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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Here is what you should be using anyway. Most of the wetox processes from wafer producers use this technology.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Fatsr, more uniform growth. Safer, etc.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial","sans-serif";color:#1F497D">Thank you,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial","sans-serif";color:#0F243E">Keith F. Barnes<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Arial","sans-serif";color:#1F497D">Sales Representative<o:p></o:p></span></p>
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<a href="mailto:kbarnes@semitorrinc.com">kbarnes@semitorrinc.com</a> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black">______________________________________________________________________________<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>mark cooper<br>
<b>Sent:</b> Tuesday, August 3, 2021 8:36 PM<br>
<b>To:</b> Paolini, Steven; Scott Blondell; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Pyrogenic internal torch<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">Back in the day Bruce, Thermco, MRL and Persys all had multiple versions of the external torch hardware, and some were integrated well, and some were clunky.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">The original J hook actually had the flame active in the source zone and could create 10 degree shift in the temperature as the flame tickled the back of the tube. The external
torch designs cut down the source zone delta t to a degree or less in process conditions. Huge improvement. J hook had reliability issues with the flame and flow patterns, small flow changes effected the flame direction and quality.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">You need to maintain your flow ratio of H2 O2 to 1.88 or less, and most of the torches will allow you to wait 10 seconds to see the flame after gasses flow.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">The MRL and the Thermco style both use a reliable Honeywell uv sensor for flame sense, pretty reliable.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">MRL designs have a jacket around the torch to help manage heat. Persys use a lot of CDA to cool the torch, and Thermco design requires a scavenger to pull the excess heat out
of the source cabinet. Thermco did make a water cooled unit that was pretty fancy, and wasnt used often.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">Bruce had its own design, and migrated to a version of the persys torch hardware with its 5600 model external torch control system
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">Persys uses lamps technology to light the flame, and once the flame is set, the lamps turn off.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">If your furnace is profiled, it should be able to obtain 1% or 2 % process uniformity using the external torch designs.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">Expertech does have product knowledge across all of the versions, and can help guide you. Feel free to reach out directly and we can get you back on track. We do offer new, remanufactured,
and subject to availability used working parts. I cant say we support every torch perturbation from in 40 years but we are qualified historians and know the evolution.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black">thanks<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri","sans-serif";color:black"><o:p> </o:p></span></p>
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<p><span style="font-family:"Calibri","sans-serif";color:black"> </span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
<p style="text-align:justify"><b><i><span style="font-size:13.5pt;font-family:"Arial","sans-serif";color:navy">Mark Cooper</span></i></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
<p style="text-align:justify"><b><i><span style="font-family:"Calibri","sans-serif";color:black">General Manager</span></i></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p style="text-align:justify"><b><i><span style="font-size:13.0pt;font-family:"Calibri","sans-serif";color:navy"><a href="mailto:markc@exper-tech.com" target="_blank">markc@exper-tech.com</a></span></i></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black"> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Paolini,
Steven <spaolini@cns.fas.harvard.edu><br>
<b>Sent:</b> 03 August 2021 14:00<br>
<b>To:</b> Scott Blondell <spb1699@rit.edu>; labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Pyrogenic internal torch</span> <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Scott,<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> Over the years, I have had great results with MRL external torches. The main advantage is being able to see the combustion and whether or not the torch depth is correct.
The other big advantage is being able to use a flame detector that will shut off the H2 flow in a couple of seconds (adjustable) to avoid injecting gas continuously into a cold torch. You may be seeing uniformity issues with the coaxial if you have tiny air
leaks being pulled into the tube from the ground glass joints. Are you using Teflon seals? In any event, please ensure that you are running the H2/O2 mix Oxygen rich to prevent accumulating H2 downstream.<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> Equipment Dood<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
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<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">Steve Paolini</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">Principal Equipment Engineer</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">Harvard University Center for Nanoscale Systems</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">11 Oxford St.</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">Cambridge, MA 02138</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">617- 496- 9816</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">spaolini@cns.fas.harvard.edu</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif"">https://link.edgepilot.com/s/b7b03dc8/ZCMBBvoxO0m0LqkUTi5CxA?u=http://www.cns.fas.harvard.edu/</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
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<p class="xmsonormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Scott Blondell<br>
<b>Sent:</b> Tuesday, August 03, 2021 3:50 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Pyrogenic internal torch<o:p></o:p></span></p>
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<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Greetings Labnetters,<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">We’re in the process of tweaking our wet ox process. Hardware changes provided an opportunity to consider
<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">alternatives to our current internal “candy cane” torch arrangement employed in several tubes. Currently running 6” silicon<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">in 205/211mm quartz w/candy cane torch. This doesn’t give us the luxury of a simple visual inspection without pulling the tube.<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">A straight coaxial torch is being qualified now, and it’s presenting some challenges. Growth rates are lower than predicted and
<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">across boat uniform is >6%. <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Polling the audience: what are your preferences – cane v straight?; straight torch design details/vendors?; gas flows?<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">There’s a lot of knobs to turn – at 2/runs per day it’s slow to fine tune.<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">We do have an MRL external torch that served us well for lower temp processes. Space and budget precludes using it in<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">multiple tubes.<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Appreciate any feedback, tips or outright opinions.<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Regards,<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Scott P. Blondell<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Fac. Mgr.<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">RIT SMFL<o:p></o:p></span></p>
<p class="xmsonormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">315.738.4073<o:p></o:p></span></p>
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<p>Expert Semiconductor Technology, Inc.<o:p></o:p></p>
<p>Phone: (831) 439-9300<o:p></o:p></p>
<p>Fax: (831) 439-8139<o:p></o:p></p>
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<p><span style="font-size:9.0pt;font-family:"Arial","sans-serif"">mark cooper<o:p></o:p></span></p>
<p><span style="font-size:9.0pt;font-family:"Arial","sans-serif"">Expert Semiconductor Technology, Inc.<o:p></o:p></span></p>
<p><span style="font-size:9.0pt;font-family:"Arial","sans-serif"">Phone: (831) 439-9300<o:p></o:p></span></p>
<p><span style="font-size:9.0pt;font-family:"Arial","sans-serif"">Fax: (831) 439-8139<o:p></o:p></span></p>
<p><span style="font-size:9.0pt;font-family:"Arial","sans-serif"">This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email
by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments.<o:p></o:p></span></p>
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