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<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
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<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal">The design of the building and setup of the lab will differ greatly. Your HVAC system design will have the largest effect on your setup as well. We have a recirculating system in our clean room with the Fume hoods as a means for exhaust
to the labs. Certain labs do not have fume hoods so we adjust the air movement via VFD’s. Our Clean room in encircled by an enclosed corridor as well so air bleeds to the that corridor and is returned to the make up unit. We also have a system of balancing
VAV’s to compensate for any variances. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">If you have Fume hoods in the lab you will need enough make up air to feed the Fume hoods or you wont get enough flow through the face of the hood. So basically there is not a one case fits all answer.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Out photolithography lab with 6 8’ hoods has the fan speed control set at .30 inwc, the vav is currently at 70 with a supply air flow setpoint of 14000cfm. This unit supplies two labs across an isolated hallway. Note also these specifications
will change between and iso 6 and iso 5 lab space. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span style="color:#002060;text-transform:uppercase">Deon D. Collins<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="color:#002060"><br>
<i>FACILITY MANAGER</i><br>
</span><span style="color:#002060">Holonyak Lab</span><span style="color:#002060"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#002060">University of Illinois at Urbana-Champaign</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">208 N Wright St Rm. 248 | 2250</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">Urbana, IL 61801</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">217-300-7531 | </span><span style="color:#1F497D"><a href="mailto:deonc69@illinois.edu"><span style="color:#0563C1">deonc69@illinois.edu</span></a><br>
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<br>
</span><a href="http://illinois.edu/"><span style="color:#1F497D;text-decoration:none"><img border="0" width="119" height="21" style="width:1.2395in;height:.2187in" id="Picture_x0020_1" src="cid:image001.png@01D84A59.810D31E0" alt="https://webtools.illinois.edu/webservices/js/ds/signature_logo.png"></span></a><span style="color:#1F497D"><br>
<br>
</span><i><span style="color:#666666">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
</span></i><span style="color:#002060"><o:p></o:p></span></p>
<p class="MsoNormal"><u><span style="color:#1F497D"><o:p><span style="text-decoration:none"> </span></o:p></span></u></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#A3238B">Life is not about watching other people live it. It’s about you living your own!</span></b><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Adam Pettigrew<br>
<b>Sent:</b> Wednesday, April 6, 2022 2:53 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Cleanroom Pressure Setpoint<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Hey All,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I am curious what others have as a setpoint for their cleanroom pressure relative to an unclean or lower classification cleanroom. I have found some information which suggests 10-15Pa is more than sufficient. We have ours set quite high
at 60Pa but it typically sits at 45Pa. If you have tried adjusting the pressure, have you noticed any change in cleanliness/particle counts? Any information would be really appreciated.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal">Adam<br clear="all">
<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">-- <o:p></o:p></p>
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<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Adam Pettigrew</span><span style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Systems Technician</span><span style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">W1-028A ECERF Building</span><span style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph: 587-879-1514</span><span style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black"><a href="https://urldefense.com/v3/__http:/www.nanofab.ualberta.ca/__;!!DZ3fjg!v8VeKmMIi7WoNinUEN-SbYaNPWkOlWAIuzI87oriZ593Uloq9RT0fD2OnX6GV6Zjfzk$" target="_blank"><span style="color:#1155CC">www.nanofab.ualberta.ca</span></a></span><span style="color:#222222"><o:p></o:p></span></p>
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