<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto"><div dir="ltr"><meta http-equiv="content-type" content="text/html; charset=utf-8"><div dir="ltr"><meta http-equiv="content-type" content="text/html; charset=utf-8">Aju <div><br></div><div>As Rich said, I usually target 45+/-5% RH. You can use your litho/EBL suites to drive localized humidification. Highly recommend, putting in the infrastructure if you can into the rooftop air handlers. If you need dehumidification then do it in the air handler at the first stage. You will almost certainly always be demanding humidification of the litho space as the humidity diffuses into adjacent areas/bays. If humidifying in the air handler make sure you put in at least an RO system to minimize humidifier maintenance. </div><div><br></div><div>A lower cost/minor mod solution can be more localized using in duct steam grids. If using localized generators, I highly recommend using clean steam fed by your UPW loop as servicing of standard humidifiers using city water is a nightmare due to mineral deposits - speaking from experience here. DRISTEEM is one vendor that makes all stainless construction units that can handle the corrosive nature of the UPW and will drive demand based on localized sensors in the litho bay vs. added cost and complexity of adding controls into your BMI infrastructure. </div><div><br></div><div>Best,</div><div><br><div dir="ltr"><span style="background-color: rgba(255, 255, 255, 0);">Dr. Michael Khbeis</span><div><span style="background-color: rgba(255, 255, 255, 0);">(C) <a href="tel:443.254.5192" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="1/1" style="-webkit-text-decoration-color: rgba(0, 0, 0, 0.258824);">443.254.5192</a><br></span></div></div><div dir="ltr"><br><blockquote type="cite">On Oct 12, 2021, at 4:36 AM, Aju Jugessur <Aju.Jugessur@colorado.edu> wrote:<br><br></blockquote></div><blockquote type="cite"><div dir="ltr">
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:-webkit-standard;
panose-1:2 11 6 4 2 2 2 2 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:12.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:12.0pt;
font-family:"Calibri",sans-serif;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style>
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Hello all,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I am reaching out to obtain some inputs on your cleanroom relative humidity (RH).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We have designed our ISO 5 cleanroom with RH (40 +/- 5 %). Among other cleanroom fabrication processes, the cleanroom will support EBeam nanolithography work.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">The system to control RH within the required specs is quite expensive and I would like to know if anyone in the network is able to relax the RH specs, without compromising processes OR have alternative ways
of locally controlling the RH, say in the actual litho. bay areas or hoods?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Your inputs are very much appreciated.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Aju<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Aju Jugessur Ph.D. IEEE Sr. Member<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Director, Colorado Shared Instrumentation
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">in Nanofabrication and Characterization (COSINC) Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Member of Inclusive Culture Council (ICC)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">Member of Engineering Staff Council (ESC)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;color:#1F497D">University of Colorado Boulder | </span></b><b><span style="font-size:11.0pt;color:#B39C11">College of Engineering & Applied Science</span></b><span style="font-size:11.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#232333;background:white">Personal Zoom link:
<a href="https://cuboulder.zoom.us/my/ajugessur"><span style="color:#0563C1">https://cuboulder.zoom.us/my/<b>ajugessur</b></span></a></span><b><span style="font-size:11.0pt;color:#232333"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><a href="http://www.colorado.edu/facility/cosinc"><span style="color:#0563C1">www.colorado.edu/facility/cosinc</span></a><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black"></span></p><div><image001.png></div><span style="color:black"><o:p></o:p></span><p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"> </span><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span style="color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<span>_______________________________________________</span><br><span>labnetwork mailing list</span><br><span>labnetwork@mtl.mit.edu</span><br><span>https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span><br></div></blockquote></div></div></div></body></html>