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Dear Long,<br>
<br>
there is Sub-Wavelength Holographic Lithography as a lower cost
solution for such structure sizes.<br>
Have a look at apholo.ch they are doing this.<br>
<br>
Best regards<br>
Christian<br>
<pre class="moz-signature" cols="72">Christian Spoerl
Managing Director
idonus sàrl
Rouges-Terres 61
2068 Hauterive / Neuchâtel
Switzerland
tel: +41 32 724 44 40
email: <a class="moz-txt-link-abbreviated" href="mailto:christian.spoerl@idonus.com">christian.spoerl@idonus.com</a>
<a class="moz-txt-link-abbreviated" href="http://www.idonus.com">www.idonus.com</a></pre>
<div class="moz-cite-prefix">On 04.03.2022 22:33, Chang, Long wrote:<br>
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cite="mid:42A0A882-2067-4832-91C4-5BB6203A20A5@cougarnet.uh.edu">
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Hello,
<div class=""><br class="">
</div>
<div class="">I need to print 300nm dots with center to center
spacing of 500nm on a hexagonal lattice. Currently doing it with
EBL, but need to do it faster and cheaper. What are my options?
Can this be done with a Stepper somewhere?</div>
<div class=""><br class="">
</div>
<div class="">Thanks,<br class="">
<div class="">
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Long</div>
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<br>
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