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/* Font Definitions */
@font-face
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Typical air bubbles in the resist. How is being dispensed?<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Bruce Tolleson<br>
<b>Sent:</b> Tuesday, November 2, 2021 4:51 PM<br>
<b>To:</b> Teynor, William A. <wteynor@draper.com>; Lino Eugene <lino.eugene@uwaterloo.ca>; Eva Rose <eva.rose@gno.de><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Defects after resist spinning<o:p></o:p></span></p>
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<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616">[External Email]</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Are you using EBR when coating the wafer? EBR droplets from a leak could cause this.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">(585) 478-3836<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Teynor, William A.<br>
<b>Sent:</b> Tuesday, November 2, 2021 12:04 PM<br>
<b>To:</b> Lino Eugene <<a href="mailto:lino.eugene@uwaterloo.ca">lino.eugene@uwaterloo.ca</a>>; Eva Rose <<a href="mailto:eva.rose@gno.de">eva.rose@gno.de</a>><br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Defects after resist spinning<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Eva,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Given the size of the defects and the lack of a comet tail in the resist, it looks like small droplets landed on the photoresist film near the end or after the
wafer finished spinning. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The droplets could be from aerosolized photoresist/solvent micro droplets generated during spin coating.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Another possibility would be splashed acetone droplets, from wetting a fabwipe in close proximity.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The defects appears to be surface wrinkling whose pattern is the result of stress minimization in the photoresist skin as the extra solvent dries.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Bill<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Lino Eugene<br>
<b>Sent:</b> Saturday, October 23, 2021 9:28 AM<br>
<b>To:</b> Eva Rose <<a href="mailto:eva.rose@gno.de">eva.rose@gno.de</a>><br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Defects after resist spinning<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Hi Eva,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">It looks like that there is dendritic cristallisation in your defects.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Was the subtrate immersed in RCA 1 or BOE or any solution involving a salt? If so, my first thought is that the substrate was not rinsed properly prior spin coating.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Best,<o:p></o:p></p>
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<p class="MsoNormal">Lino Eugene<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">On Oct. 23, 2021 07:46, Aaron Hryciw <<a href="mailto:ahryciw@ualberta.ca">ahryciw@ualberta.ca</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal">Hi Eva, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Out of curiosity, did you previously inspect the wafer in an optical microscope using a higher-mag objective than the one used to capture the images? Given how circular these defects look, and the concentric pattern, my guess is that this
is a heating effect, the result of staying too long in one position with a high light intensity.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Cheers, <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"> – Aaron<o:p></o:p></p>
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<p class="MsoNormal"><u><span style="font-size:10.0pt"> </span></u><span style="font-size:10.0pt"> </span><o:p></o:p></p>
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<p style="margin:0in"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Aaron Hryciw, PhD, PEng</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Fabrication Group Manager</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph: 780-940-7938</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ualberta.ca_&d=DwMGaQ&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=jwVJmv8P9ZZF0j7YBbBgOUW1x7LmVyAmivwfPESuCWj5_LcuyzEg9fcL9ma8t82H&s=RxEqn39_jig-awmtnAJ-CxE5SajpfiFBiM5ZLiAhukY&e="><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:#1155CC">www.nanofab.ualberta.ca</span></a><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">
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<p class="MsoNormal">On Fri, Oct 22, 2021 at 5:55 PM Eva Rose <<a href="mailto:eva.rose@gno.de">eva.rose@gno.de</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt">Dear all,<br>
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<br>
did anybody ever see any defects like this on the resist surface after resist spinning. The diameter varies from about 20um to over 150um.<br>
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<img border="0" width="32" height="32" style="width:.3333in;height:.3333in" id="_x0000_i1031" src="cid:17caaeab150a3a20b871"><br>
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<img border="0" width="32" height="32" style="width:.3333in;height:.3333in" id="_x0000_i1030" src="cid:17caaeab15074e3f89d2"><br>
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Any idea what the reason could be?<br>
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<br>
Best regards,<br>
<br>
Eva<o:p></o:p></p>
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