<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0cm;
mso-margin-bottom-alt:auto;
margin-left:0cm;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="FR-CH" link="blue" vlink="purple">
<div class="WordSection1">
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Dear Long,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">We have an ASML DUV stepper connected to a TEL track coater running on 100mm wafers at your service.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">With my very best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Philippe<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span lang="EN-US" style="font-size:10.0pt;color:#1F497D">Dr Philippe Flückiger<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span lang="EN-US" style="font-size:10.0pt;color:#1F497D">Director of Operations<o:p></o:p></span></i></p>
<p class="MsoNormal"><a href="http://cmi.epfl.ch/"><i><span lang="EN-US" style="font-size:10.0pt">http://cmi.epfl.ch/</span></i></a><i><span lang="EN-US" style="font-size:10.0pt;color:#1F497D"><o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span lang="EN-US" style="font-size:10.0pt;color:#1F497D">Phone +41 21 693 6695</span></i><span lang="EN-US" style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Brian Thibeault<br>
<b>Sent:</b> samedi, 5 mars 2022 22:17<br>
<b>To:</b> Michael Rooks <michael.rooks@yale.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Large-scale Nanopatterning<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span lang="EN-US">UCSB has an ASML DUV stepper as well. I'll contact you directly.<o:p></o:p></span></p>
<div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">Brian Thibeault<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<div>
<div>
<p class="MsoNormal"><span lang="EN-US">On Sat, Mar 5, 2022, 12:38 PM Michael Rooks <</span><a href="mailto:michael.rooks@yale.edu"><span lang="EN-US">michael.rooks@yale.edu</span></a><span lang="EN-US">> wrote:<o:p></o:p></span></p>
</div>
<blockquote style="border:none;border-left:solid #CCCCCC 1.0pt;padding:0cm 0cm 0cm 6.0pt;margin-left:4.8pt;margin-top:5.0pt;margin-right:0cm;margin-bottom:5.0pt">
<div>
<p class="MsoNormal"><span lang="EN-US">Cornell CNF has an ASML stepper with 200 nm resolution.<o:p></o:p></span></p>
<div>
<div>
<p class="MsoNormal"><a href="https://www.cnfusers.cornell.edu/node/3" target="_blank"><span lang="EN-US">https://www.cnfusers.cornell.edu/node/3</span></a><span lang="EN-US"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US"><br clear="all">
<o:p></o:p></span></p>
<div>
<div>
<div>
<p class="MsoNormal"><span lang="EN-US">--------------------------------<o:p></o:p></span></p>
<div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<div>
<div>
<p class="MsoNormal"><span lang="EN-US">On Sat, Mar 5, 2022 at 8:15 AM Chang, Long <</span><a href="mailto:lvchang@central.uh.edu" target="_blank"><span lang="EN-US">lvchang@central.uh.edu</span></a><span lang="EN-US">> wrote:<o:p></o:p></span></p>
</div>
<blockquote style="border:none;border-left:solid #CCCCCC 1.0pt;padding:0cm 0cm 0cm 6.0pt;margin-left:4.8pt;margin-top:5.0pt;margin-right:0cm;margin-bottom:5.0pt">
<div>
<p class="MsoNormal"><span lang="EN-US">Hello, <o:p></o:p></span></p>
<div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">I need to print 300nm dots with center to center spacing of 500nm on a hexagonal lattice. Currently doing it with EBL, but need to do it faster and cheaper. What are my options? Can this be done with a Stepper somewhere?<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">Thanks,<o:p></o:p></span></p>
<div>
<div>
<p class="MsoNormal"><span lang="EN-US" style="color:black">Long<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-US">_______________________________________________<br>
labnetwork mailing list<br>
</span><a href="mailto:labnetwork@mtl.mit.edu" target="_blank"><span lang="EN-US">labnetwork@mtl.mit.edu</span></a><span lang="EN-US"><br>
</span><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank"><span lang="EN-US">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><span lang="EN-US"><o:p></o:p></span></p>
</blockquote>
</div>
<p class="MsoNormal"><span lang="EN-US">_______________________________________________<br>
labnetwork mailing list<br>
</span><a href="mailto:labnetwork@mtl.mit.edu" target="_blank"><span lang="EN-US">labnetwork@mtl.mit.edu</span></a><span lang="EN-US"><br>
</span><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank"><span lang="EN-US">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><span lang="EN-US"><o:p></o:p></span></p>
</blockquote>
</div>
</div>
</body>
</html>