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<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">The Draper clean room is 7700sqft of mixed use cleanrooms . Our makeup air unit provides 22000 cfm or 68F +-2F and 45% RHM +-3%. It uses a steam generator with a dispersion coil in the main
duct to add steam in the winter and a cooling coil to reduce RH in the summer. When we designed the cleanroom we asked this forum what our RH spec should be and it was clear that 45% was the preferred RH.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Richard Morrison<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">PMTS<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Cambridge Ma 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Office: 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Cell: 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt">From:</span></b><span style="font-size:11.0pt"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Aju Jugessur<br>
<b>Sent:</b> Monday, October 11, 2021 3:50 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Cc:</b> labnetwork <labnetwork-bounces@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] ISO 5 Cleanroom RH<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Hello all,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I am reaching out to obtain some inputs on your cleanroom relative humidity (RH).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We have designed our ISO 5 cleanroom with RH (40 +/- 5 %). Among other cleanroom fabrication processes, the cleanroom will support EBeam nanolithography work.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">The system to control RH within the required specs is quite expensive and I would like to know if anyone in the network is able to relax the RH specs, without compromising processes OR have alternative ways
of locally controlling the RH, say in the actual litho. bay areas or hoods?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Your inputs are very much appreciated.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Aju<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Aju Jugessur Ph.D. IEEE Sr. Member<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Director, Colorado Shared Instrumentation
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">in Nanofabrication and Characterization (COSINC) Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Member of Inclusive Culture Council (ICC)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Member of Engineering Staff Council (ESC)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;color:#1F497D">University of Colorado Boulder | </span></b><b><span style="font-size:11.0pt;color:#B39C11">College of Engineering & Applied Science</span></b><span style="font-size:11.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#232333;background:white">Personal Zoom link:
<a href="https://cuboulder.zoom.us/my/ajugessur">https://cuboulder.zoom.us/my/<b>ajugessur</b></a></span><b><span style="font-size:11.0pt;color:#232333"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><a href="http://www.colorado.edu/facility/cosinc">www.colorado.edu/facility/cosinc</a><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><img border="0" width="150" height="56" style="width:1.5625in;height:.5833in" id="Picture_x0020_1" src="cid:image001.png@01D7BF3E.E5FB7AE0" alt="signature_1686830665"></span><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"> </span><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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