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<p class="MsoNormal"><span style="color:#1F497D">Hi Aimee,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Here at Draper we use Wensco very good flat accurate hot plates, these are our hot plates for resist bake.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span style="font-size:9.0pt;font-family:"Arial",sans-serif">WENESCO INC<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span style="font-size:9.0pt;font-family:"Arial",sans-serif">3057 N ROCKWELL STREET<o:p></o:p></span></p>
<p class="MsoNormal" style="text-autospace:none"><span style="font-size:9.0pt;font-family:"Arial",sans-serif">CHICAGO IL 60618<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif">United States<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard Morrison<o:p></o:p></p>
<p class="MsoNormal">PMTS<o:p></o:p></p>
<p class="MsoNormal">Draper Laboratory<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Price, Aimee<br>
<b>Sent:</b> Tuesday, July 6, 2021 12:41 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Hotplate options for resist baking<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hello everyone,<o:p></o:p></p>
<p class="MsoNormal">We are looking for a couple standalone hotplates for resist soft and hard bakes. We have one nice, uniform hotplate attached to one of our CEE coaters. However, it takes a long time to change temps and doesn’t get used as much as it
should. The lab hotplates we have are ok for general lab use and not cheap, but are not uniform or reproducible enough for resist baking for sensitive processes (I think that means all processes<span style="font-family:"Segoe UI Emoji",sans-serif">😊</span>).
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I’m sure I’ll be overwhelmed with ideas, so thanks in advance. What are your suggestions for resist bake hotplates with uniformity of at least +/- 1 deg F? I do not necessarily need vacuum or proximity, in fact would likely rather not
have those options. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best,<o:p></o:p></p>
<p class="MsoNormal">Aimee<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Sr. Research Associate <o:p></o:p></p>
<p class="MsoNormal">The Ohio State University<o:p></o:p></p>
<p class="MsoNormal">Nanotech West Lab<o:p></o:p></p>
<p class="MsoNormal">Institute for Materials Research<o:p></o:p></p>
<p class="MsoNormal">1381 Kinnear Road<o:p></o:p></p>
<p class="MsoNormal">Suite 100<o:p></o:p></p>
<p class="MsoNormal">Columbus, OH 43212<o:p></o:p></p>
<p class="MsoNormal">614-292-2753<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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