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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
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.shape {behavior:url(#default#VML);}
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/* Font Definitions */
@font-face
{font-family:"Cambria Math";
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/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
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font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
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{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
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{mso-style-type:export-only;
font-size:10.0pt;}
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{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<body lang="EN-GB" style="text-align:left; direction:ltr;"><div>FYI If you are moving tools over a raised floor, it's much easier to use thick plastic sheets rather than steel ones. They are not so heavy to be carrying around.</div><div><br></div><div>On Mon, 2021-12-13 at 19:55 +0000, Owain Clark wrote:</div><blockquote type="cite" style="margin:0 0 0 .8ex; border-left:2px #729fcf solid;padding-left:1ex">
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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">We run a raised floor. So far we have not had many problems moving tools. For the heaviest we have sometimes reinforced with steel sheets during movement and then when in place we use some small
steel plates to spread load per contact point. The Nikon scanner install did require improved structural engineering for its floor area, which was not cheap. This was not part of the original build.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Yes it does get filthy down there, I wish I could say we cleaned every 3 months but that would not strictly be true. It can help with the odd cooling water flood by routing it straight to drain.
Touch wood we have not had that problem for a long time. Nearly all of our services run in it and there is no great issue there, apart from sometimes the requirement for confined space training can be an irritation, especially for any gas line welding.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">I prefer not to hide things there, they have a habit of becoming forgotten and staying there too long. We used to have some backing pumps down there, but the hassle of lifting them out for servicing
was not worth the space/vibration savings. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Owain.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Morrison, Richard H., Jr<br>
<b>Sent:</b> 13 December 2021 13:07<br>
<b>To:</b> shimonel@savion.huji.ac.il; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Cleanroom elevated floor<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970">CAUTION:</span></strong><span lang="EN-US" style="font-size:10.5pt;color:#8D3970"> This e-mail
originated outside the University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">I would say that all the 200mm and 300mm fab in the world use a raised floor. While under construction the space should be cleaned every day and since it is clean room construction every going into
the space is wiped down so it is fairly clean.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">The raised floor allows a clutter free cleanroom, from piping and wires because all the services run in the floor space, very eye pleasing space. Then once per qtr you lift up the floor tiles and
send in a person to vacuum and cleanup. All the debris collects on the floor and any flat surfaces, very easy to pickup and clean. Another benefit is that the air moves straight down from the ceiling reducing eddy currents and providing almost laminar air
flow. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Richard Morrison<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">PMTS<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Cambridge Ma 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Office: 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Cell: 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Shimon Eliav<br>
<b>Sent:</b> Monday, December 13, 2021 6:54 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Cleanroom elevated floor<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Hello Everybody,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">We are designing a new cleanroom and I think to use an elevated floor to accommodate part of the utilities and serve as air return path to the chase. The air-conditioning designers didn’t like the idea: they argue it
is expensive and difficult to clean.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">What is your experience with this? How clean that space below the elevated floor?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thanks in advance for your input.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Shimon<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:8.0pt">The Hebrew University of Jerusalem<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:8.0pt">The Unit for Nano Fabrication - UNF<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:8.0pt">Jerusalem - ISRAEL</span><span lang="EN-US"><o:p></o:p></span></p>
<div class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">
<hr size="2" width="100%" align="center">
</span></div>
<p class="MsoNormal"><span lang="EN-US">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender
by replying to this email and immediately destroy all copies of this email. <o:p>
</o:p></span></p>
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