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<div>Not the same as MAEBL <br></div><div>but AVS short courses may be of interest</div><div><a href="https://avs.org/education/short-courses/short-course-schedule/" target="_blank">https://avs.org/education/short-courses/short-course-schedule/</a></div><div><br></div><div>Bill Flounders</div><div>UC Berkeley</div>
</div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Jan 20, 2022 at 9:05 AM Owain Clark <<a href="mailto:odc1n08@soton.ac.uk">odc1n08@soton.ac.uk</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<p class="MsoNormal">I’d also be interested in such a thing… With perhaps a lean more towards the process and fundamental side vs applications<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">If you are after further education in etch process I would recommend the CEI lectures -
<a href="https://www.cei.se/course-088-plasma-etching-for-cmos-technology-and-ulsi-applications-group.html" target="_blank">
https://www.cei.se/course-088-plasma-etching-for-cmos-technology-and-ulsi-applications-group.html</a> I attended quite a while ago, the material was excellent and a lot of theory stretches to far more etch processes than just CMOS and ULSI applications.
<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">O. <u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>James Grant<br>
<b>Sent:</b> 20 January 2022 07:56<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Plasma Etching/Deposition MAEBL Equivalent?<u></u><u></u></span></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:rgb(247,249,250) none repeat scroll 0% 0%"><strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:rgb(141,57,112)">CAUTION:</span></strong><span style="font-size:10.5pt;color:rgb(141,57,112)">
This e-mail originated outside the University of Southampton. <u></u><u></u></span></p>
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<p class="MsoNormal">Hello,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Been tasked to try and find the most suitable plasma etching/deposition workshop/conference/event that is equivalent to MAEBL (<a href="https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmaebl.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760740141%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=SNXuhW7afLVsoNpYr6SU45cY6dKW%2BloqhkxlWLogy%2FI%3D&reserved=0" target="_blank">https://maebl.org/</a>).<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Never come across such an event in the plasma etching/deposition domain. What I find is that workshops/conferences are more focused on either an aspect of plasma etching/deposition (e.g.
<a href="https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fald2022.avs.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760740141%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=o42947insNLgQcC3kKbVJvtPRaOVnP%2F%2FNyqHarVTJqs%3D&reserved=0" target="_blank">
https://ald2022.avs.org/</a>) or are material/application specific (e.g. <a href="https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.iwn2022.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760896345%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=%2FzAmQBWQ9cX5pkiVNvPcK5Sguh%2Ftu3728QsL2YzI5qA%3D&reserved=0" target="_blank">
https://www.iwn2022.org/</a>).<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span>Cheers,<u></u><u></u></span></p>
<p class="MsoNormal"><span><u></u> <u></u></span></p>
<p class="MsoNormal"><span>James<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:rgb(30,33,66)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:rgb(30,33,66)">Dr. James Paul Grant<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:rgb(30,33,66)">Research Engineer in Plasma Processing</span><span><u></u><u></u></span></p>
<p class="MsoNormal"><i><span style="font-size:10pt;font-family:"Helvetica",sans-serif;color:rgb(30,33,66)"><u></u> <u></u></span></i></p>
<p class="MsoNormal"><b><i><span style="font-family:"Helvetica",sans-serif;color:rgb(0,92,138)">Plasma Etch Group</span></i></b><b><span style="color:rgb(0,92,138)"><u></u><u></u></span></b></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:rgb(30,33,66)"> </span><span style="font-family:"Helvetica",sans-serif;color:rgb(0,56,101)"><a href="mailto:james.grant@glasgow.ac.uk" target="_blank">james.grant@glasgow.ac.uk</a></span><span style="color:rgb(0,56,101)">
</span><span><u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(0,56,101)"><u></u> <u></u></span></p>
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