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<p class="MsoNormal">I’d also be interested in such a thing… With perhaps a lean more towards the process and fundamental side vs applications<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">If you are after further education in etch process I would recommend the CEI lectures -
<a href="https://www.cei.se/course-088-plasma-etching-for-cmos-technology-and-ulsi-applications-group.html">
https://www.cei.se/course-088-plasma-etching-for-cmos-technology-and-ulsi-applications-group.html</a> I attended quite a while ago, the material was excellent and a lot of theory stretches to far more etch processes than just CMOS and ULSI applications.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">O. <o:p></o:p></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:EN-GB">From:</span></b><span lang="EN-US" style="mso-fareast-language:EN-GB"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>James Grant<br>
<b>Sent:</b> 20 January 2022 07:56<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Plasma Etching/Deposition MAEBL Equivalent?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970;mso-fareast-language:EN-GB">CAUTION:</span></strong><span style="font-size:10.5pt;color:#8D3970;mso-fareast-language:EN-GB">
This e-mail originated outside the University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Been tasked to try and find the most suitable plasma etching/deposition workshop/conference/event that is equivalent to MAEBL (<a href="https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmaebl.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760740141%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=SNXuhW7afLVsoNpYr6SU45cY6dKW%2BloqhkxlWLogy%2FI%3D&reserved=0">https://maebl.org/</a>).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Never come across such an event in the plasma etching/deposition domain. What I find is that workshops/conferences are more focused on either an aspect of plasma etching/deposition (e.g.
<a href="https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fald2022.avs.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760740141%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=o42947insNLgQcC3kKbVJvtPRaOVnP%2F%2FNyqHarVTJqs%3D&reserved=0">
https://ald2022.avs.org/</a>) or are material/application specific (e.g. <a href="https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.iwn2022.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760896345%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=%2FzAmQBWQ9cX5pkiVNvPcK5Sguh%2Ftu3728QsL2YzI5qA%3D&reserved=0">
https://www.iwn2022.org/</a>).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB">Cheers,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB">James<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB">Dr. James Paul Grant<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB">Research Engineer in Plasma Processing</span><span style="mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB"><o:p> </o:p></span></i></p>
<p class="MsoNormal"><b><i><span style="font-family:"Helvetica",sans-serif;color:#005C8A;mso-fareast-language:EN-GB">Plasma Etch Group</span></i></b><b><span style="color:#005C8A;mso-fareast-language:EN-GB"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB"> </span><span style="font-family:"Helvetica",sans-serif;color:#003865;mso-fareast-language:EN-GB"><a href="mailto:james.grant@glasgow.ac.uk">james.grant@glasgow.ac.uk</a></span><span style="color:#003865;mso-fareast-language:EN-GB">
</span><span style="mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#003865;mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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