<div><div dir="auto">We have seen something like this - but we never investigated further where they came from, because yield was good enough even with these relatively sparse spots. </div><div dir="auto">Some looked like yours, others had even further delamination as pictured below. </div><div dir="auto"><br></div><div dir="auto">This was PR spun onto Gold, so I assumed that we had PR delaminating from the Au or Au delaminating from the substrate. I believe we only noticed them after develop, so at the time I hypothesized that the squiggly lines are something like developer creeping under the resist. </div><div dir="auto">However the jagged lines are indicative of thin-film stress, so it could instead be the Au (I believe it was TiAu) delaminating from the substrate. I imagine we had some relatively large, sparse particles on the wafer before our TiAu EBeam deposition, which caused slight shadowing around them. Then either the PR solvent, or Stress from baking, or liquid immersion developing caused delamination at those defects. Those are my guesses. </div><div dir="auto"><br></div><div dir="auto">I have this printed in my office - mistakes sometimes make excellent pictures!</div></div><div><div dir="auto">— Demis</div><div dir="auto"><br></div><div dir="auto"><div><img src="cid:17cadb73cc9b55771e1" style="max-width: 100%;"></div><br></div><div dir="auto"><br></div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, Oct 22, 2021 at 16:54 Eva Rose <<a href="mailto:eva.rose@gno.de" target="_blank">eva.rose@gno.de</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)">
<div>
Dear all,<br>
<br>
<br>
did anybody ever see any defects like this on the resist surface
after resist spinning. The diameter varies from about 20um to over
150um.<br>
<br>
<img src="cid:17cadb36f8875bd82f11" alt="" style="width:387px;max-width:100%"><br>
<br>
<img src="cid:17cadb36f889c92aeef2" alt="" style="width:387px;max-width:100%"><br>
<br>
<br>
Any idea what the reason could be?<br>
<br>
<br>
Best regards,<br>
<br>
Eva<br>
<br>
</div>
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</blockquote></div></div>
</div>-- <br><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><font size="4" face="georgia, serif">-- Demis</font></div><div><br></div><div style="color:rgb(136,136,136);font-family:"times new roman",serif"><font size="4">----------------------------------------</font></div><div style="color:rgb(136,136,136)"><i style="font-family:"times new roman",serif"><font size="4"> Process Scientist Manager</font></i><br></div><div style="color:rgb(136,136,136);font-family:"times new roman",serif"><font size="4"> <font color="#1155cc"><a href="https://www.nanotech.ucsb.edu/" style="color:rgb(17,85,204)" target="_blank"><i>UCSB Nanofabrication Facility</i></a></font></font></div><div style="color:rgb(136,136,136);font-family:"times new roman",serif"><font size="4"> <a href="https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John" style="color:rgb(17,85,204)" target="_blank">Demis' Contact Info</a></font></div><div style="color:rgb(136,136,136)"><div style="font-family:"times new roman",serif"><font size="4">----------------------------------------</font></div></div><i style="font-family:"times new roman",serif;color:rgb(136,136,136)">Reminder</i><span style="font-family:"times new roman",serif;color:rgb(136,136,136)">: The NanoFab has a </span><a href="https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab" style="font-family:"times new roman",serif;color:rgb(17,85,204)" target="_blank"><span>publications</span> <span>policy</span></a> </div></div>