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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Make sure your litho is clean, your C4F8 cycle may be too long or your SF6 cycle is too short.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Julia Aebersold, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">(502) 852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="http://louisville.edu/micronano/"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>N P Vamsi Krishna<br>
<b>Sent:</b> Wednesday, July 21, 2021 4:41 PM<br>
<b>To:</b> Shepard, Jeremiah J <jshepar@purdue.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] ICP STS ASE Issue<o:p></o:p></span></p>
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<b><span style="font-size:10.0pt;color:black">CAUTION:</span></b><span style="font-size:10.0pt;color:black"> This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066">Hi Jerry,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066">As Dave suggested, I would also doubt the Helium leak issue if it's an electrostatic chuck. Try to see if any of the wafer lift pins are bent/protruding out or any silicon particle
is stuck in the wafer lift pins area. Also, see if all the pins are rising and lowering uniformly. You may want to open the box under the chamber and see if the wafer pins are rising and lowering or any of your low-temperature cooling lines are obstructing
the movements. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066">Other things I would check is if the Peak-Peak voltage (Vpp) and the bias voltage are consistent with your previous runs. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066">Hope this helps.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066">Thanks & Regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066">Vamsi<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Verdana",sans-serif;color:#000066"><o:p> </o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">On Wed, Jul 21, 2021 at 10:53 AM Shepard, Jeremiah J <<a href="mailto:jshepar@purdue.edu">jshepar@purdue.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">I am having some trouble determining what this issue is? We have found a bad capacitor in the matching network, and replaced that, thought all was good but now we face this issue. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Now I am having trouble with grass formation on student sample. Anyone know where to look for this kind of thing? Is it just sample recipe or something else perhaps? Any thoughts
are appreciated! Also unsure of what's going on with the carrier wafer around the sample...?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Thanks,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black">Jerry Shepard<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;color:black"><img border="0" width="694" height="576" id="_x0000_i1025" src="cid:image001.png@01D77E5C.90694CB0"><o:p></o:p></span></p>
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<p class="MsoNormal">_______________________________________________<br>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:black">___________________________________________________</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="color:black">N.P. Vamsi Krishna, PhD</span><o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;border:none windowtext 1.0pt;padding:0in">Staff Scientist</span></i></b><o:p></o:p></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:maroon;border:none windowtext 1.0pt;padding:0in">Pritzker School of Molecular Engineering, </span><b><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;border:none windowtext 1.0pt;padding:0in">The
University of Chicago </span></i></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><b><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black;border:none windowtext 1.0pt;padding:0in">Resident </span></i></b><b><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Associate</span></i></b><o:p></o:p></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:maroon;border:none windowtext 1.0pt;padding:0in">Center for Nanoscale Materials, </span><b><i><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Argonne
National Laboratory </span></i></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#201F1E">Phone: 1 (331) 757-8565</span><span style="color:#201F1E"><o:p></o:p></span></p>
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