<html><body><div style="font-family: arial,helvetica,sans-serif; font-size: 11pt; color: #000000"><div>Hello Labnetwork community<br></div><div><br data-mce-bogus="1"></div><div>We have a user that want to use our shared Ebeam evaporator to deposit Ge2Sb2Se5 material.<br>As the tool is used by all of our user, I do not want to contaminate the chamber with something potentially toxic.<br>Does any of you can share expericence with such material? Cleaning method, prefered deposition way: Ebeam or sputtering ?</div><div><br>Thank you for your help</div><div><br data-mce-bogus="1"></div><div data-marker="__SIG_PRE__">
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<p class="MsoNormal"><b><i><span style="font-size:12.0pt;font-family:"Arial",sans-serif;
color:#1F497D">Christophe Clément</span></i></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;
color:gray">Technicien laboratoire</span></b></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">Laboratoire de microfabrication (LMF)</span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">Groupe des Couches Minces (GCM) <u><a href="http://www.gcmlab.ca/" target="_blank">www.gcmlab.ca</a></u></span><br data-mce-bogus="1"></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">Ecole Polytechnique de Montréal </span><a href="http://www.polymtl.ca/" target="_blank"><span style="font-size:8.0pt;
font-family:"Arial",sans-serif;color:gray">www.polymtl.ca</span></a><br data-mce-bogus="1"></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">Département de génie physique </span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D">*</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">2900 Boulevard Edouard Monpetit</span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">Pavillon JAB<br>
Campus de l'Université de Montréal<br>
Montréal (Québec) H3T 1J4</span></p>
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</span><span style="font-size:10.0pt;font-family:Wingdings;color:#1F497D">8</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333"> </span><a href="mailto:christophe.clement@polymtl.ca" target="_blank"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:blue">christophe.clement@polymtl.ca</span></a><br data-mce-bogus="1"></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D">(</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:#333333"> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">514 340 4711 #2417</span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray">Fax : 514 340 5195</span></p>
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