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Ok so here are my process parameters:</div>
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#1 Recipe (this is the "standard recipe" for users)</div>
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10 second Etch / 10 second Dep</div>
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30 mTorr Etch pressure / 50 mTorr Dep pressure</div>
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1000 watts Etch coil / 1000 watts Dep coil</div>
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10 watts Etch Platen Hf / 0 watts Dep Platen Hf</div>
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250 sccm Sf6 with 30 sccm O2 Etch gas / 100 sccm C4F8 Dep gas</div>
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#2 Recipe (This is not standard but is still producing grass)</div>
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5 second Etch / 5 second Dep</div>
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25 mTorr Etch pressure / 25 mTorr Dep pressure</div>
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450 watts Etch coil / 800 watts Dep coil</div>
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13 watts Etch Platen Hf / 0 watts Dep Platen Hf</div>
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85 sccm Sf6 with 8.5 O2 Etch gas / 130 sccm C4F8 Dep gas</div>
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<span style="background-color:rgb(255, 255, 255);display:inline !important">Etch and tune caps are Auto tuned so I'm not sure how to adjust these if possible.</span><br>
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<span style="background-color:rgb(255, 255, 255);display:inline !important">Thanks,</span></div>
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<span style="background-color:rgb(255, 255, 255);display:inline !important">Jerry</span></div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" color="#000000" style="font-size:11pt"><b>From:</b> Bruce Tolleson <betemc@rit.edu><br>
<b>Sent:</b> Thursday, July 22, 2021 7:58 AM<br>
<b>To:</b> Shepard, Jeremiah J <jshepar@purdue.edu><br>
<b>Subject:</b> RE: ICP STS ASE Issue</font>
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This is DRIE? Is the carrier made of Silicon with no capping layer of metal (this is what it appears to be). If that is the case, there is the (big) problem: DRIE is extremely dependent on exposed silicon area, so having a massive amount of silicon available would
certainly cause strange things like this. </p>
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<span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Bruce E. Tolleson</span></p>
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<span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Rochester Institute of Technology</span></p>
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<span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627</span></p>
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<span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">Rochester, NY 14623-5604</span></p>
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<span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D">(585) 478-3836</span></p>
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<span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:navy"><img width="90" height="60" id="x_Picture_x0020_1" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg" style="width:.9375in; height:.625in" data-outlook-trace="F:1|T:1" src="cid:image001.jpg@01D77ECF.5823A4E0"></span><span style="font-size:11.0pt; font-family:"Calibri",sans-serif; color:#1F497D"></span></p>
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<b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt; font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Shepard, Jeremiah J<br>
<b>Sent:</b> Wednesday, July 21, 2021 9:44 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] ICP STS ASE Issue</span></p>
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<span style="font-family:"Calibri",sans-serif; color:black">I am having some trouble determining what this issue is? We have found a bad capacitor in the matching network, and replaced that, thought all was good but now we face this issue. </span></p>
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<span style="font-family:"Calibri",sans-serif; color:black">Now I am having trouble with grass formation on student sample. Anyone know where to look for this kind of thing? Is it just sample recipe or something else perhaps? Any thoughts are appreciated! Also
unsure of what's going on with the carrier wafer around the sample...?</span></p>
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<span style="font-family:"Calibri",sans-serif; color:black">Thanks,</span></p>
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<span style="font-family:"Calibri",sans-serif; color:black">Jerry Shepard</span></p>
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<span style="font-family:"Calibri",sans-serif; color:black"><img width="694" height="576" id="x__x0000_i1025" style="width:7.2291in; height:6.0in" data-outlook-trace="F:1|T:1" src="cid:image002.png@01D77ECF.5823A4E0"></span></p>
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