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<p class="MsoNormal"><span style="color:#1F497D">How many tubes are you looking to replace?
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Back in 2014 we researched LPCVD/Diffusion.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Expertech , makes single tube that you can stack good option<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Centrotherm<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Sandvik/MRL<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Tempress<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Thermco<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Tylan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We chose Sandvik/MRL due to the fact that we had MRL tubes and had a good relationship with local sales/service. We bought a 3 stack for Oxide anneal and a 3 stack LPCVD both stacks has loaders, it was north
of a $1M ,but right now prices are sky high and lead times are really out there so be prepared.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard Morrison<o:p></o:p></p>
<p class="MsoNormal">PMTS<o:p></o:p></p>
<p class="MsoNormal">Draper Laboratory<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge Ma 02139<o:p></o:p></p>
<p class="MsoNormal">Office: 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">Cell: 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Bruce Tolleson<br>
<b>Sent:</b> Tuesday, August 31, 2021 8:24 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] LPCVD for college lab<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"> We are looking at replacing our older LPCVD system with a new system. We have looked at several systems but most are production units. We are a research and undergraduate lab. Footprint, cost and ease of operation are more of a priority
than throughput.<o:p></o:p></p>
<p class="MsoNormal">Does anyone recommend a new system that would fit better? <o:p>
</o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(585) 478-3836<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:navy"><img width="90" height="60" style="width:.9375in;height:.625in" id="Picture_x0020_1" src="cid:image001.jpg@01D79E68.996305F0" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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