<div dir="ltr"><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066">Hi Jerry,</div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066">As Dave suggested, I would also doubt the Helium leak issue if it's an electrostatic chuck. Try to see if any of the wafer lift pins are bent/protruding out or any silicon particle is stuck in the wafer lift pins area. Also, see if all the pins are rising and lowering uniformly. You may want to open the box under the chamber and see if the wafer pins are rising and lowering or any of your low-temperature cooling lines are obstructing the movements. </div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066">Other things I would check is if the Peak-Peak voltage (Vpp) and the bias voltage are consistent with your previous runs. </div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066"><br></div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066">Hope this helps.</div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066"><br></div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066">Thanks & Regards,</div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066">Vamsi</div><div class="gmail_default" style="font-family:verdana,sans-serif;color:#000066"><br></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Jul 21, 2021 at 10:53 AM Shepard, Jeremiah J <<a href="mailto:jshepar@purdue.edu">jshepar@purdue.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">




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I am having some trouble determining what this issue is? We have found a bad capacitor in the matching network, and replaced that, thought all was good but now we face this issue. </div>
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Now I am having trouble with grass formation on student sample. Anyone know where to look for this kind of thing? Is it just sample recipe or something else perhaps? Any thoughts are appreciated! Also unsure of what's going on with the carrier wafer around
 the sample...?</div>
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Thanks,</div>
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Jerry Shepard</div>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><font style="font-family:verdana,sans-serif;color:rgb(0,0,102)" size="2"><span style="color:rgb(102,102,102)"><br></span></font><p class="MsoNormal"><span style="color:black">___________________________________________________<u></u><u></u></span></p><p class="MsoNormal"><span style="color:black">N.P.  Vamsi Krishna, PhD</span><u></u></p><p class="MsoNormal"><span style="font-variant:inherit;color:black;font-family:Arial,sans-serif;font-size:10pt;margin:0px;padding:0px;border:0px;font-stretch:inherit;line-height:inherit;vertical-align:baseline"><i><b>Staff Scientist</b></i></span><br></p><p style="margin:0in 0in 0.0001pt;font-size:11pt;font-family:Calibri,sans-serif;color:rgb(32,31,30)"><span style="margin:0px;padding:0px;border:0px;font-style:inherit;font-variant:inherit;font-weight:inherit;font-stretch:inherit;font-size:10pt;line-height:inherit;font-family:Arial,sans-serif;vertical-align:baseline;color:maroon;background-image:initial;background-position:initial;background-repeat:initial">Pritzker School of Molecular Engineering, </span><span style="margin:0px;padding:0px;border:0px;font-variant:inherit;font-stretch:inherit;font-size:10pt;line-height:inherit;font-family:Arial,sans-serif;vertical-align:baseline;color:black"><i><b>The University of Chicago </b></i></span></p><p style="margin:0in 0in 0.0001pt"><span style="color:black;font-family:Arial,sans-serif;font-size:10pt;margin:0px;padding:0px;border:0px;font-variant:inherit;font-stretch:inherit;line-height:inherit;vertical-align:baseline"><i><b>Resident </b></i></span><font color="#000000" face="Arial, sans-serif"><span style="font-size:13.3333px"><b><i>Associate</i></b></span></font></p><p style="margin:0in 0in 0.0001pt;font-size:11pt;font-family:Calibri,sans-serif;color:rgb(32,31,30)"><span style="margin:0px;padding:0px;border:0px;font-style:inherit;font-variant:inherit;font-weight:inherit;font-stretch:inherit;font-size:10pt;line-height:inherit;font-family:Arial,sans-serif;vertical-align:baseline;color:black"><span style="color:rgb(128,0,0);font-size:13.3333px">Center for Nanoscale Materials, </span></span><b style="font-size:13.3333px;color:black;font-family:Arial,sans-serif"><i>Argonne National Laboratory </i></b></p><p style="margin:0in 0in 0.0001pt;color:rgb(32,31,30)"><font face="Arial, sans-serif"><span style="font-size:13.3333px">Phone: 1 (331) 757-8565</span></font></p></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div>