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<p class="MsoNormal">My colleague Sigurd Wagner retired a few years ago and his lab is being cleaned out for new faculty.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">What may have been the most productive research tool in the world for amorphous silicon (a-Si) and related research for the past 25 years is available for FREE for a non-profit institution. The machine is a 4-chamber PECVD for depositing
stacks for solar cells or for a-Si TFT’s. <b>The catch is you have to remove it from a lab in Princeton University (New Jersey, USA) by mid October.</b><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">An overview is below, including links to many pictures. It is in good working condition.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">If interested, email me (Jim Sturm, <a href="mailto:sturm@princeton.edu">
sturm@princeton.edu</a>, 609 258 5610) immediately and also Sigurd Wagner (<a href="mailto:wagner@princeton.edu">wagner@princeton.edu</a>).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Please feel free to forward to anyone who might be interested.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Sincerely, <o:p></o:p></p>
<p class="MsoNormal">Prof. Jim Sturm, <o:p></o:p></p>
<p class="MsoNormal">Princeton University<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I hope the links work….<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="margin-left:.25in">Links: Pictures of the machine:<o:p></o:p></p>
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraphCxSpFirst" style="margin-bottom:8.0pt;margin-left:.25in;mso-add-space:auto;line-height:105%;mso-list:l3 level1 lfo3">
Front view of the 4 chambers (the one left of center with the vertical cylinder is the load-chamber; a door lifts up to load samples). The sample transfers laterally to the various deposition chambers.
<a href="https://drive.google.com/file/d/1RPwZT1vsDFeHbSPbJNnPWoDxc8eqg5D4/view?usp=sharing">
https://drive.google.com/file/d/1RPwZT1vsDFeHbSPbJNnPWoDxc8eqg5D4/view?usp=sharing</a><o:p></o:p></li></ul>
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:.25in;mso-add-space:auto;line-height:105%;mso-list:l5 level1 lfo6">
Rear view of the 4 chambers: <a href="https://drive.google.com/file/d/1VH5HmW2YhCAZdsJpnJuF-UFRy8f2p1MR/view?usp=sharing">
https://drive.google.com/file/d/1VH5HmW2YhCAZdsJpnJuF-UFRy8f2p1MR/view?usp=sharing</a><o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:.25in;mso-add-space:auto;line-height:105%;mso-list:l5 level1 lfo6">
Control station: <a href="https://drive.google.com/file/d/1xkoXB3IPC3mZyNoKPDjOEtXOQCgUpU5n/view?usp=sharing">
https://drive.google.com/file/d/1xkoXB3IPC3mZyNoKPDjOEtXOQCgUpU5n/view?usp=sharing</a><o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:.25in;mso-add-space:auto;line-height:105%;mso-list:l5 level1 lfo6">
Roots blower stacks (2): <a href="https://drive.google.com/file/d/1FN32VVxpHd3tLEDJ48VB3rcxqFbzE4nY/view?usp=sharing">
https://drive.google.com/file/d/1FN32VVxpHd3tLEDJ48VB3rcxqFbzE4nY/view?usp=sharing</a><o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:.25in;mso-add-space:auto;line-height:105%;mso-list:l5 level1 lfo6">
Roughing pumps (3): <a href="https://drive.google.com/file/d/1RpPS6LIK_hiaeJqw8r3socSp_OKMkdKg/view?usp=sharing">
https://drive.google.com/file/d/1RpPS6LIK_hiaeJqw8r3socSp_OKMkdKg/view?usp=sharing</a><o:p></o:p></li><li class="MsoListParagraphCxSpLast" style="margin-bottom:8.0pt;margin-left:.25in;mso-add-space:auto;line-height:105%;mso-list:l5 level1 lfo6">
Mass Flow controller and gas switching box (all gas plumbing has VCR connections)
<a href="https://drive.google.com/file/d/1t1OcjqREwVNOkwBMw-fWTwzbw3QomC8X/view?usp=sharing">
https://drive.google.com/file/d/1t1OcjqREwVNOkwBMw-fWTwzbw3QomC8X/view?usp=sharing</a><o:p></o:p></li></ul>
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Overview: <o:p></o:p></p>
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<a href="https://drive.google.com/file/d/1mZty5oqI3HCWbnK5PDZIyI8k4qvVEwsv/view?usp=sharing">https://drive.google.com/file/d/1mZty5oqI3HCWbnK5PDZIyI8k4qvVEwsv/view?usp=sharing</a><o:p></o:p></p>
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Overview:<o:p></o:p></p>
<p class="MsoNormal">4- chamber PECVD for amorphous silicon TFT’s and solar cell research.<o:p></o:p></p>
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4 chamber machine for amorphous Si (a-Si) and amorphous SiGe alloy (a-SiGe) research.<o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
1 load chamber, and then sample is transferred horizontally to 1 of 3 deposition chambers.<o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
Sample is glass or plastic mounted on glass ~ 3” (75 mm) x 3”. It sits in a platter (~12” x 12”) that is transferred, with a hole in the bottom for deposition.<o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
13.5 MHz plasma, diode-configuration<o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
Originally configured for solar cell research, with chambers for (i) a-Si(Ge), (ii) n+ a-Si(Ge), (iii) p+-Si(Ge)<o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
Used for past 20 years primarily for a-Si thin film transistor on glass and flexible plastic. The p+ Si(Ge) chamber was converted to SiNx deposition for a gate dielectric.
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Built late 1990s by Innovative Systems Engineering for the lab of Sigurd Wagner, a pioneer in fundamentals of a-SiGe for solar cells and then flexible TFT for large-area and flexible electronics. 1000’s of samples and 100’s of papers and dozens of PhD’s
came from this machine. Search on papers for “Sigurd Wagner” at Princeton from ~1995 to ~2017<o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
Gas flow and power control are automated, sample transfer from chamber to chamber is manual<o:p></o:p></li><li class="MsoListParagraphCxSpMiddle" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
2 roots blower stacks for process exhaust plus 3 separate roughing pumps<o:p></o:p></li><li class="MsoListParagraphCxSpLast" style="margin-bottom:8.0pt;margin-left:0in;mso-add-space:auto;line-height:105%;mso-list:l0 level1 lfo9">
Machine is functional but has not run in ~5 years. Process gases are disconnected and machine has been purged out.<o:p></o:p></li></ul>
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