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<p>BIG thanks to all who responded. We have lots of avenues to
explore.</p>
<p>Mario<br>
</p>
<div class="moz-cite-prefix">On 2021-09-10 6:44 a.m., Jim Carroll
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:CACVEG9g5m55YZzdU3PA7J1t67DXznwkGD+nXczGXstt5y51=0g@mail.gmail.com">
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<div class="gmail_default"
style="font-family:verdana,sans-serif;color:#000000">Hello
Mario,</div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;color:#000000"><br>
</div>
<div class="gmail_default"
style="font-family:verdana,sans-serif;color:#000000">We also
dice relatively thick glass and quartz substrates. As already
mentioned, minimizing your blade exposure and a multipass
cutting strategy are a must for these types of substrates. We
may also have additional recommendations depending on the
specific blades, flanges, and tape (sizes, part numbers) you
are using.t</div>
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<div><font size="2" face="verdana,
sans-serif"><font color="#000000">Thanks,</font></font></div>
<div><font size="2" face="verdana,
sans-serif"><font color="#000000">Jim
Carroll<br>
</font><b style="color:rgb(0,0,0)">PhotomaskPORTAL</b><font
color="#000000"><br>
</font></font></div>
<div><font color="#000000"><font size="2"
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<div dir="ltr" class="gmail_attr">On Fri, Sep 10, 2021 at 6:47
AM N Shane Patrick <<a href="mailto:patricns@uw.edu"
moz-do-not-send="true">patricns@uw.edu</a>> wrote:<br>
</div>
<blockquote class="gmail_quote" style="margin:0px 0px 0px
0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
<div style="overflow-wrap: break-word;">Hello Mario,
<div><br>
</div>
<div>Blade breakage with harder materials is always a
challenge, but we’ve found Disco’s engineers to be quite
responsive to dicing challenges and suggestions to solve
them.</div>
<div><br>
</div>
<div>For our in-house cutting on our DAD321, we’ve found
different blades are needed for glass vs. Quartz/sapphire.</div>
<div><br>
</div>
<div>We usually source our blades directly from Disco rather
than thermocarbon (though we’ve used them in the past).
Our current recommendations for the most common materials
are the following:</div>
<div><br>
</div>
<div>
<div title="Page 10">
<div>
<div>
<p><span style="font-size:11pt;font-family:Calibri">Silicon:
ZH05 series</span></p>
<p><span style="font-size:11pt;font-family:Calibri">Glass/Quartz:
R07 series</span></p>
<p><font face="Calibri"><span
style="font-size:14.6667px">Sapphire:</span><span
style="font-size:11pt"> VT07 series</span></font></p>
</div>
</div>
</div>
</div>
<div>
<div><br>
</div>
<div>We’ve also found switching to a multipass cutting
strategy can help with harder/thicker materials. We also
dice on Blue Tape for the vast majority of this work.</div>
<div><br>
</div>
<div>My personal experience with bending/breaking has been
that the blade is likely not rigorous enough to stand up
to the hardness of the material being cut, so a slight
deflection seems to become unrecoverable and eventually
the blade deviates enough to break. I would, again
however, strongly suggest getting in touch with Disco to
discuss your particularly challenges and needs as,
again, we’ve had very good response from them. I’m
afraid I don’t have much in the way of direct
recommendations, however, if you need to continue using
thermocarbon blades.</div>
<div><br>
</div>
<div>Good Luck.</div>
<div><br>
</div>
<div>
<div dir="auto"
style="color:rgb(0,0,0);letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none">
<div>N. Shane Patrick<br>
Manager, Lab Operations and Safety<br>
Electron Beam Lithography<br>
Washington Nanofabrication Facility (WNF) <br>
National Nanotechnology Coordinated Infrastructure
(NNCI)<br>
University of Washington - NanoES<br>
Fluke Hall 129, Box 352143<br>
(206) 221-1045<br>
<a href="mailto:patricns@uw.edu" target="_blank"
moz-do-not-send="true">patricns@uw.edu</a><br>
<a href="http://www.wnf.washington.edu/"
target="_blank" moz-do-not-send="true">http://www.wnf.washington.edu/</a></div>
</div>
</div>
<div><br>
<blockquote type="cite">
<div>On Sep 9, 2021, at 3:52 PM, Beaudoin, Mario <<a
href="mailto:beaudoin@physics.ubc.ca"
target="_blank" moz-do-not-send="true">beaudoin@physics.ubc.ca</a>>
wrote:</div>
<br>
<div>
<div> We are having issues with cutting glass/quartz
or alumina wafers with our Disco DAD3240 dicing
saw<br>
<p><span
style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><font>We’re
using composite Thermocarbon blades @ 20K
rpm and tried feed speeds ranging between
0.5-5 mm/sec. Sample thickness varies but
even for thinner ones (500-700 um) we’re
having a problem that the blade breaks.
Looks like the blade trajectory is bending
during the cut and this causes catastrophic
damage to the blade. Why this bending occurs
is not clear. Maybe the problem is in the
blue tape we use to secure samples, but we
don’t observe any apparent displacement of
the sample on the film. <br>
</font></span></p>
<p><span
style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><font>Anyone
else having similar issues? Any
suggestions?</font></span></p>
<p><span
style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><font>Regards,</font></span></p>
<p><span
style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><font>Mario<br>
</font></span></p>
<div>-- <br>
<span
id="gmail-m_4995696059474652633cid:part1.7D57B750.7039D763@physics.ubc.ca"><Mario
Beaudoin SBQMI sig 2.jpg></span></div>
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