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<p class="MsoNormal">Hello group,<o:p></o:p></p>
<p class="MsoNormal">Our Oxford FlexAL ALD system was purchased new in 2019 with an Adixen A604H dry pump. It has worked very well since then – just make sure you provide the specified amount of cooling water from your facility / chiller. Our Oxford PECVD
has an ADS 602P dry pump, and those run very well also. We have had that PECVD in operation since 2005, and we have a spare ADS 602P, which we swap out for rebuilds roughly on an annual basis.<o:p></o:p></p>
<p class="MsoNormal">FYI,<o:p></o:p></p>
<p class="MsoNormal">Guy<o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="color:black">Guy DeRose, PhD, Member of the Professional Staff<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="color:black">Associate Director of Technical Operations, Kavli Nanoscience Institute<o:p></o:p></span></p>
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<div>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="color:black">California Institute of Technology, Pasadena, CA USA<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="color:black">(O) 1-626-395-3423 (M) 1-626-676-8529<o:p></o:p></span></p>
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<div>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="color:black"><a href="http://kni.caltech.edu">http://kni.caltech.edu</a></span><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><b><span style="font-size:12.0pt;color:black">From:
</span></b><span style="font-size:12.0pt;color:black">labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of "Zuzanna A. Lewicka" <zlewicka@princeton.edu><br>
<b>Date: </b>Monday, July 12, 2021 at 8:40 AM<br>
<b>To: </b>"April, Mark R." <mapril@draper.com>, "labnetwork@mtl.mit.edu" <labnetwork@mtl.mit.edu><br>
<b>Subject: </b>Re: [labnetwork] Dry pumps on ALD systems?<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><o:p> </o:p></p>
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<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal">We have recently upgraded our thermal ALD (Savannah 100) unit and installed Edwards dry scroll pump nxds15ic (8.8 CFM) with heated ALD trap provided by Veeco. So far, we have run about 25,000 cycles with no issues.<o:p></o:p></p>
<p class="MsoNormal">Best regards,<o:p></o:p></p>
<p class="MsoNormal">Zuzanna Lewicka<o:p></o:p></p>
<p class="MsoNormal">Princeton University<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Iulian Codreanu<br>
<b>Sent:</b> Friday, July 9, 2021 11:54 AM<br>
<b>To:</b> April, Mark R. <mapril@draper.com>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Dry pumps on ALD systems?<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt">Mark's note reminded me that I also have a precursor foreline trap (Mass-Vac 355063).<br>
<br>
<o:p></o:p></p>
<pre>iulian Codreanu, Ph.D.<o:p></o:p></pre>
<pre>Director, Nanofabrication Facility<o:p></o:p></pre>
<pre>University of Delaware<o:p></o:p></pre>
<pre>Harker ISE Lab, Room 163<o:p></o:p></pre>
<pre>221 Academy Street<o:p></o:p></pre>
<pre>Newark, DE 19716<o:p></o:p></pre>
<pre>302-831-2784<o:p></o:p></pre>
<pre><a href="http://udnf.udel.edu">http://udnf.udel.edu</a><o:p></o:p></pre>
<div>
<p class="MsoNormal">On 7/9/2021 11:47 AM, April, Mark R. wrote:<o:p></o:p></p>
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<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal"><span style="color:black">Hi Mac,</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:black">I have an Ebara A10S dry pump connected to the ALD system at Draper. Prior to the dry pump, I have a multi-trap with a SS gauze filter and an activated charcoal filter element.
</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:black">The dry pump has been in operation since the purchase of the ALD in 2013 and we have not had any issues</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:black">Thanks</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:black"> </span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><b><span style="font-size:9.0pt;color:#1F497D">Mark R. April</span></b><span style="font-size:8.0pt;font-family:"Cambria",serif;color:#1F497D"><br>
</span><span style="font-size:9.0pt;color:#1F497D">Senior Equipment Engineer</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-size:9.0pt;color:#1F497D">Microfabrication Laboratory
<br>
</span><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black;letter-spacing:1.2pt"><img border="0" width="175" height="26" style="width:1.8229in;height:.2708in" id="Picture_x0020_1" src="cid:image001.png@01D77BF6.1AF5DA10" alt="color_logo_small4"></span><i><span style="font-size:9.0pt;color:#1F497D"><br>
555 Technology Square</span></i><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><i><span style="font-size:9.0pt;color:#1F497D">Cambridge, MA 02139</span></i><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><i><span style="font-size:9.0pt;color:#1F497D"><a href="mailto:mapril@draper.com"><span style="color:#0563C1">mapril@draper.com</span></a>
</span></i><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><i><span style="font-size:9.0pt;color:#1F497D">O # 617-258-1613 C # 617-455-1596</span></i><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><i><span style="font-size:9.0pt;color:#1F497D"><a href="http://www.draper.com/"><span style="color:#0563C1">www.draper.com</span></a></span></i><o:p></o:p></p>
<p class="MsoNormal"><span style="color:black"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:black"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:black"> </span><o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><b>From:</b> labnetwork
<a href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a>
<b>On Behalf Of </b>Iulian Codreanu<br>
<b>Sent:</b> Friday, July 9, 2021 10:38 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Dry pumps on ALD systems?<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt">Hi Mac,<br>
<br>
Our FlexAL came with an Adixen ADS 602P four years ago. At some point the service engineer had to adjust a breaker inside the tool's power box to allow the pump to draw more current at startup.<br>
<br>
Cheers,<br>
<br>
Iulian<br>
<br>
<br>
<o:p></o:p></p>
<pre>iulian Codreanu, Ph.D.<o:p></o:p></pre>
<pre>Director, Nanofabrication Facility<o:p></o:p></pre>
<pre>University of Delaware<o:p></o:p></pre>
<pre>Harker ISE Lab, Room 163<o:p></o:p></pre>
<pre>221 Academy Street<o:p></o:p></pre>
<pre>Newark, DE 19716<o:p></o:p></pre>
<pre>302-831-2784<o:p></o:p></pre>
<pre><a href="http://udnf.udel.edu">http://udnf.udel.edu</a><o:p></o:p></pre>
<div>
<p class="MsoNormal">On 7/8/2021 1:56 PM, Mac Hathaway wrote:<o:p></o:p></p>
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<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal" style="margin-bottom:12.0pt">Hello Folks,<br>
<br>
I'm wondering: how many of you have tried a dry pump on your ALD system?<br>
<br>
If you have, how did it work out?<br>
<br>
If you could supply the following details, that would be great:<br>
<br>
ALD system model;<br>
<br>
Dry pump model and CFM;<br>
<br>
How long it's been running that way;<br>
<br>
Any issues you've run in to.<br>
<br>
For background, we have long been working under the assumption that, due to the reactive nature of the ALD precursors, and the abrasive nature of the effluent, PFPE-base wet pumps are the way to go. However, we grow tired of dealing with pump oil and associated
issues, and we're using dry pumps successfully elsewhere in the fab...<br>
<br>
Thanks!<br>
<br>
Mac<br>
<br>
<o:p></o:p></p>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt;line-height:normal">-- <br>
<br>
<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Mac Hathaway</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Senior Process and Systems Engineer</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Harvard Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">11 Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">Cambridge, MA 02138</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in"><span style="font-size:12.0pt;line-height:115%;font-family:"Times New Roman",serif">617-495-9012</span><o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:0in;line-height:normal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> </span><o:p></o:p></p>
</div>
<p class="MsoNormal" style="margin-bottom:12.0pt;line-height:normal"><span style="font-size:12.0pt;font-family:"Times New Roman \,serif""><br>
<br>
</span><o:p></o:p></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
</blockquote>
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<p class="MsoNormal" style="margin-bottom:0in;line-height:normal">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please
immediately notify the sender by replying to this email and immediately destroy all copies of this email.
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