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Hi Mac,<br>
<br>
Our FlexAL came with an Adixen ADS 602P four years ago. At some
point the service engineer had to adjust a breaker inside the tool's
power box to allow the pump to draw more current at startup.<br>
<br>
Cheers,<br>
<br>
Iulian<br>
<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 7/8/2021 1:56 PM, Mac Hathaway
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:0b9cf3fc-497d-1565-7d12-c545fa8e031f@cns.fas.harvard.edu">
<meta http-equiv="Content-Type" content="text/html; charset=UTF-8">
<font face="Times New Roman, Times, serif">Hello Folks,<br>
<br>
I'm wondering: how many of you have tried a dry pump on your ALD
system?<br>
<br>
If you have, how did it work out?<br>
<br>
If you could supply the following details, that would be great:<br>
<br>
ALD system model;<br>
<br>
Dry pump model and CFM;<br>
<br>
How long it's been running that way;<br>
<br>
Any issues you've run in to.<br>
<br>
</font><font face="Times New Roman, Times, serif"><font
face="Times New Roman, Times, serif">For background, we have
long been working under the assumption that, due to the
reactive nature of the ALD precursors, and the abrasive nature
of the effluent, PFPE-base wet pumps are the way to go.
However, we grow tired of dealing with pump oil and associated
issues, and we're using dry pumps successfully elsewhere in
the fab...</font><br>
<br>
Thanks!<br>
<br>
Mac<br>
<br>
<br>
</font>
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style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">617-495-9012<o:p></o:p></span></p>
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normal"><span
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<pre class="moz-quote-pre" wrap="">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
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