5604</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">(585) 478-3836</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:navy"><img border="0" width="90" height="60" style="width:.9416in;height:.625in" id="Picture_x0020_1" src="cid:image001.jpg@01D76872.F02BED10" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
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