<div dir="ltr"><div>Hi Long, </div><div>We used a vacuum grease to attach the silicon wafer to the Al carrier for DRIE etching in Utah nanofab . I was able to etch a 50x50um opneing through a standard 4-inch silicon wafer. Releasing is time-consuming by soaking overnight in xylene and final device came out pretty good. We can discuss more. <br><br>Thanks</div><div><br></div><div>Hao-Chieh</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Tue, Apr 12, 2022 at 11:22 AM Kamal Yadav <<a href="mailto:kamal.yadav@gmail.com">kamal.yadav@gmail.com</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div dir="ltr">Hi Long,<div><br></div><div>Your PR will mostly char/ or burn, so cool grease is recommended but when you do a through silicon via, you may be exposing the cool grease to plasma and I am not sure what kind of damage it will bring to the devices/chamber. Of course exposing plasma to photoresist (if that works) is fine. Thanks</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Tue, Apr 12, 2022 at 9:07 AM Hollingshead, Dave <<a href="mailto:hollingshead.19@osu.edu" target="_blank">hollingshead.19@osu.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<p class="MsoNormal">Hi Long,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">We do this routinely with our DRIE system. As Jer mentioned, we typically use small drops of santovac 5 oil to adhere the two wafers together to provide thermal conduction. In our case we see etch rate changes or PR “burning” without a
good thermal conductor between the samples.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">-Dave<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> <b>
On Behalf Of </b>Jeremy Upham<br>
<b>Sent:</b> Monday, April 11, 2022 23:08<br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] RIE through Silicon<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span><span style="font-size:1pt;color:white">I think your plan could work, so I'm not sure that I see the problem In my experience the carbon in the PR can contribute to the plasma chemistry and affect the etch,
so I tend to use vacuum grease as a thermally conducting binder between </span></span><span style="font-size:1pt;color:white"><u></u><u></u></span></p>
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<p class="MsoNormal">I think your plan could work, so I'm not sure that I see the problem<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">In my experience the carbon in the PR can contribute to the plasma chemistry and affect the etch, so I tend to use vacuum grease as a thermally conducting binder between the etched sample and the backing wafer instead. Though your system
may well work for your recipe.<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Hope that helps,<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Jer Upham PhD<br>
Senior Lab Manager / Research Scientist<br>
Quantum Photonics Group<br>
University of Ottawa<br>
Tel.: 1 (613) 562-5800 ext 7325<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">On Mon, Apr 11, 2022 at 6:54 PM Chang, Long <<a href="mailto:lvchang@central.uh.edu" target="_blank">lvchang@central.uh.edu</a>> wrote:<u></u><u></u></p>
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<p class="MsoNormal"><b><span style="font-size:9pt;color:rgb(255,66,51)">Attention : courriel externe | external email</span></b><span style="font-size:9pt;color:rgb(255,66,51)"><u></u><u></u></span></p>
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<p class="MsoNormal">Hi Guys, <u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">I have an Oxford RIE with backside Helium. I want to etch through the silicon wafer (380um thick). The largest pattern is a 1mm diameter circle. My plan is to ride the 4” sample wafer on a 4" carrier wafer with PR. Does anyone have a good
solution to this problem?<u></u><u></u></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Thanks,<u></u><u></u></p>
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<p class="MsoNormal"><span style="color:black">Long<u></u><u></u></span></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr"><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div>Thanks,<br></div><div>Kamal </div><div><br></div></div></div></div></div></div></div></div>
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