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<p class="MsoNormal"><span style="color:black">Hi Mac,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">I have an Ebara A10S dry pump connected to the ALD system at Draper. Prior to the dry pump, I have a multi-trap with a SS gauze filter and an activated charcoal filter element.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">The dry pump has been in operation since the purchase of the ALD in 2013 and we have not had any issues<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt;line-height:normal">
<b><span style="font-size:9.0pt;color:#1F497D">Mark R. April</span></b><span style="font-size:8.0pt;font-family:"Cambria",serif;color:#1F497D"><br>
</span><span style="font-size:9.0pt;color:#1F497D">Senior Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt;line-height:normal">
<span style="font-size:9.0pt;color:#1F497D">Microfabrication Laboratory <br>
</span><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:1.2pt"><img width="175" height="26" style="width:1.8229in;height:.2708in" id="Picture_x0020_1" src="cid:image001.png@01D774B8.30B4F8D0" alt="color_logo_small4"></span><i><span style="font-size:9.0pt;color:#1F497D"><br>
555 Technology Square<o:p></o:p></span></i></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt;line-height:normal">
<i><span style="font-size:9.0pt;color:#1F497D">Cambridge, MA 02139<o:p></o:p></span></i></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt;line-height:normal">
<i><span style="font-size:9.0pt;color:#1F497D"><a href="mailto:mapril@draper.com"><span style="color:#0563C1">mapril@draper.com</span></a>
<o:p></o:p></span></i></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt;line-height:normal">
<i><span style="font-size:9.0pt;color:#1F497D">O # 617-258-1613 C # 617-455-1596<o:p></o:p></span></i></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt;line-height:normal">
<i><span style="font-size:9.0pt;color:#1F497D"><a href="http://www.draper.com/"><span style="color:#0563C1">www.draper.com</span></a></span></i><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>On Behalf Of </b>Iulian Codreanu<br>
<b>Sent:</b> Friday, July 9, 2021 10:38 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Dry pumps on ALD systems?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi Mac,<br>
<br>
Our FlexAL came with an Adixen ADS 602P four years ago. At some point the service engineer had to adjust a breaker inside the tool's power box to allow the pump to draw more current at startup.<br>
<br>
Cheers,<br>
<br>
Iulian<br>
<br>
<br>
<span style="font-size:12.0pt;line-height:115%"><o:p></o:p></span></p>
<pre>iulian Codreanu, Ph.D.<o:p></o:p></pre>
<pre>Director, Nanofabrication Facility<o:p></o:p></pre>
<pre>University of Delaware<o:p></o:p></pre>
<pre>Harker ISE Lab, Room 163<o:p></o:p></pre>
<pre>221 Academy Street<o:p></o:p></pre>
<pre>Newark, DE 19716<o:p></o:p></pre>
<pre>302-831-2784<o:p></o:p></pre>
<pre><a href="http://udnf.udel.edu">http://udnf.udel.edu</a><o:p></o:p></pre>
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<p class="MsoNormal">On 7/8/2021 1:56 PM, Mac Hathaway wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt">Hello Folks,<br>
<br>
I'm wondering: how many of you have tried a dry pump on your ALD system?<br>
<br>
If you have, how did it work out?<br>
<br>
If you could supply the following details, that would be great:<br>
<br>
ALD system model;<br>
<br>
Dry pump model and CFM;<br>
<br>
How long it's been running that way;<br>
<br>
Any issues you've run in to.<br>
<br>
For background, we have long been working under the assumption that, due to the reactive nature of the ALD precursors, and the abrasive nature of the effluent, PFPE-base wet pumps are the way to go. However, we grow tired of dealing with pump oil and associated
issues, and we're using dry pumps successfully elsewhere in the fab...<br>
<br>
Thanks!<br>
<br>
Mac<br>
<br>
<o:p></o:p></p>
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-- <br>
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<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Mac Hathaway</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Senior Process and Systems Engineer</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Harvard Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">11 Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">Cambridge, MA 02138</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman , serif",serif">617-495-9012</span><o:p></o:p></p>
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<span style="font-size:12.0pt;font-family:"Times New Roman , serif",serif"> </span><o:p></o:p></p>
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<br>
<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
</blockquote>
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<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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