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<p class="MsoNormal"><span lang="EN-US">Hello Mark,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Same with Bruce, I also apply a thin coat of vacuum grease after cleaning the lip seal, but instead of Fomblin grease I use Apiezon Grease which is silicone free.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Rosendo <o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:9.0pt;color:blue">Rosendo M. Bindoy</span></b><span lang="EN-US" style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;color:blue">Equipment Engineer</span><span lang="EN-US" style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;color:#007F00">Nanofabrication Core Lab</span><span lang="EN-US" style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;color:#007F00">Ibn Sina Bldg. 3 (Sea Side), Level 0 Room 0252</span><span lang="EN-US" style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;color:red">King Abdullah University of Science and Technology</span><span lang="EN-US" style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;color:#7F0000">Phone: +966 12 808 4413 Mobile: +966 54 251 5257</span><span lang="EN-US" style="font-size:10.5pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;color:blue">Email: <a href="mailto:rosendo.bindoy@kaust.edu.sa"><span style="color:purple">rosendo.bindoy@kaust.edu.sa</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><u><span lang="EN-US" style="font-size:9.0pt;color:#4472C4"><a href="https://corelabs.kaust.edu.sa/visitor-information"><span style="color:#4472C4">Visit The Core Labs</span></a><o:p></o:p></span></u></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:12.0pt;color:black">From:
</span></b><span lang="EN-US" style="font-size:12.0pt;color:black">labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Bruce Tolleson <betemc@rit.edu><br>
<b>Date: </b>Friday, 28 January 2022 at 8:14 PM<br>
<b>To: </b>"Lewis, William" <blewis@eng.ufl.edu>, Mark Weiler <mweiler@andrew.cmu.edu><br>
<b>Cc: </b>Fab Network <labnetwork@mtl.mit.edu>, Kurt Kupcho <kurt.kupcho@wisc.edu>, Daniel Christensen <dcchrist@wisc.edu><br>
<b>Subject: </b>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Hi M ark,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> We use Fomblin grease and apply a thin coat to a clean o-ring upon installation and we get great life out of ours as well.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Good Luck,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">(315) 573-6263<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:navy"><img border="0" width="90" height="60" style="width:.9375in;height:.625in" id="Picture_x0020_1" src="cid:image001.jpg@01D816B9.00155AF0" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span lang="EN-US" style="color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Lewis,William<br>
<b>Sent:</b> Friday, January 28, 2022 8:03 AM<br>
<b>To:</b> Mark Weiler <mweiler@andrew.cmu.edu><br>
<b>Cc:</b> Fab Network <labnetwork@mtl.mit.edu>; Kurt Kupcho <kurt.kupcho@wisc.edu>; Daniel Christensen <dcchrist@wisc.edu><br>
<b>Subject:</b> Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Hi Mark,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Treat was the wrong word. Just rub Fomblin (PFPE) on the seal.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu">mweiler@andrew.cmu.edu</a>>
<br>
<b>Sent:</b> Thursday, January 27, 2022 4:46 PM<br>
<b>To:</b> Lewis,William <<a href="mailto:blewis@eng.ufl.edu">blewis@eng.ufl.edu</a>><br>
<b>Cc:</b> Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>>; Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>>;
Daniel Christensen <<a href="mailto:dcchrist@wisc.edu">dcchrist@wisc.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616">[External Email]</span></b>
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<p class="MsoNormal"><span lang="EN-US">Hi Bill, <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">That’s brilliant.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Do you clean them with Fomblin and then allow them to soak in it? What is the treatment portion of the process?<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica;color:black">Best Regards,<br>
<br>
Mark<br>
<br>
________________________________________________________________<br>
<br>
Mark Weiler<br>
Manager, Equipment & Facilities<br>
Bertucci Nanotechnology Laboratory<br>
Eden Hall Nanofabrication Cleanroom<br>
Carnegie Mellon University<br>
P:<span class="apple-tab-span"> </span>412-268-2471<br>
F:<span class="apple-tab-span"> </span>412-268-3497<br>
<a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ece.cmu.edu&d=DwMFaQ&c=sJ6xIWYx-zLMB3EPkvcnVg&r=QdMIlOhtlLtvSR_lpOHVRl7rOEc-yFk3LzIVikcu6R8&m=NucH1OAjwyDb8yu1MeYa5q6M9KG1Ih8hCcqv4j4HSCdgXU1kF1qmknsJquj96J3K&s=pTkW6Q0u2aiVkd6JNr5zXDdCAj1pSKWyUVm5KSej_cw&e=">http://www.nanofab.ece.cmu.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><img border="0" width="120" height="33" style="width:1.25in;height:.3437in" id="_x0037_72E9D51-D58C-42F4-AC78-A2E131F5515E" src="cid:image002.png@01D816B9.00155AF0"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">On Jan 27, 2022, at 4:31 PM, Lewis,William <<a href="mailto:blewis@eng.ufl.edu">blewis@eng.ufl.edu</a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">We clean and treat the lip seal with Fomblin. Works great and lasts a long time. Process a couple of dummy wafers after treatment.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Bill Lewis</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Research Service Center</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">University of Florida</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><a href="mailto:walewis@ufl.edu"><span style="color:#0563C1">walewis@ufl.edu</span></a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">3five2-258-zero5zero7</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><a href="https://urldefense.com/v3/__https:/rsc.aux.eng.ufl.edu/__;!!Nmw4Hv0!jojI-KEPkOh7W70RUydZ2_DX-RmqtNicNeKmw_gXB1aGySBkcPJ5LpI0lwxjRGLfroJ3GGgI$"><span style="color:#0563C1">https://rsc.aux.eng.ufl.edu/</span></a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span class="apple-converted-space"><span lang="EN-US"> </span></span><span lang="EN-US">labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>><span class="apple-converted-space"> </span><b>On
Behalf Of<span class="apple-converted-space"> </span></b>Aebersold,Julia W.<br>
<b>Sent:</b><span class="apple-converted-space"> </span>Thursday, January 27, 2022 12:40 PM<br>
<b>To:</b><span class="apple-converted-space"> </span>Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu">mweiler@andrew.cmu.edu</a>>; Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>><br>
<b>Cc:</b><span class="apple-converted-space"> </span>Daniel Christensen <<a href="mailto:dcchrist@wisc.edu">dcchrist@wisc.edu</a>><br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616">[External Email]</span></b><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">We have been able to get a good life from lip deals when the substrates are clean, chamber cleans before each etch process and maintaining a helium leak up rates well below 10.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Cheers!</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Julia Aebersold, Ph.D.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Manager, Micro/Nano Technology Center</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">University of Louisville</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Shumaker Research Building, Room 233</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">2210 South Brook Street</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Louisville, KY 40292</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">(502) 852-1572</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__louisville.edu_micronano_&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=ltkBP0MwtJejys408J2VVSxuJSLE2syWp-UOHW3EaWk&e="><span style="color:#0563C1">http://louisville.edu/micronano/</span></a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span class="apple-converted-space"><span lang="EN-US"> </span></span><span lang="EN-US">Mark Weiler [<a href="mailto:mweiler@andrew.cmu.edu">mailto:mweiler@andrew.cmu.edu</a>]<span class="apple-converted-space"> </span><br>
<b>Sent:</b><span class="apple-converted-space"> </span>Thursday, January 27, 2022 11:05 AM<br>
<b>To:</b><span class="apple-converted-space"> </span>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>>; Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>>; Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>><br>
<b>Cc:</b><span class="apple-converted-space"> </span>LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu">dlafleur@cns.fas.harvard.edu</a>>; Daniel Christensen <<a href="mailto:dcchrist@wisc.edu">dcchrist@wisc.edu</a>><br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures (UPDATE)</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:12.0pt;background:#FF4D4D"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">CAUTION:</span></b><span class="apple-converted-space"><span lang="EN-US" style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black"> </span></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black">This
email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Hello Everyone,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">I have some good results to share on our quest for a better DRIE Lip Seal.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">The Argon conditioning of the OEM seals did result in a somewhat longer lifetime, but as it was only a single seal test point, I can’t say whether it was truly
the Ar Plasma that helped.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">We did, however, install our new higher temp and chemical resistant Lip Seal design last summer and they are still sealing at <1mT LUR. This is great for our
Bosch processing here, but will likely fail simply because I am writing an email regarding some success, and we all know Mr. Murphy hates that.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Kurt and Julia, you had mentioned similar difficulties with your tools at Wisconsin and Louisville…<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">If anyone would like ordering information… just let me know.<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Best Regards,<br>
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Mark<br>
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Mark Weiler<br>
Manager, Equipment & Facilities<br>
Bertucci Nanotechnology Laboratory<br>
Eden Hall Nanofabrication Cleanroom<br>
Carnegie Mellon University<br>
P:<span class="apple-converted-space"> </span>412-268-2471<br>
F:<span class="apple-converted-space"> </span>412-268-3497<br>
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3Dk9VFZtyMeaT4Ilr9UvoJ8fi3UVe0-252BTdlD47tsra7nk8-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=FuMwZG3UBfLqx35enC244O2lImbq_35VErVbvb4-3pU&e=">http://www.nanofab.ece.cmu.edu</a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">On Mar 11, 2019, at 4:40 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Thanks Mark.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">I would be interested in hearing your Ar lipseal burn results as well.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Kurt</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">---------------------------------------------------</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Kurt Kupcho</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Process Engineer/Safety Officer</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">NFC</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">1550 Engineering Drive</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">ECB Room 3110</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Madison, WI 53706</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu">kurt.kupcho@wisc.edu</a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">T: 608-262-2982</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span class="apple-converted-space"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif"> </span></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif">Mark
Weiler [<a href="mailto:mweiler@andrew.cmu.edu"><span style="color:purple">mailto:mweiler@andrew.cmu.edu</span></a>]<span class="apple-converted-space"> </span><br>
<b>Sent:</b><span class="apple-converted-space"> </span>Monday, March 11, 2019 3:33 PM<br>
<b>To:</b><span class="apple-converted-space"> </span>Kurt Kupcho<br>
<b>Cc:</b><span class="apple-converted-space"> </span>LaFleur, David W; Fab Network<br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Hi Kurt,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">I will let you know the results of the new seals… In the meantime, I am also creating an Argon lip seal conditioning recipe to see if it will be a kinder-gentler
approach to seal conditioning.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">________________________________________________________________</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Mark Weiler</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Equipment & Facilites Manager</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Clair and John Bertucci Nanotechnology Laboratory</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Eden Hall Nanofabrication Cleanroom</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Carnegie Mellon University</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">P: 412-268-2471</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.nanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3Dk9VFZtyMeaT4Ilr9UvoJ8fi3UVe0-252BTdlD47tsra7nk8-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=FuMwZG3UBfLqx35enC244O2lImbq_35VErVbvb4-3pU&e="><span style="color:purple">http://www.nanofab.ece.cmu.edu</span></a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">On Mar 11, 2019, at 3:55 PM, Kurt Kupcho <<a href="mailto:kurt.kupcho@wisc.edu"><span style="color:purple">kurt.kupcho@wisc.edu</span></a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Hi Mark & David –</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">I was on vacation so I apologize for my late thoughts on this STS DRIE lipseal issue.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">I am the engineer in charge of the STS DRIE at UW-Madison. When I first started the lipseals were great – throw one in the system and it would last about 6 months with no issues. Then about a few
years ago we noticed that wafers would stick to new lipseals and pop-off causing the transfer system to miss. To fix this new issue at the time STS told us to do a lipseal burn, or what equates to a 10s O2 plasma of the exposed lipseal. The wafers stopped
sticking then, but never had to do that before and still do to this day. First, piece of evidence that something was different. Then we also saw a greatly reduced lifetime of these lipseals from 6 months to weeks. <span class="apple-converted-space"> </span>Second,
piece of evidence that something was different. So, I have been fighting with SPTS for several years now that something changed with their lipseals and they refuse to admit anything. What it comes down to is these tools are obsolete to them but they are
happy to sell you a $250 lipseal if you still want it. However, we do not see black residue on the back of the wafer where it contacted the lipseal. Because the lipseals are so expensive and lasting a few weeks is not sustainable we reduced our O2 plasma
clean times, which seems to increase the lipseal lifetime significantly. <span class="apple-converted-space"> </span></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Mark, with that said we are very interested here at the UW in your effort to make your own lipseals. Please let me know how we can help and get involved in this endeavor with you.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Best,</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Kurt</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"> </span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">---------------------------------------------------</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Kurt Kupcho</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Process Engineer/Safety Officer</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">NFC</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">1550 Engineering Drive</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">ECB Room 3110</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Madison, WI 53706</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">E: <span class="apple-converted-space"> </span><a href="mailto:kurt.kupcho@wisc.edu"><span style="color:purple">kurt.kupcho@wisc.edu</span></a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">T: 608-262-2982</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><image001.png></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span class="apple-converted-space"><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif"> </span></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma",sans-serif"><a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a><span class="apple-converted-space"> </span>[<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">mailto:labnetwork-bounces@mtl.mit.edu</span></a>]<span class="apple-converted-space"> </span><b>On
Behalf Of<span class="apple-converted-space"> </span></b>Mark Weiler<br>
<b>Sent:</b><span class="apple-converted-space"> </span>Wednesday, March 06, 2019 8:04 AM<br>
<b>To:</b><span class="apple-converted-space"> </span>LaFleur, David W<br>
<b>Cc:</b><span class="apple-converted-space"> </span>Fab Network<br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] STS DRIE Multiplex Lip Seal failures</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> Hi David,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">I am currently working with an elastomer manufacturer to produce O-Rings and seals for the systems of a material that can withstand better temperature ranges
and chemical attacks. If you would like, I can share the information with you and maybe you can join us in this endeavor. The cost for the tooling and mold is now at ~1900 dollars, but I have negotiated the seal price to around 130.00 ea. I have not yet
tested this material but we are having a seal made specifically for the Bosch process and 02 cleans.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">It is my believe that Orbotech has changed suppliers, or has allowed their supplier to switch their material source without testing, all in an effort to shave
costs. <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">My new efforts have also yielded a lower cost (50%) for the ceramic components in the chamber. I will test these and get back with the lab network sharing
the source and part number.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Thank you for sharing your info; now I know we are not the only ones “feeling the pain” so to speak and can officially commiserate... LOL<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Best,<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark Weiler</span></b><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
Equipment & Facilities Manager<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Claire and John Bertucci Nanotechnology Laboratory<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
<a href="x-apple-data-detectors://3/1"><span style="color:purple">5000 Forbes Ave., Pittsburgh, PA 15213-3890</span></a><br>
T: <a href="tel:412.268.5430"><span style="color:purple">412.268.2471</span></a><br>
F: <a href="tel:412.268.3497"><span style="color:purple">412.268.3497</span></a><br>
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fwww.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DW-252Faz7EBv-252BAzDDuov5eeMKEVxEnCcL1QoQKY3qQhxX2g-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=ngB0WfbFgkwdvLj5X608Dv9OX6SpHeZ2Yd9HJgXCpP8&e="><span style="color:purple">www.ece.cmu.edu</span></a><br>
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttp-253A-252F-252Fnanofab.ece.cmu.edu-252F-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DJm2CxQ1ne00XmrG6OFeHM86K-252FNBs0GFneAI7cOqtVag-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=QucFQT29UVi0bdXxTCJJMxdHaeaHsMVprZ8nCVt4hH4&e="><span style="color:purple">nanofab.ece.cmu.edu</span></a><o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:12.0pt"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
On Mar 6, 2019, at 08:46, LaFleur, David W <<a href="mailto:dlafleur@cns.fas.harvard.edu"><span style="color:purple">dlafleur@cns.fas.harvard.edu</span></a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Hi Mark,</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">We have an STS MP0579 ICP which uses the lip seals. It is used mostly for silicon and SiO2 etches with O2 cleans between uses. Most of our Bosch processes are run on SPTS Rapier which uses an ESC. That has its own set
of issues. We find the lip seals don’t last more than 2-3 weeks in our system. Our chamber o-rings usually go for 2 months at best. I was thinking of changing to a kalrez o-ring and always wondered if they made a Kalrez lip seal. One suggestion on how to make
them last longer is make sure they don’t get exposed to any solvents like Isopropyl when you are installing them. I want to say I am not happy with the longevity of the lip seals either and maybe we need to bring this to the attention of Orbotech/SPTS. Maybe
they have a solution. Other than that they are good tools, very reliable, and heavily used here at Harvard. Because they are so heavily used with so many processes we find a biweekly chamber clean and lip seal replacement works well for everyone. This is why
I have just lived with the lip seals as they are.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Regards,</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">David LaFleur</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Equipment Engineer</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">CNS, Harvard University</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:12.0pt">From:<span class="apple-converted-space"> </span></span></b><span lang="EN-US" style="font-size:12.0pt">"<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a>"
<<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:purple">labnetwork-bounces@mtl.mit.edu</span></a>> on behalf of Mark Weiler <<a href="mailto:mweiler@andrew.cmu.edu"><span style="color:purple">mweiler@andrew.cmu.edu</span></a>><br>
<b>Date:<span class="apple-converted-space"> </span></b>Tuesday, March 5, 2019 at 3:44 PM<br>
<b>To:<span class="apple-converted-space"> </span></b>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu"><span style="color:purple">labnetwork@mtl.mit.edu</span></a>><br>
<b>Subject:<span class="apple-converted-space"> </span></b>[labnetwork] STS DRIE Multiplex Lip Seal failures</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Hello Everyone,<span class="apple-converted-space"> </span><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">We have gone through seven new lip seals purchased form Orbotech/SPTS. They are often failing before we even finish qualifying the system, or within a month
thereafter.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Our our process is stable with power and parameters not deviating over the past decade. However, I ordered the most recent batch of lip seals because the wafer
seals we had been using were coming out with black residue after only a few runs… however, the current ones do the same. Not only have the lips seals disintegrated, but the chamber lid o-ring and bottom ceramic spool o-ring have also failed with black rubber
material shedding off. It’s as if they are made of Buna and not meant for this application.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Our process is typical Bosch with 100 sccm C4F8 and 20 sccm O2 for etching switching off with ~50 Sccm SF6 for passivation at a processing pressure of 15 mTorr,
Coil power 600-800W, Platen power 100-150W, Bias voltage 50-100v (up to 200 peak-to-peak), Platen temp at 19 degrees, Lid temp 41 degrees. Qual wafers are new bare Silicon. Etch rates are normal and stable with 10+ years of data…. we just can’t complete
the work due to failing seals.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Our chamber base pressure is between 1E-8 and 5E-8 Torr each morning. When we put in a brand new seal and run only the LUR, it passes with 0.00 mTorr/minute
leak rate. That jumps to 3.00 mTorr/m after only 30 minutes of the SPTS recommended O2 Clean… then rises as time and more runs progress. Wafers are coming out with black rings on their backsides. <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">This should not be happening, and I believe it is due to incorrect material of the lip seals and o-rings. I am pinging the network, though, to see if there
might be a parameter change we need to effect that may assist us.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Have any of you seen this before?<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Best regards,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif">Mark<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">________________________________________________________________</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Mark Weiler</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Equipment & Facilites Manager</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Clair and John Bertucci Nanotechnology Laboratory</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Eden Hall Nanofabrication Cleanroom</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">Carnegie Mellon University</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica">P: 412-268-2471</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;font-family:Helvetica"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttps-253A-252F-252Furldefense.proofpoint.com-252Fv2-252Furl-253Fu-253Dhttp-2D3A-5F-5Fwww.nanofab.ece.cmu.edu-2526d-253DDwMGaQ-2526c-253DWO-2DRGvefibhHBZq3fL85hQ-2526r-253D6eLRBFWstHA-5F77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE-2526m-253DGZ5yf4iHmJa34tuDFePywye54bw-2Dac2pvX333zI9bnA-2526s-253DZH-2DJLOPgpC2A-2Dfi8K9m7di3gfZlrsVgsRXshO9n5YnI-2526e-253D-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3DpbOVCo9937pScmMmO8Jj07jDAMS7ecJluN-252FG2fBr8pA-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=6htqHC9TEqRkWjAkCwi2J4IADGdEyeaWFbUGCf7A2k4&e="><span style="color:purple">http://www.nanofab.ece.cmu.edu</span></a></span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__nam11.safelinks.protection.outlook.com_-3Furl-3Dhttps-253A-252F-252Furldefense.proofpoint.com-252Fv2-252Furl-253Fu-253Dhttps-2D3A-5F-5Fwww.linkedin.com-5Fin-5Fmarksbasics-2526d-253DDwMGaQ-2526c-253DWO-2DRGvefibhHBZq3fL85hQ-2526r-253D6eLRBFWstHA-5F77uCRuGQiAtV9vZWeQjYS4oSMBfEHZE-2526m-253DGZ5yf4iHmJa34tuDFePywye54bw-2Dac2pvX333zI9bnA-2526s-253DWquMkON2Ebt40diZk9ZCj0gHSa0hEyxOPMuXQDR8cmE-2526e-253D-26data-3D04-257C01-257Cjulia.aebersold-2540louisville.edu-257C2594d8f67ca04661a36008d9e1aecae7-257Cdd246e4a54344e158ae391ad9797b209-257C0-257C0-257C637788963118763327-257CUnknown-257CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0-253D-257C3000-26sdata-3D6V9-252BYcBI-252BYO-252Bf4eTm8hsXkKV8jZZGg2gIl7g6FfJbg0-253D-26reserved-3D0&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=0iLZPIR8-f9LZljbbTfNpe951O2ZVKsi_qU1nYk5oAAwyuCM2SJOufru9wPKnLGt&s=-bkGlFK-QXIvy2VUIFvSVJaC7F0uHtBrxHLWEs-r0HY&e="><span style="font-size:9.0pt;font-family:Helvetica;color:purple;text-decoration:none"><image001.png></span></a><o:p></o:p></span></p>
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