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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Hi Adam.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Our main cleanroom was build in the early 90’s. We run our class 100 rooms at ~35Pa, our class 1000 at ~30Pa, and our class 10,000 areas at ~ 22Pa.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">We have never had a noticeable issues with particles. Whenever we have checked the levels are always well below spec.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">In instances when our pressures have increased because of control issues we have had to watch to make sure our drop in ceiling tiles (between the
HEPA’s) do not start to pop up and unseat.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Our newer class 10,000 cleanroom runs at 12Pa.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US">Rob<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif">Robert Vandusen<br>
Technical Officer, Microfabrication Lab<br>
Electronics Department<br>
Carleton University<br>
room: 4184 Mackenzie Building<br>
<a href="tel:613-520-2600">613-520-2600</a> ext 5761<br>
<a href="mailto:Robert_vandusen@cunet.carleton.ca" target="_blank">Robert_vandusen@cunet.carleton.ca</a></span><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Shimon Eliav<br>
<b>Sent:</b> April 10, 2022 1:31 AM<br>
<b>To:</b> Adam Pettigrew <apettigr@ualberta.ca>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Cleanroom Pressure Setpoint<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:11.0pt"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:black">[External Email]<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Adam,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The pressure set-point for our cleanroom is 15 Pa. Classes 1,000 to 10,000.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We never played with this parameter.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shimon<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Adam Pettigrew<br>
<b>Sent:</b> Wednesday, 6 April 2022 22:53<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Cleanroom Pressure Setpoint<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Hey All,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">I am curious what others have as a setpoint for their cleanroom pressure relative to an unclean or lower classification cleanroom. I have found some information which suggests 10-15Pa is more than sufficient. We have
ours set quite high at 60Pa but it typically sits at 45Pa. If you have tried adjusting the pressure, have you noticed any change in cleanliness/particle counts? Any information would be really appreciated.<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Thanks,<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">Adam<br clear="all">
<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">-- <o:p></o:p></span></p>
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<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Adam Pettigrew</span><span lang="EN-US" style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Systems Technician</span><span lang="EN-US" style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span lang="EN-US" style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">W1-028A ECERF Building</span><span lang="EN-US" style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span lang="EN-US" style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span lang="EN-US" style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span lang="EN-US" style="font-size:10.0pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph: 587-879-1514</span><span lang="EN-US" style="font-size:10.0pt;color:#222222"><o:p></o:p></span></p>
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