<div dir="auto">Try asking Veeco.com. They sell the Ultratech ALD.</div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Jul 14, 2021, 11:41 AM Martin,Michael David <<a href="mailto:michael.martin@louisville.edu">michael.martin@louisville.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">




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Hi guys, <br>
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    Would anyone be willing to share process details for using TDMAS (Tris(dimethylamino)silane) on a Beneq ALD system?  Beneq tells me they do not have experience with that precursor.  Barring a recipe for the particular tool, it would be helpful to just have
 a general starting point such as precursor temperature, injection and purge times, substrate temperature, ozone flow rate, etc.  There seems to be a frustrating lack of detail in the literature and I have a customer that is chomping at the bit to get SiO2
 down.  <a href="https://www.sigmaaldrich.com/US/en/substance/trisdimethylaminosilane1613215112897?context=product" id="m_4242268354181998960LPlnk" target="_blank" rel="noreferrer">
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Regards, <br>
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   Michael <br>
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