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/* Font Definitions */
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panose-1:2 11 6 4 2 2 2 2 2 4;}
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<p class="MsoNormal">Hi Mark,<o:p></o:p></p>
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<p class="MsoNormal">Treat was the wrong word. Just rub Fomblin (PFPE) on the seal.
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<p class="MsoNormal"><b>From:</b> Mark Weiler <mweiler@andrew.cmu.edu> <br>
<b>Sent:</b> Thursday, January 27, 2022 4:46 PM<br>
<b>To:</b> Lewis,William <blewis@eng.ufl.edu><br>
<b>Cc:</b> Aebersold,Julia W. <julia.aebersold@louisville.edu>; Fab Network <labnetwork@mtl.mit.edu>; Kurt Kupcho <kurt.kupcho@wisc.edu>; Daniel Christensen <dcchrist@wisc.edu><br>
<b>Subject:</b> Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p></o:p></p>
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<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616">[External Email]</span></b>
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<p class="MsoNormal">Hi Bill, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">That’s brilliant.<o:p></o:p></p>
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<p class="MsoNormal">Do you clean them with Fomblin and then allow them to soak in it? What is the treatment portion of the process?<o:p></o:p></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Best Regards,<br>
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Mark<br>
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________________________________________________________________<br>
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Mark Weiler<br>
Manager, Equipment & Facilities<br>
Bertucci Nanotechnology Laboratory<br>
Eden Hall Nanofabrication Cleanroom<br>
Carnegie Mellon University<br>
P:<span class="apple-tab-span"> </span>412-268-2471<br>
F:<span class="apple-tab-span"> </span>412-268-3497<br>
<a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ece.cmu.edu&d=DwMFaQ&c=sJ6xIWYx-zLMB3EPkvcnVg&r=QdMIlOhtlLtvSR_lpOHVRl7rOEc-yFk3LzIVikcu6R8&m=NucH1OAjwyDb8yu1MeYa5q6M9KG1Ih8hCcqv4j4HSCdgXU1kF1qmknsJquj96J3K&s=pTkW6Q0u2aiVkd6JNr5zXDdCAj1pSKWyUVm5KSej_cw&e=">http://www.nanofab.ece.cmu.edu</a><br>
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<p class="MsoNormal"><img border="0" width="120" height="33" style="width:1.25in;height:.3437in" id="_x0037_72E9D51-D58C-42F4-AC78-A2E131F5515E" src="cid:image001.png@01D8141D.AB565AC0"><o:p></o:p></p>
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<p class="MsoNormal">On Jan 27, 2022, at 4:31 PM, Lewis,William <<a href="mailto:blewis@eng.ufl.edu">blewis@eng.ufl.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal">We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment.<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">Bill Lewis<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">Research Service Center<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">University of Florida<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><a href="mailto:walewis@ufl.edu"><span style="color:#0563C1">walewis@ufl.edu</span></a><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">3five2-258-zero5zero7<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><a href="https://rsc.aux.eng.ufl.edu/"><span style="color:#0563C1">https://rsc.aux.eng.ufl.edu/</span></a><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b><span class="apple-converted-space"> </span>labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>><span class="apple-converted-space"> </span><b>On Behalf Of<span class="apple-converted-space"> </span></b>Aebersold,Julia
W.<br>
<b>Sent:</b><span class="apple-converted-space"> </span>Thursday, January 27, 2022 12:40 PM<br>
<b>To:</b><span class="apple-converted-space"> </span>Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu">mweiler@andrew.cmu.edu</a>>; Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>><br>
<b>Cc:</b><span class="apple-converted-space"> </span>Daniel Christensen <<a href="mailto:dcchrist@wisc.edu">dcchrist@wisc.edu</a>><br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616">[External Email]</span></b><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Cheers!</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Julia Aebersold, Ph.D.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Manager, Micro/Nano Technology Center</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">University of Louisville</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Shumaker Research Building, Room 233</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">2210 South Brook Street</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Louisville, KY 40292</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">(502) 852-1572</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__louisville.edu_micronano_&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=ltkBP0MwtJejys408J2VVSxuJSLE2syWp-UOHW3EaWk&e="><span style="color:#0563C1">http://louisville.edu/micronano/</span></a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b><span class="apple-converted-space"> </span>Mark Weiler [<a href="mailto:mweiler@andrew.cmu.edu">mailto:mweiler@andrew.cmu.edu</a>]<span class="apple-converted-space"> </span><br>
<b>Sent:</b><span class="apple-converted-space"> </span>Thursday, January 27, 2022 11:05 AM<br>
<b>To:</b><span class="apple-converted-space"> </span>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>>; Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>><br>
<b>Cc:</b><span class="apple-converted-space"> </span>LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu">dlafleur@cns.fas.harvard.edu</a>>; Daniel Christensen <<a href="mailto:dcchrist@wisc.edu">dcchrist@wisc.edu</a>><br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.0pt;background:#FF4D4D"><b><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">CAUTION:</span></b><span class="apple-converted-space"><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"> </span></span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">This
email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Hello Everyone,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">I have some good results to share on our quest for a better DRIE Lip Seal.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can’t say whether it was truly the Ar Plasma
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our Bosch processing
here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville…<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">If anyone would like ordering information… just let me know.<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Best Regards,<br>
<br>
Mark<br>
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________________________________________________________________<br>
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Mark Weiler<br>
Manager, Equipment & Facilities<br>
Bertucci Nanotechnology Laboratory<br>
Eden Hall Nanofabrication Cleanroom<br>
Carnegie Mellon University<br>
P:<span class="apple-converted-space"> </span>412-268-2471<br>
F:<span class="apple-converted-space"> </span>412-268-3497<br>
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3Dk9VFZtyMeaT4Ilr9UvoJ8fi3UVe0-252BTdlD47tsra7nk8-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=FuMwZG3UBfLqx35enC244O2lImbq_35VErVbvb4-3pU&e=">http://www.nanofab.ece.cmu.edu</a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">On Mar 11, 2019, at 4:40 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Thanks Mark.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">I would be interested in hearing your Ar lipseal burn results as well.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Kurt</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">---------------------------------------------------</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Kurt Kupcho</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Process Engineer/Safety Officer</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">NFC</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">1550 Engineering Drive</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">ECB Room 3110</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Madison, WI 53706</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">T: 608-262-2982</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif"> </span></span><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">Mark
Weiler [<a href="mailto:mweiler@andrew.cmu.edu"><span style="color:purple">mailto:mweiler@andrew.cmu.edu</span></a>]<span class="apple-converted-space"> </span><br>
<b>Sent:</b><span class="apple-converted-space"> </span>Monday, March 11, 2019 3:33 PM<br>
<b>To:</b><span class="apple-converted-space"> </span>Kurt Kupcho<br>
<b>Cc:</b><span class="apple-converted-space"> </span>LaFleur, David W; Fab Network<br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Hi Kurt,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">I will let you know the results of the new seals… In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler approach
to seal conditioning.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">________________________________________________________________</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Mark Weiler</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Equipment & Facilites Manager</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Clair and John Bertucci Nanotechnology Laboratory</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Eden Hall Nanofabrication Cleanroom</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Carnegie Mellon University</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">P: 412-268-2471</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3Dk9VFZtyMeaT4Ilr9UvoJ8fi3UVe0-252BTdlD47tsra7nk8-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=FuMwZG3UBfLqx35enC244O2lImbq_35VErVbvb4-3pU&e="><span style="color:purple">http://www.nanofab.ece.cmu.edu</span></a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttps-253A-252F-252Fwww.linkedin.com-252Fin-252Fmarksbasics-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DxPvd9ugyY6o1JyQrthDr23UbLSQdm5BBlgM5Q52kIUM-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=Ae9JNweDns3vJ01iHad0tC_SqEVgMcA2wrOFSYqPorM&e="><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:purple;text-decoration:none"><image002.png></span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">On Mar 11, 2019, at 3:55 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu"><span style="color:purple">kurt.kupcho@wisc.edu</span></a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Hi Mark & David –</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great – throw one in the system and it would last about 6 months with no issues. Then about a few years ago
we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped sticking
then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. <span class="apple-converted-space"> </span>Second,
piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are
happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma
clean times, which seems to increase the lipseal lifetime significantly. <span class="apple-converted-space"> </span></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Best,</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Kurt</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">---------------------------------------------------</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Kurt Kupcho</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Process Engineer/Safety Officer</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">NFC</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">1550 Engineering Drive</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">ECB Room 3110</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Madison, WI 53706</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu"><span style="color:purple">kurt.kupcho@wisc.edu</span></a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">T: 608-262-2982</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif"> </span></span><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif"><a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a><span class="apple-converted-space"> </span>[<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">mailto:labnetwork-bounces@mtl.mit.edu</span></a>]<span class="apple-converted-space"> </span><b>On
Behalf Of<span class="apple-converted-space"> </span></b>Mark Weiler<br>
<b>Sent:</b><span class="apple-converted-space"> </span>Wednesday, March 06, 2019 8:04 AM<br>
<b>To:</b><span class="apple-converted-space"> </span>LaFleur, David W<br>
<b>Cc:</b><span class="apple-converted-space"> </span>Fab Network<br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> Hi David,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges and chemical
attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet tested this
material but we are having a seal made specifically for the Bosch process and 02 cleans.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave costs. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing the source and
part number.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Thank you for sharing your info; now I know we are not the only ones “feeling the pain” so to speak and can officially commiserate... LOL<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Best,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark Weiler</span></b><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
Equipment & Facilities Manager<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Claire and John Bertucci Nanotechnology Laboratory<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
<a href="x-apple-data-detectors://3/1"><span style="color:purple">5000 Forbes Ave., Pittsburgh, PA 15213-3890</span></a><br>
T: <a href="tel:412.268.5430"><span style="color:purple">412.268.2471</span></a><br>
F: <a href="tel:412.268.3497"><span style="color:purple">412.268.3497</span></a><br>
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DW-252Faz7EBv-252BAzDDuov5eeMKEVxEnCcL1QoQKY3qQhxX2g-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=ngB0WfbFgkwdvLj5X608Dv9OX6SpHeZ2Yd9HJgXCpP8&e="><span style="color:purple">www.ece.cmu.edu</span></a><br>
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fnanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DJm2CxQ1ne00XmrG6OFeHM86K-252FNBs0GFneAI7cOqtVag-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=QucFQT29UVi0bdXxTCJJMxdHaeaHsMVprZ8nCVt4hH4&e="><span style="color:purple">nanofab.ece.cmu.edu</span></a><o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
On Mar 6, 2019, at 08:46, LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu"><span style="color:purple">dlafleur@cns.fas.harvard.edu</span></a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal">Hi Mark,<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set of issues. We find
the lip seals don’t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make them last longer
is make sure they don’t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe they have a solution.
Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why I have just lived with
the lip seals as they are.<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">Regards,<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">David LaFleur<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">Equipment Engineer<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal">CNS, Harvard University<span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:12.0pt">From:<span class="apple-converted-space"> </span></span></b><span style="font-size:12.0pt">"<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a>"
<<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a>> on behalf of Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu"><span style="color:purple">mweiler@andrew.cmu.edu</span></a>><br>
<b>Date:<span class="apple-converted-space"> </span></b>Tuesday, March 5, 2019 at 3:44 PM<br>
<b>To:<span class="apple-converted-space"> </span></b>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu"><span style="color:purple">labnetwork@mtl.mit.edu</span></a>><br>
<b>Subject:<span class="apple-converted-space"> </span></b>[labnetwork] STS DRIE Multiplex Lip Seal failures</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Hello Everyone,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month thereafter.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer seals we
had been using were coming out with black residue after only a few runs… however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber material
shedding off. It’s as if they are made of Buna and not meant for this application.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr, Coil power
600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data…. we just can’t complete the work due
to failing seals.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute leak rate.
That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean… then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there might be a parameter
change we need to effect that may assist us.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Have any of you seen this before?<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Best regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">________________________________________________________________</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Mark Weiler</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Equipment & Facilites Manager</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Clair and John Bertucci Nanotechnology Laboratory</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Eden Hall Nanofabrication Cleanroom</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">Carnegie Mellon University</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">P: 412-268-2471</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttps-253A-252F-252Furldefense.proofpoint.com-252Fv2-252Furl-253Fu-253Dhttp-2D3A-5F-5Fwww.nanofab.ece.cmu.edu-2526d-253DDwMGaQ-2526c-253DWO-2DRGvefibhHBZq3fL85hQ-2526r-253D6eLRBFWstHA-5F77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE-2526m-253DGZ5yf4iHmJa34tuDFePywye54bw-2Dac2pvX333zI9bnA-2526s-253DZH-2DJLOPgpC2A-2Dfi8K9m7di3gfZlrsVgsRXshO9n5YnI-2526e-253D-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DpbOVCo9937pScmMmO8Jj07jDAMS7ecJluN-252FG2fBr8pA-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=6htqHC9TEqRkWjAkCwi2J4IADGdEyeaWFbUGCf7A2k4&e="><span style="color:purple">http://www.nanofab.ece.cmu.edu</span></a></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttps-253A-252F-252Furldefense.proofpoint.com-252Fv2-252Furl-253Fu-253Dhttps-2D3A-5F-5Fwww.linkedin.com-5Fin-5Fmarksbasics-2526d-253DDwMGaQ-2526c-253DWO-2DRGvefibhHBZq3fL85hQ-2526r-253D6eLRBFWstHA-5F77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE-2526m-253DGZ5yf4iHmJa34tuDFePywye54bw-2Dac2pvX333zI9bnA-2526s-253DWquMkON2Ebt40diZk9ZCj0gHSa0hEyxOPMuXQDR8cmE-2526e-253D-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3D6V9-252BYcBI-252BYO-252Bf4eTm8hsXkKV8jZZGg2gIl7g6FfJbg0-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=-bkGlFK-QXIvy2VUIFvSVJaC7F0uHtBrxHLWEs-r0HY&e="><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:purple;text-decoration:none"><image001.png></span></a><o:p></o:p></span></p>
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