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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Try Rogue Valley Micro I have used them before they are very good.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="https://roguevalleymicrodevices.com/">https://roguevalleymicrodevices.com/</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Richard Morrison<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">PMTS<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cambridge Ma 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Office: 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cell: 508-930-3461<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Aaron Mueller<br>
<b>Sent:</b> Monday, December 13, 2021 9:34 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Super / Ultra low stress LPCVD nitride deposition<o:p></o:p></span></p>
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<p class="MsoNormal">Dear all,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">My group, among other activities, makes MEMS chips with nitride membranes. Ideally, because I think it would be more economical, I am wondering if anyone knows a facility that can deposit super or ultra low stress LPCVD silicon nitride
(180nm) on 300/400um thick 4"silicon wafers. Or perhaps this is not a good idea as the achievable membrane performance may depend on the bow/warp/etc. of the silicon wafers. Alternatively, I would like to find a wafer vendor that can target such a low stress
nitride coating at a reasonable price.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I'm looking for something less than 50MPa tensile stress, maybe closer to zero. I've used low stress ( nominally <250MPa) and now super low stress (nominally <100MPa, paid about 100USD per wafer for 25 wafers, would be willing to pay a
bit more), but my nitride membranes are still breaking more than is acceptable.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I am aware that our application is demanding, as the membranes are quite large (440um x 440um), and we often make holes through them, either with RIE (before the membranes are suspended) or FIB (after).<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I would be very grateful for any suggestions. Thanks!<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Best Regards,<o:p></o:p></p>
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<p class="MsoNormal">Aaron<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:#666666">Aaron Mueller, PhD</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#666666">Research Fellow</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#666666">School of Materials Science and Engineering</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#666666">Nanyang Technological University</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="color:#666666">Singapore</span><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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