<div dir="ltr"><div>Hi All,</div><div><br></div><div>Not sure if you're looking for smaller samples/wafers/both, but for wafers, where we need high uniformity, I really like the the SPS POLOS hotplates (e.g. <a href="https://www.sps-europe.com/order/polos-hotplate-200s-230vac---single-without-options/15965/">https://www.sps-europe.com/order/polos-hotplate-200s-230vac---single-without-options/15965/</a>), though it does take a bit long to get to temperature, e.g. 17<span id="gmail-degree-symbol" class="gmail-font3">°</span>C-120<span id="gmail-degree-symbol" class="gmail-font3">°</span>C 45 min, 120<span id="gmail-degree-symbol" class="gmail-font3">°</span>C-140<span id="gmail-degree-symbol" class="gmail-font3">°</span>C 15 min. What I like about how it operates is that you place the wafer on raised pins, When you start the recipe, they lower, and when it's finished, they rise. My two cents...</div><div><br></div><div>Best Regards,</div><div>Aaron</div><div><br></div><div>Research Fellow</div><div>Nanyang Technological University</div><div>School of Materials Science and Engineering</div><div>50 Nanyang Ave, N4.1-01-14</div><div>Singapore 639798</div><div>+65 81217105<br></div><div><br></div><div><br></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Jul 7, 2021 at 8:07 AM Morrison, Richard H., Jr <<a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<p class="MsoNormal"><span style="color:rgb(31,73,125)">Hi Aimee,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)">Here at Draper we use Wensco very good flat accurate hot plates, these are our hot plates for resist bake.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:9pt;font-family:"Arial",sans-serif">WENESCO INC<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9pt;font-family:"Arial",sans-serif">3057 N ROCKWELL STREET<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9pt;font-family:"Arial",sans-serif">CHICAGO IL 60618<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9pt;font-family:"Arial",sans-serif">United States<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:9pt;font-family:"Arial",sans-serif"><u></u> <u></u></span></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Richard Morrison<u></u><u></u></p>
<p class="MsoNormal">PMTS<u></u><u></u></p>
<p class="MsoNormal">Draper Laboratory<u></u><u></u></p>
<p class="MsoNormal">555 Technology Square<u></u><u></u></p>
<p class="MsoNormal">Cambridge Ma 02139<u></u><u></u></p>
<p class="MsoNormal">Office: 617-258-3420<u></u><u></u></p>
<p class="MsoNormal">Cell: 508-930-3461<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"><u></u> <u></u></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> <b>
On Behalf Of </b>Price, Aimee<br>
<b>Sent:</b> Tuesday, July 6, 2021 12:41 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Hotplate options for resist baking<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Hello everyone,<u></u><u></u></p>
<p class="MsoNormal">We are looking for a couple standalone hotplates for resist soft and hard bakes. We have one nice, uniform hotplate attached to one of our CEE coaters. However, it takes a long time to change temps and doesn’t get used as much as it
should. The lab hotplates we have are ok for general lab use and not cheap, but are not uniform or reproducible enough for resist baking for sensitive processes (I think that means all processes<span style="font-family:"Segoe UI Emoji",sans-serif">😊</span>).
<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">I’m sure I’ll be overwhelmed with ideas, so thanks in advance. What are your suggestions for resist bake hotplates with uniformity of at least +/- 1 deg F? I do not necessarily need vacuum or proximity, in fact would likely rather not
have those options. <u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Best,<u></u><u></u></p>
<p class="MsoNormal">Aimee<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Sr. Research Associate <u></u><u></u></p>
<p class="MsoNormal">The Ohio State University<u></u><u></u></p>
<p class="MsoNormal">Nanotech West Lab<u></u><u></u></p>
<p class="MsoNormal">Institute for Materials Research<u></u><u></u></p>
<p class="MsoNormal">1381 Kinnear Road<u></u><u></u></p>
<p class="MsoNormal">Suite 100<u></u><u></u></p>
<p class="MsoNormal">Columbus, OH 43212<u></u><u></u></p>
<p class="MsoNormal">614-292-2753<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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