<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto">FYI... I did not perform an O2 or Ar plasma burn in on these seals.<br><br><div dir="ltr"><div><br></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">Best Regards,</span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);"><br class=""></span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">Mark<br class="Apple-interchange-newline"><br class=""></span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">________________________________________________________________</span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);"><br class=""></span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">Mark Weiler</span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">Manager, Equipment & Facilites</span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">Bertucci Nanotechnology Laboratory</span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">Eden Hall Cleanroom</span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">Carnegie Mellon University</span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">P:<span class="Apple-tab-span" style="white-space: pre;"> </span><a href="tel:412-268-2471" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="3/1" style="text-decoration-color: rgba(128, 128, 128, 0.38);">412-268-2471</a></span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0);">F:<span class="Apple-tab-span" style="white-space: pre;"> </span><a href="tel:412-268-3497" dir="ltr" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="3/2" style="text-decoration-color: rgba(128, 128, 128, 0.38);">412-268-3497</a></span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><a href="http://www.nanofab.ece.cmu.edu/" class="" style="caret-color: rgb(255, 255, 255); background-color: rgba(255, 255, 255, 0);"><font color="#ffffff">http://www.nanofab.ece.cmu.edu</font></a></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0); font-size: 13pt;"><br></span></div><div class="" style="font-variant-ligatures: normal; font-variant-position: normal; font-variant-numeric: normal; font-variant-alternates: normal; font-variant-east-asian: normal;"><span style="background-color: rgba(255, 255, 255, 0); font-size: 13pt;">"Be kind; everyone is on their own journey." Daniel Ek</span></div><div style="font-size: 13pt;"><span style="font-size: 13pt;"><br></span></div><span style="font-size: 13pt;">Sent from my iPhone</span><span style="background-color: rgba(255, 255, 255, 0);"><br></span></div><div dir="ltr"><br><blockquote type="cite">On Jan 27, 2022, at 12:43 PM, Kurt Kupcho <kurt.kupcho@wisc.edu> wrote:<br><br></blockquote></div><blockquote type="cite"><div dir="ltr">
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">With a 13s lip seal burn with O2 plasma of SPTS lip seals I can get 0.4mt/min leak up rate. With limiting O2 plasma cleans after SF6/O2 runs to the minimum amount of time
to clean out the SF6 we are also able to extend the lifetime significantly. <o:p>
</o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">I am still interested in Mark’s new lip seals though because these lip seals will probably not be available from SPTS much longer. They already stopped supporting anything
about our tool model over 5 years ago.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Kurt<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<div>
<div style="mso-element:para-border-div;border:none;border-bottom:dotted windowtext 3.0pt;padding:0in 0in 1.0pt 0in">
<p class="MsoNormal" style="border:none;padding:0in"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Kurt Kupcho<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Materials Science Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Nanoscale Fabrication Center (NFC)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">University of Wisconsin<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">1550 Engineering Dr.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">ECB 3110<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Madison, WI 53706<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">E:
<a href="mailto:kurt.kupcho@wisc.edu"><span style="color:#0563C1">kurt.kupcho@wisc.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">T: 608-262-2982<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><div><image002.png></div><o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Aebersold,Julia W. <julia.aebersold@louisville.edu>
<br>
<b>Sent:</b> Thursday, January 27, 2022 11:40 AM<br>
<b>To:</b> Mark Weiler <mweiler@andrew.cmu.edu>; Fab Network <labnetwork@mtl.mit.edu>; Kurt Kupcho <kurt.kupcho@wisc.edu><br>
<b>Cc:</b> LaFleur, David W <dlafleur@cns.fas.harvard.edu>; Daniel Christensen <dcchrist@wisc.edu><br>
<b>Subject:</b> RE: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates
well below 10.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Julia Aebersold, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">(502) 852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="http://louisville.edu/micronano/"><span style="color:#0563C1">http://louisville.edu/micronano/</span></a><o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Mark Weiler [<a href="mailto:mweiler@andrew.cmu.edu">mailto:mweiler@andrew.cmu.edu</a>]
<br>
<b>Sent:</b> Thursday, January 27, 2022 11:05 AM<br>
<b>To:</b> Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>>; Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>><br>
<b>Cc:</b> LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu">dlafleur@cns.fas.harvard.edu</a>>; Daniel Christensen <<a href="mailto:dcchrist@wisc.edu">dcchrist@wisc.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:12.0pt;background:#FF4D4D">
<b><span style="font-size:10.0pt;color:black">CAUTION:</span></b><span style="font-size:10.0pt;color:black"> This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address
and know the contents are safe.</span><o:p></o:p></p>
<div>
<p class="MsoNormal">Hello Everyone, <o:p></o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">I have some good results to share on our quest for a better DRIE Lip Seal.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can’t say whether it was truly the Ar Plasma that helped.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email
regarding some success, and we all know Mr. Murphy hates that.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville…<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">If anyone would like ordering information… just let me know.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<div>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Best Regards,<br>
<br>
Mark<br>
<br>
________________________________________________________________<br>
<br>
Mark Weiler<br>
Manager, Equipment & Facilities<br>
Bertucci Nanotechnology Laboratory<br>
Eden Hall Nanofabrication Cleanroom<br>
Carnegie Mellon University<br>
P:<span class="apple-tab-span"> </span>412-268-2471<br>
F:<span class="apple-tab-span"> </span>412-268-3497<br>
<a href="https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nanofab.ece.cmu.edu%2F&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C2594d8f67ca04661a36008d9e1aecae7%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637788963118763327%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=k9VFZtyMeaT4Ilr9UvoJ8fi3UVe0%2BTdlD47tsra7nk8%3D&reserved=0">http://www.nanofab.ece.cmu.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><div><image003.png></div><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<div>
<p class="MsoNormal">On Mar 11, 2019, at 4:40 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>> wrote:<o:p></o:p></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
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<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thanks Mark.</span><o:p></o:p></p>
</div>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">I would be interested in hearing your Ar lipseal burn results as well.</span><o:p></o:p></p>
</div>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Kurt</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">---------------------------------------------------</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Kurt Kupcho</span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Process Engineer/Safety Officer</span><o:p></o:p></p>
</div>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">NFC</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">1550 Engineering Drive</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ECB Room 3110</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Madison, WI 53706</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a></span><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">T: 608-262-2982</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><image001.png></span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif"> </span></span><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">Mark
Weiler [<a href="mailto:mweiler@andrew.cmu.edu"><span style="color:purple">mailto:mweiler@andrew.cmu.edu</span></a>]<span class="apple-converted-space"> </span><br>
<b>Sent:</b><span class="apple-converted-space"> </span>Monday, March 11, 2019 3:33 PM<br>
<b>To:</b><span class="apple-converted-space"> </span>Kurt Kupcho<br>
<b>Cc:</b><span class="apple-converted-space"> </span>LaFleur, David W; Fab Network<br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Hi Kurt,<span class="apple-converted-space"> </span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">I will let you know the results of the new seals… In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Mark<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">________________________________________________________________</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Mark Weiler</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Equipment & Facilites Manager</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Clair and John Bertucci Nanotechnology Laboratory</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Eden Hall Nanofabrication Cleanroom</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Carnegie Mellon University</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">P: 412-268-2471</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><a href="https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nanofab.ece.cmu.edu%2F&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C2594d8f67ca04661a36008d9e1aecae7%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637788963118763327%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=k9VFZtyMeaT4Ilr9UvoJ8fi3UVe0%2BTdlD47tsra7nk8%3D&reserved=0"><span style="color:purple">http://www.nanofab.ece.cmu.edu</span></a></span><o:p></o:p></p>
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</span><a href="https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.linkedin.com%2Fin%2Fmarksbasics&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C2594d8f67ca04661a36008d9e1aecae7%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637788963118763327%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=xPvd9ugyY6o1JyQrthDr23UbLSQdm5BBlgM5Q52kIUM%3D&reserved=0"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:purple;text-decoration:none"><image002.png></span></a><o:p></o:p></p>
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<o:p></o:p></p>
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<p class="MsoNormal">On Mar 11, 2019, at 3:55 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu"><span style="color:purple">kurt.kupcho@wisc.edu</span></a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Mark & David –</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great – throw one in the system and it would last about 6 months
with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed
lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. <span class="apple-converted-space"> </span>
Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they
are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma
clean times, which seems to increase the lipseal lifetime significantly. <span class="apple-converted-space"> </span></span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this
endeavor with you.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Best,</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Kurt</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">---------------------------------------------------</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Kurt Kupcho</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Process Engineer/Safety Officer</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">NFC</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">1550 Engineering Drive</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ECB Room 3110</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Madison, WI 53706</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu"><span style="color:purple">kurt.kupcho@wisc.edu</span></a></span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">T: 608-262-2982</span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif"> </span></span><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif"><a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a><span class="apple-converted-space"> </span>[<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">mailto:labnetwork-bounces@mtl.mit.edu</span></a>]<span class="apple-converted-space"> </span><b>On
Behalf Of<span class="apple-converted-space"> </span></b>Mark Weiler<br>
<b>Sent:</b><span class="apple-converted-space"> </span>Wednesday, March 06, 2019 8:04 AM<br>
<b>To:</b><span class="apple-converted-space"> </span>LaFleur, David W<br>
<b>Cc:</b><span class="apple-converted-space"> </span>Fab Network<br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"> Hi David,<span class="apple-converted-space"> </span><o:p></o:p></p>
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<p class="MsoNormal">I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you
and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch
process and 02 cleans.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Thank you for sharing your info; now I know we are not the only ones “feeling the pain” so to speak and can officially commiserate... LOL<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Best,<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt">Mark<o:p></o:p></p>
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<p class="MsoNormal"><b>Mark Weiler</b><br>
Equipment & Facilities Manager<span class="apple-converted-space"> </span><o:p></o:p></p>
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<p class="MsoNormal">Claire and John Bertucci Nanotechnology Laboratory<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
<a href="x-apple-data-detectors://3/1"><span style="color:purple">5000 Forbes Ave., Pittsburgh, PA 15213-3890</span></a><br>
T: <a href="tel:412.268.5430"><span style="color:purple">412.268.2471</span></a><br>
F: <a href="tel:412.268.3497"><span style="color:purple">412.268.3497</span></a><br>
<a href="https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.ece.cmu.edu%2F&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C2594d8f67ca04661a36008d9e1aecae7%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637788963118763327%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=W%2Faz7EBv%2BAzDDuov5eeMKEVxEnCcL1QoQKY3qQhxX2g%3D&reserved=0"><span style="color:purple">www.ece.cmu.edu</span></a><br>
<a href="https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fnanofab.ece.cmu.edu%2F&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C2594d8f67ca04661a36008d9e1aecae7%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637788963118763327%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=Jm2CxQ1ne00XmrG6OFeHM86K%2FNBs0GFneAI7cOqtVag%3D&reserved=0"><span style="color:purple">nanofab.ece.cmu.edu</span></a><o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><br>
On Mar 6, 2019, at 08:46, LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu"><span style="color:purple">dlafleur@cns.fas.harvard.edu</span></a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Hi Mark,</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier
which uses an ESC. That has its own set of issues. We find the lip seals don’t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez
lip seal. One suggestion on how to make them last longer is make sure they don’t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this
to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement
works well for everyone. This is why I have just lived with the lip seals as they are.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Regards,</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">David LaFleur</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Equipment Engineer</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">CNS, Harvard University</span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-family:"Calibri",sans-serif">From:<span class="apple-converted-space"> </span></span></b><span style="font-family:"Calibri",sans-serif">"<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a>"
<<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a>> on behalf of Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu"><span style="color:purple">mweiler@andrew.cmu.edu</span></a>><br>
<b>Date:<span class="apple-converted-space"> </span></b>Tuesday, March 5, 2019 at 3:44 PM<br>
<b>To:<span class="apple-converted-space"> </span></b>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu"><span style="color:purple">labnetwork@mtl.mit.edu</span></a>><br>
<b>Subject:<span class="apple-converted-space"> </span></b>[labnetwork] STS DRIE Multiplex Lip Seal failures</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Hello Everyone,<span class="apple-converted-space"> </span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few
runs… however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It’s as if they are made of Buna and not meant for
this application.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200
peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data…. we just can’t complete the work due to failing seals.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended
O2 Clean… then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us.<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Have any of you seen this before?<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Best regards,<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Mark<o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">________________________________________________________________</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Mark Weiler</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Equipment & Facilites Manager</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Clair and John Bertucci Nanotechnology Laboratory</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Eden Hall Nanofabrication Cleanroom</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Carnegie Mellon University</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">P: 412-268-2471</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><a href="https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Furldefense.proofpoint.com%2Fv2%2Furl%3Fu%3Dhttp-3A__www.nanofab.ece.cmu.edu%26d%3DDwMGaQ%26c%3DWO-RGvefibhHBZq3fL85hQ%26r%3D6eLRBFWstHA_77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE%26m%3DGZ5yf4iHmJa34tuDFePywye54bw-ac2pvX333zI9bnA%26s%3DZH-JLOPgpC2A-fi8K9m7di3gfZlrsVgsRXshO9n5YnI%26e%3D&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C2594d8f67ca04661a36008d9e1aecae7%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637788963118763327%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=pbOVCo9937pScmMmO8Jj07jDAMS7ecJluN%2FG2fBr8pA%3D&reserved=0"><span style="color:purple">http://www.nanofab.ece.cmu.edu</span></a></span><o:p></o:p></p>
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</span><a href="https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Furldefense.proofpoint.com%2Fv2%2Furl%3Fu%3Dhttps-3A__www.linkedin.com_in_marksbasics%26d%3DDwMGaQ%26c%3DWO-RGvefibhHBZq3fL85hQ%26r%3D6eLRBFWstHA_77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE%26m%3DGZ5yf4iHmJa34tuDFePywye54bw-ac2pvX333zI9bnA%26s%3DWquMkON2Ebt40diZk9ZCj0gHSa0hEyxOPMuXQDR8cmE%26e%3D&data=04%7C01%7Cjulia.aebersold%40louisville.edu%7C2594d8f67ca04661a36008d9e1aecae7%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637788963118763327%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000&sdata=6V9%2BYcBI%2BYO%2Bf4eTm8hsXkKV8jZZGg2gIl7g6FfJbg0%3D&reserved=0"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:purple;text-decoration:none"><image001.png></span></a><o:p></o:p></p>
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