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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">You could try JLS Designs in the UK, recently acquired by Plasmatherm. They make a range of small benchtop RIE systems and are open
to customisation discussion.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">O.<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Rachel Schoeppner<br>
<b>Sent:</b> 31 March 2022 23:34<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Searching for a used desktop RIE etcher for SiN<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970">CAUTION:</span></strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970"> This
e-mail originated outside the University of Southampton. <o:p></o:p></span></p>
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<p class="MsoNormal">Good Afternoon, <o:p></o:p></p>
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<p class="MsoNormal">Our facility is trying to acquire a used smaller desktop RIE system specifically for etching SiN. Ideally we would like at least 2 gas inputs and the ability to process a few 3” wafers at a time, if possible. We have been looking into something
like the Technics PE-IIA Etcher but haven’t been finding any that are currently for sale online. Does anyone on this forum know of any available for purchase that are in decent working condition? <o:p></o:p></p>
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<p class="MsoNormal">Suggestions for other comparable tools or used equipment retailers would also be greatly appreciated so that I can expand my search online as well. <o:p></o:p></p>
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<p class="MsoNormal">Best,<o:p></o:p></p>
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<p class="MsoNormal">Rachel<o:p></o:p></p>
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— <o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Rachel Schoeppner, Ph.D</span></b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Quantum Structures Facility Manager<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Confocal Microscopy & Spectroscopy Facility Manager <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">California NanoSystems Institute (CNSI)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">University of California, Santa Barbara<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"><a href="mailto:rlschoeppner@ucsb.edu">rlschoeppner@ucsb.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"><a href="mailto:rachel@cnsi.ucsb.edu">rachel@cnsi.ucsb.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">(805)893-2296<o:p></o:p></span></p>
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