<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">Hi Bill,<div class=""><br class=""></div><div class="">That’s brilliant.</div><div class=""><br class=""></div><div class="">Do you clean them with Fomblin and then allow them to soak in it? What is the treatment portion of the process?</div><div class=""><br class=""><div class="">
<div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; text-decoration: none;">Best Regards,<br class=""><br class="">Mark<br class=""><br class="">________________________________________________________________<br class=""><br class="">Mark Weiler<br class="">Manager, Equipment & Facilities<br class="">Bertucci Nanotechnology Laboratory<br class="">Eden Hall Nanofabrication Cleanroom<br class="">Carnegie Mellon University<br class="">P:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-2471<br class="">F:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-3497<br class=""><a href="http://www.nanofab.ece.cmu.edu" class="">http://www.nanofab.ece.cmu.edu</a><br class=""><br class=""><br class=""></div><span><img apple-inline="yes" id="772E9D51-D58C-42F4-AC78-A2E131F5515E" src="cid:2D2E01E3-CEC1-4F48-A845-224D8D7CED12@wv.cc.cmu.edu" class=""></span>
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<div><br class=""><blockquote type="cite" class=""><div class="">On Jan 27, 2022, at 4:31 PM, Lewis,William <<a href="mailto:blewis@eng.ufl.edu" class="">blewis@eng.ufl.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment.<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Bill Lewis<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Research Service Center<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">University of Florida<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><a href="mailto:walewis@ufl.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: rgb(5, 99, 193);" class="">walewis@ufl.edu</span></a><o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">3five2-258-zero5zero7<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><a href="https://rsc.aux.eng.ufl.edu/" style="color: blue; text-decoration: underline;" class=""><span style="color: rgb(5, 99, 193);" class="">https://rsc.aux.eng.ufl.edu/</span></a><o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></span></div><div class=""><div style="border-style: solid none none; border-top-width: 1pt; border-top-color: rgb(225, 225, 225); padding: 3pt 0in 0in;" class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><b class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">From:</span></b><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span class="Apple-converted-space"> </span>labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: blue; text-decoration: underline;" class="">labnetwork-bounces@mtl.mit.edu</a>><span class="Apple-converted-space"> </span><b class="">On Behalf Of<span class="Apple-converted-space"> </span></b>Aebersold,Julia W.<br class=""><b class="">Sent:</b><span class="Apple-converted-space"> </span>Thursday, January 27, 2022 12:40 PM<br class=""><b class="">To:</b><span class="Apple-converted-space"> </span>Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu" style="color: blue; text-decoration: underline;" class="">mweiler@andrew.cmu.edu</a>>; Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" style="color: blue; text-decoration: underline;" class="">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu" style="color: blue; text-decoration: underline;" class="">kurt.kupcho@wisc.edu</a>><br class=""><b class="">Cc:</b><span class="Apple-converted-space"> </span>Daniel Christensen <<a href="mailto:dcchrist@wisc.edu" style="color: blue; text-decoration: underline;" class="">dcchrist@wisc.edu</a>><br class=""><b class="">Subject:</b><span class="Apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p class=""></o:p></span></div></div></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div><table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" align="left" width="100%" style="width: 691px;"><tbody class=""><tr class=""><td style="padding: 0in;" class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><b class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(250, 70, 22);" class="">[External Email]</span></b><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""></o:p></span></div></div></td></tr></tbody></table><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10.<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Cheers!<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Julia Aebersold, Ph.D.<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Manager, Micro/Nano Technology Center<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">University of Louisville<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Shumaker Research Building, Room 233<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">2210 South Brook Street<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Louisville, KY 40292<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">(502) 852-1572<o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__louisville.edu_micronano_&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=ltkBP0MwtJejys408J2VVSxuJSLE2syWp-UOHW3EaWk&e=" style="color: blue; text-decoration: underline;" class=""><span style="color: rgb(5, 99, 193);" class="">http://louisville.edu/micronano/</span></a><o:p class=""></o:p></span></div></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div><div class=""><div style="border-style: solid none none; border-top-width: 1pt; border-top-color: rgb(225, 225, 225); padding: 3pt 0in 0in;" class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><b class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">From:</span></b><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span class="Apple-converted-space"> </span>Mark Weiler [<a href="mailto:mweiler@andrew.cmu.edu" style="color: blue; text-decoration: underline;" class="">mailto:mweiler@andrew.cmu.edu</a>]<span class="Apple-converted-space"> </span><br class=""><b class="">Sent:</b><span class="Apple-converted-space"> </span>Thursday, January 27, 2022 11:05 AM<br class=""><b class="">To:</b><span class="Apple-converted-space"> </span>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" style="color: blue; text-decoration: underline;" class="">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu" style="color: blue; text-decoration: underline;" class="">kurt.kupcho@wisc.edu</a>>; Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu" style="color: blue; text-decoration: underline;" class="">julia.aebersold@louisville.edu</a>><br class=""><b class="">Cc:</b><span class="Apple-converted-space"> </span>LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu" style="color: blue; text-decoration: underline;" class="">dlafleur@cns.fas.harvard.edu</a>>; Daniel Christensen <<a href="mailto:dcchrist@wisc.edu" style="color: blue; text-decoration: underline;" class="">dcchrist@wisc.edu</a>><br class=""><b class="">Subject:</b><span class="Apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p class=""></o:p></span></div></div></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif; line-height: 12pt; background-color: rgb(255, 77, 77);" class=""><b class=""><span style="font-size: 10pt;" class="">CAUTION:</span></b><span style="font-size: 10pt;" class=""><span class="Apple-converted-space"> </span>This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.</span><o:p class=""></o:p></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Hello Everyone,<span class="Apple-converted-space"> </span><o:p class=""></o:p></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">I have some good results to share on our quest for a better DRIE Lip Seal.<o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can’t say whether it was truly the Ar Plasma that helped.<o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that.<o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville…<o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">If anyone would like ordering information… just let me know.<o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div></div><div class=""><div class=""><div class=""><p class="MsoNormal" style="margin: 0in 0in 12pt; font-size: 12pt; font-family: "Times New Roman", serif;"><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Best Regards,<br class=""><br class="">Mark<br class=""><br class="">________________________________________________________________<br class=""><br class="">Mark Weiler<br class="">Manager, Equipment & Facilities<br class="">Bertucci Nanotechnology Laboratory<br class="">Eden Hall Nanofabrication Cleanroom<br class="">Carnegie Mellon University<br class="">P:<span class="apple-tab-span"><span class="Apple-converted-space"> </span></span>412-268-2471<br class="">F:<span class="apple-tab-span"><span class="Apple-converted-space"> </span></span>412-268-3497<br class=""><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3Dk9VFZtyMeaT4Ilr9UvoJ8fi3UVe0-252BTdlD47tsra7nk8-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=FuMwZG3UBfLqx35enC244O2lImbq_35VErVbvb4-3pU&e=" style="color: blue; text-decoration: underline;" class="">http://www.nanofab.ece.cmu.edu</a><o:p class=""></o:p></span></p></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span id="cid:image001.png@01D8139B.7AB7E3C0"><image001.png></span><o:p class=""></o:p></div></div><div class=""><p class="MsoNormal" style="margin: 0in 0in 12pt; font-size: 12pt; font-family: "Times New Roman", serif;"><o:p class=""> </o:p></p><blockquote style="margin-top: 5pt; margin-bottom: 5pt;" class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">On Mar 11, 2019, at 4:40 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu" style="color: blue; text-decoration: underline;" class="">kurt.kupcho@wisc.edu</a>> wrote:<o:p class=""></o:p></div></div><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><o:p class=""> </o:p></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Thanks Mark.</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">I would be interested in hearing your Ar lipseal burn results as well.</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Kurt</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">---------------------------------------------------</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Kurt Kupcho</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Process Engineer/Safety Officer</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">NFC</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">1550 Engineering Drive</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">ECB Room 3110</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Madison, WI 53706</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu" style="color: blue; text-decoration: underline;" class="">kurt.kupcho@wisc.edu</a></span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">T: 608-262-2982</span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><image001.png></span><o:p class=""></o:p></div></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div><div class=""><div style="border-style: solid none none; border-top-width: 1pt; border-top-color: rgb(181, 196, 223); padding: 3pt 0in 0in;" class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><b class=""><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class="">From:</span></b><span class="apple-converted-space"><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class=""> </span></span><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class="">Mark Weiler [<a href="mailto:mweiler@andrew.cmu.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">mailto:mweiler@andrew.cmu.edu</span></a>]<span class="apple-converted-space"> </span><br class=""><b class="">Sent:</b><span class="apple-converted-space"> </span>Monday, March 11, 2019 3:33 PM<br class=""><b class="">To:</b><span class="apple-converted-space"> </span>Kurt Kupcho<br class=""><b class="">Cc:</b><span class="apple-converted-space"> </span>LaFleur, David W; Fab Network<br class=""><b class="">Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><o:p class=""></o:p></div></div></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Hi Kurt,<span class="apple-converted-space"> </span><o:p class=""></o:p></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">I will let you know the results of the new seals… In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach to seal conditioning.<o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Mark<o:p class=""></o:p></div></div><div class=""><div class=""><p class="MsoNormal" style="margin: 0in 0in 12pt; font-size: 12pt; font-family: "Times New Roman", serif;"><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""> </span><o:p class=""></o:p></p></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">________________________________________________________________</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Mark Weiler</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Equipment & Facilites Manager</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Clair and John Bertucci Nanotechnology Laboratory</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Eden Hall Nanofabrication Cleanroom</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Carnegie Mellon University</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">P: 412-268-2471</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3Dk9VFZtyMeaT4Ilr9UvoJ8fi3UVe0-252BTdlD47tsra7nk8-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=FuMwZG3UBfLqx35enC244O2lImbq_35VErVbvb4-3pU&e=" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">http://www.nanofab.ece.cmu.edu</span></a></span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""><br class=""></span><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttps-253A-252F-252Fwww.linkedin.com-252Fin-252Fmarksbasics-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DxPvd9ugyY6o1JyQrthDr23UbLSQdm5BBlgM5Q52kIUM-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=Ae9JNweDns3vJ01iHad0tC_SqEVgMcA2wrOFSYqPorM&e=" style="color: blue; text-decoration: underline;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif; color: purple; text-decoration: none;" class=""><image002.png></span></a><o:p class=""></o:p></div></div></div><div class=""><div class=""><p class="MsoNormal" style="margin: 0in 0in 12pt; font-size: 12pt; font-family: "Times New Roman", serif;"><br class=""><br class=""><o:p class=""></o:p></p></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">On Mar 11, 2019, at 3:55 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">kurt.kupcho@wisc.edu</span></a>> wrote:<o:p class=""></o:p></div></div></div><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Hi Mark & David –</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue.</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great – throw one in the system and it would last about 6 months with no issues. Then about a few years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. <span class="apple-converted-space"> </span><span class="Apple-converted-space"> </span>Second, piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma clean times, which seems to increase the lipseal lifetime significantly. <span class="apple-converted-space"> </span></span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you.</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Best,</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Kurt</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">---------------------------------------------------</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Kurt Kupcho</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Process Engineer/Safety Officer</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">NFC</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">1550 Engineering Drive</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">ECB Room 3110</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Madison, WI 53706</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">kurt.kupcho@wisc.edu</span></a></span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">T: 608-262-2982</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><image001.png></span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div style="border-style: solid none none; border-top-width: 1pt; border-top-color: rgb(181, 196, 223); padding: 3pt 0in 0in;" class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><b class=""><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class="">From:</span></b><span class="apple-converted-space"><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class=""> </span></span><span style="font-size: 10pt; font-family: Tahoma, sans-serif;" class=""><a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">labnetwork-bounces@mtl.mit.edu</span></a><span class="apple-converted-space"> </span>[<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">mailto:labnetwork-bounces@mtl.mit.edu</span></a>]<span class="apple-converted-space"> </span><b class="">On Behalf Of<span class="apple-converted-space"> </span></b>Mark Weiler<br class=""><b class="">Sent:</b><span class="apple-converted-space"> </span>Wednesday, March 06, 2019 8:04 AM<br class=""><b class="">To:</b><span class="apple-converted-space"> </span>LaFleur, David W<br class=""><b class="">Cc:</b><span class="apple-converted-space"> </span>Fab Network<br class=""><b class="">Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><o:p class=""></o:p></div></div></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> Hi David,<span class="apple-converted-space"> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this material but we are having a seal made specifically for the Bosch process and 02 cleans.<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and part number.<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Thank you for sharing your info; now I know we are not the only ones “feeling the pain” so to speak and can officially commiserate... LOL<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Best,<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><p class="MsoNormal" style="margin: 0in 0in 12pt; font-size: 12pt; font-family: "Times New Roman", serif;">Mark<o:p class=""></o:p></p><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><b class="">Mark Weiler</b><br class="">Equipment & Facilities Manager<span class="apple-converted-space"> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Claire and John Bertucci Nanotechnology Laboratory<br class="">Electrical and Computer Engineering | Carnegie Mellon University<br class=""><a href="x-apple-data-detectors://3/1" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">5000 Forbes Ave., Pittsburgh, PA 15213-3890</span></a><br class="">T: <a href="tel:412.268.5430" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">412.268.2471</span></a><br class="">F: <a href="tel:412.268.3497" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">412.268.3497</span></a><br class=""><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DW-252Faz7EBv-252BAzDDuov5eeMKEVxEnCcL1QoQKY3qQhxX2g-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=ngB0WfbFgkwdvLj5X608Dv9OX6SpHeZ2Yd9HJgXCpP8&e=" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">www.ece.cmu.edu</span></a><br class=""><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fnanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DJm2CxQ1ne00XmrG6OFeHM86K-252FNBs0GFneAI7cOqtVag-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=QucFQT29UVi0bdXxTCJJMxdHaeaHsMVprZ8nCVt4hH4&e=" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">nanofab.ece.cmu.edu</span></a><o:p class=""></o:p></div></div></div></div></div><div class=""><p class="MsoNormal" style="margin: 0in 0in 12pt; font-size: 12pt; font-family: "Times New Roman", serif;"><br class="">On Mar 6, 2019, at 08:46, LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">dlafleur@cns.fas.harvard.edu</span></a>> wrote:<o:p class=""></o:p></p></div><blockquote style="margin-top: 5pt; margin-bottom: 5pt;" class=""><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Hi Mark,</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find the lip seals don’t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer is make sure they don’t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with the lip seals as they are.</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Regards,</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">David LaFleur</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">Equipment Engineer</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">CNS, Harvard University</span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""> </span><o:p class=""></o:p></div></div></div><div style="border-style: solid none none; border-top-width: 1pt; border-top-color: rgb(181, 196, 223); padding: 3pt 0in 0in;" class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><b class=""><span style="font-family: Calibri, sans-serif;" class="">From:<span class="apple-converted-space"> </span></span></b><span style="font-family: Calibri, sans-serif;" class="">"<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">labnetwork-bounces@mtl.mit.edu</span></a>" <<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">labnetwork-bounces@mtl.mit.edu</span></a>> on behalf of Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">mweiler@andrew.cmu.edu</span></a>><br class=""><b class="">Date:<span class="apple-converted-space"> </span></b>Tuesday, March 5, 2019 at 3:44 PM<br class=""><b class="">To:<span class="apple-converted-space"> </span></b>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" style="color: blue; text-decoration: underline;" class=""><span style="color: purple;" class="">labnetwork@mtl.mit.edu</span></a>><br class=""><b class="">Subject:<span class="apple-converted-space"> </span></b>[labnetwork] STS DRIE Multiplex Lip Seal failures</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Hello Everyone,<span class="apple-converted-space"> </span><o:p class=""></o:p></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter.<o:p class=""></o:p></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we had been using were coming out with black residue after only a few runs… however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material shedding off. It’s as if they are made of Buna and not meant for this application.<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data…. we just can’t complete the work due to failing seals.<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean… then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter change we need to effect that may assist us.<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Have any of you seen this before?<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Best regards,<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""> <o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Mark<o:p class=""></o:p></div></div></div></div><div class=""><div class=""><p class="MsoNormal" style="margin: 0in 0in 12pt; font-size: 12pt; font-family: "Times New Roman", serif;"><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""> </span><o:p class=""></o:p></p></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">________________________________________________________________</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""> </span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Mark Weiler</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Equipment & Facilites Manager</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Clair and John Bertucci Nanotechnology Laboratory</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Eden Hall Nanofabrication Cleanroom</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">Carnegie Mellon University</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class="">P: 412-268-2471</span><o:p class=""></o:p></div></div></div></div><div class=""><div class=""><div class=""><div style="margin: 0in; font-size: 12pt; font-family: "Times New Roman", serif;" class=""><span style="font-size: 9pt; font-family: Helvetica, sans-serif;" class=""><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttps-253A-252F-252Furldefense.proofpoint.com-252Fv2-252Furl-253Fu-253Dhttp-2D3A-5F-5Fwww.nanofab.ece.cmu.edu-2526d-253DDwMGaQ-2526c-253DWO-2DRGvefibhHBZq3fL85hQ-2526r-253D6eLRBFWstHA-5F77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE-2526m-253DGZ5yf4iHmJa34tuDFePywye54bw-2Dac2pvX333zI9bnA-2526s-253DZH-2DJLOPgpC2A-2Dfi8K9m7di3gfZlrsVgsRXshO9n5YnI-2526e-253D-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DpbOVCo9937pScmMmO8Jj07jDAMS7ecJluN-252FG2fBr8pA-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=6htqHC9TEqRkWjAkCwi2J4IADGdEyeaWFbUGCf7A2k4&e=" style="color: blue; 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