<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=iso-2022-jp">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
span.EmailStyle22
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72">
<div class="WordSection1">
<p class="MsoNormal">Joe,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">What is the humidity of the photo area? <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Jeff<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span lang="FR" style="font-family:"Arial",sans-serif;color:#00BCE4">Jeff Salzmann</span></b><o:p></o:p></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Senior Research Engineer</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Advanced Materials Technology Group</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal" style="line-height:105%;page-break-after:avoid"><b><span style="color:#00A9E0">Integer*
</span></b><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#343434">10000 Wehrle Drive </span>
<o:p></o:p></p>
<p class="MsoNormal"><span style="color:#343434">Clarence, NY, 14031 </span>
<o:p></o:p></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Tel +1 716.759.5796</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Cell +1 716.867.1302</span><o:p></o:p></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#4BACC6"><a href="mailto:Jeffrey.Salzmann@integer.net">Jeffrey.Salzmann@integer.net</a></span><o:p></o:p></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#4BACC6"><a href="http://www.integer.net/">www.integer.net</a></span><o:p></o:p></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#4BACC6"> </span><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#343434">* Integer comprises the following companies: </span></i><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#343434">Greatbatch Medical -$B!>(B Lake Region Medical -$B!>(B Electrochem</span><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Maduzia, Joseph Walter<br>
<b>Sent:</b> Thursday, November 4, 2021 9:59 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] PR bubbles where exposed<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div style="mso-element:para-border-div;border:solid gray 1.0pt;padding:0in 0in 0in 0in;background:#FFEB9C">
<p style="background:#FFEB9C;border:none;padding:0in"><span style="color:black">CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.
</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Hello All!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you again for all your feedback on SiO2 etch around Al. It has been very helpful and we are moving down multiple paths suggested via the Lab Network to try to solve the issue. More to come once we solve it!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have another issue I was hoping for feedback on. We have bubbling in our PR (SPR-220-4.5) (pos tone) that we haven$B!G(Bt been able to track the source of. It only bubbles during exposure and only where it is exposed. Unexposed areas are unaffected.
I$B!G(Bve attached some images of the bubbling where you can see the exposed (lighter) and unexposed (darker) areas. The bubbles are visible to the naked eye. The wafer is silicon w a dry thermally grown SiO2 surface. We typically expose via EV620 mask aligner
with Vac+HardContact. However, even in a flood exposure with the mask just set lightly down it still bubbles. Without a mask there are also bubbles randomly distributed across the wafer, but they don$B!G(Bt get stuck to the mask so they don$B!G(Bt pop. We tried various
pre-bakes, HMDS coat vs not, piranha treat vs not. In the past these bubbles show up, we trial and error to get rid of them and suddenly they disappear. Our process, although seemingly repeatable, does not yield repeatable results.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank You,<o:p></o:p></p>
<p class="MsoNormal"><b><span style="color:#13294B;text-transform:uppercase">JOE MADUZIA</span></b><span style="color:black"><br>
</span><i><span style="color:#13294B">MNMS Laboratory Specialist</span></i><span style="color:black"><br>
<br>
</span><span style="color:#13294B">The Grainger College of Engineering</span><span style="color:black"><br>
</span><span style="color:#13294B">Mechanical Science and Engineering</span><span style="color:black"><br>
<br>
</span><span style="color:#13294B">2239 Sidney Lu Mechanical Engineering Bldg</span><span style="color:black"><br>
</span><span style="color:#13294B">1206 W. Green<br>
Urbana, IL 61801</span><span style="color:black"><br>
</span><span style="color:#13294B">217.244.6302 | </span><a href="mailto:jmaduzi2@illinois.edu">jmaduzi2@illinois.edu</a><o:p></o:p></p>
<p class="MsoNormal"><a href="https://cleanroom.mechse.illinois.edu/">https://cleanroom.mechse.illinois.edu/</a><span style="color:black"><br>
<br>
</span><a href="http://illinois.edu/"><span style="color:windowtext;text-decoration:none"><img border="0" width="134" height="35" style="width:1.3916in;height:.3666in" id="Picture_x0020_1" src="cid:image001.png@01D7D171.C25A5AD0"></span></a><span style="color:black"><br>
<br>
</span><i><span style="color:#666666">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.</span></i><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</div>
<br>
<hr>
<font face="Arial" color="Gray" size="1"><br>
Integer Confidentiality Notice: This electronic mail transmission is intended for the use of the individual or entity to which it is addressed and may contain confidential or proprietary information belonging to the sender. If you are not the intended recipient,
you are hereby notified that any disclosure, copying, distribution, or the taking of any action in reliance on the contents of this information is strictly prohibited. If you have received this transmission in error, please notify the sender immediately by
e-mail and delete the original message. Thank you for your cooperation.<br>
</font>
</body>
</html>