<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=iso-2022-jp">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
span.EmailStyle23
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">I$B!G(Bll second the vote for Rogue Valley.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="FR" style="font-size:11.0pt;font-family:"Arial",sans-serif;color:#00BCE4">Jeff Salzmann</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Senior Research Engineer</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Advanced Materials Technology Group</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:105%;page-break-after:avoid"><b><span style="font-size:11.0pt;line-height:105%;font-family:"Calibri",sans-serif;color:#00A9E0">Integer*
</span></b><span style="font-size:11.0pt;line-height:105%;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#343434">10000 Wehrle Drive
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#343434">Clarence, NY, 14031
</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Tel +1 716.759.5796</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#717074">Cell +1 716.867.1302</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#4BACC6"><a href="mailto:Jeffrey.Salzmann@integer.net">Jeffrey.Salzmann@integer.net</a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#4BACC6"><a href="http://www.integer.net/">www.integer.net</a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="FR" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#4BACC6"> </span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#343434">* Integer comprises the following companies: </span></i><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#343434">Greatbatch Medical -$B!>(B Lake Region Medical -$B!>(B Electrochem</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Morrison, Richard H., Jr<br>
<b>Sent:</b> Tuesday, December 14, 2021 7:59 AM<br>
<b>To:</b> admueller84@gmail.com; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Super / Ultra low stress LPCVD nitride deposition<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div style="mso-element:para-border-div;border:solid gray 1.0pt;padding:0in 0in 0in 0in;background:#FFEB9C">
<p style="background:#FFEB9C;border:none;padding:0in"><span style="color:black">CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.
</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Try Rogue Valley Micro I have used them before they are very good.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="https://roguevalleymicrodevices.com/">https://roguevalleymicrodevices.com/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Richard Morrison<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">PMTS<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cambridge Ma 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Office: 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cell: 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Aaron Mueller<br>
<b>Sent:</b> Monday, December 13, 2021 9:34 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Super / Ultra low stress LPCVD nitride deposition<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">Dear all,<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">My group, among other activities, makes MEMS chips with nitride membranes. Ideally, because I think it would be more economical, I am wondering if anyone knows a facility that can deposit super or ultra low stress LPCVD silicon nitride
(180nm) on 300/400um thick 4"silicon wafers. Or perhaps this is not a good idea as the achievable membrane performance may depend on the bow/warp/etc. of the silicon wafers. Alternatively, I would like to find a wafer vendor that can target such a low stress
nitride coating at a reasonable price.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">I'm looking for something less than 50MPa tensile stress, maybe closer to zero. I've used low stress ( nominally <250MPa) and now super low stress (nominally <100MPa, paid about 100USD per wafer for 25 wafers, would be willing to pay a
bit more), but my nitride membranes are still breaking more than is acceptable.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">I am aware that our application is demanding, as the membranes are quite large (440um x 440um), and we often make holes through them, either with RIE (before the membranes are suspended) or FIB (after).<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">I would be very grateful for any suggestions. Thanks!<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Best Regards,<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Aaron<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="color:#666666">Aaron Mueller, PhD</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="color:#666666">Research Fellow</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="color:#666666">School of Materials Science and Engineering</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="color:#666666">Nanyang Technological University</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="color:#666666">Singapore</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</div>
<div class="MsoNormal" align="center" style="text-align:center"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">
<hr size="2" width="100%" align="center">
</span></div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of
this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
<o:p></o:p></span></p>
<div class="MsoNormal" align="center" style="text-align:center"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">
<hr size="2" width="100%" align="center">
</span></div>
</div>
</div>
<br>
<hr>
<font face="Arial" color="Gray" size="1"><br>
Integer Confidentiality Notice: This electronic mail transmission is intended for the use of the individual or entity to which it is addressed and may contain confidential or proprietary information belonging to the sender. If you are not the intended recipient,
you are hereby notified that any disclosure, copying, distribution, or the taking of any action in reliance on the contents of this information is strictly prohibited. If you have received this transmission in error, please notify the sender immediately by
e-mail and delete the original message. Thank you for your cooperation.<br>
</font>
</body>
</html>