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<div>Hi Eva,</div>
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<div dir="auto">It looks like that there is dendritic cristallisation in your defects.</div>
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<div dir="auto">Was the subtrate immersed in RCA 1 or BOE or any solution involving a salt? If so, my first thought is that the substrate was not rinsed properly prior spin coating.</div>
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<div dir="auto">Best,</div>
<div dir="auto">Lino Eugene<br>
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<div class="gmail_quote">On Oct. 23, 2021 07:46, Aaron Hryciw <ahryciw@ualberta.ca> wrote:<br type="attribution">
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<div dir="ltr">Hi Eva,
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<div>Out of curiosity, did you previously inspect the wafer in an optical microscope using a higher-mag objective than the one used to capture the images? Given how circular these defects look, and the concentric pattern, my guess is that this is a heating
effect, the result of staying too long in one position with a high light intensity.</div>
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<div>Cheers, </div>
<div> </div>
<div> – Aaron</div>
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<div dir="ltr">On Fri, Oct 22, 2021 at 5:55 PM Eva Rose <<a href="mailto:eva.rose@gno.de">eva.rose@gno.de</a>> wrote:<br>
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<div>Dear all,<br>
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did anybody ever see any defects like this on the resist surface after resist spinning. The diameter varies from about 20um to over 150um.<br>
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<img src="cid:17caaeab150a3a20b871" alt=""><br>
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<img src="cid:17caaeab15074e3f89d2" alt=""><br>
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Any idea what the reason could be?<br>
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Best regards,<br>
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Eva<br>
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