<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">Hi Christoph,<div class=""><br class=""></div><div class=""><div class="">I’d be very cautious about introducing that to a shared tool. </div><div class=""><br class=""></div><div class="">Both Sb and Se present with toxicity concerns, which may be sufficient reason alone to deny this request.</div><div class=""><br class=""></div><div class="">Both of them also have relatively high vapor pressure, so they can really contaminate the chamber for subsequent processes, unless you have some specific measures in place to address that.</div><div class=""><br class=""></div><div class="">I’m also not sure about the stoichiometry and/or structure of Ge2Sb2Se5 deposited through PVD. This material (as well as GSST, the Te-doped version of the same thing) is a glass formed through melt-quenching; some of those properties may be lost through subsequent melting and redeposition. I found some references detailing thermal evaporation procedures for GSST, but none for e-beam, so maybe it’s possible on the right tool?</div><div class=""><br class=""></div><div class="">You should decide what’s best for your tool and facility, but I’d deny this material for a general purpose shared tool on the basis of toxicity concerns alone.</div><div class=""><br class=""></div><div class="">Best of luck,</div><div class=""><br class=""><div class=""><div>-- <br class="">Tim Gilheart, Ph.D.<br class="">Research Scientist - Nanofabrication Cleanroom Manager,<br class="">Shared Equipment Authority (SEA), Rice University<br class="">Cell: 832-341-5488 | Office: 713-348-3159 | <a href="mailto:gilheart@rice.edu" class="">gilheart@rice.edu</a></div></div></div></div><div class="">
<div><br class=""><blockquote type="cite" class=""><div class="">On Apr 17, 2022, at 1:30 PM, Christophe Clément <<a href="mailto:christophe.clement@polymtl.ca" class="">christophe.clement@polymtl.ca</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div class=""><div style="font-family: arial, helvetica, sans-serif; font-size: 11pt;" class=""><div class="">Hello Labnetwork community<br class=""></div><div class=""><br data-mce-bogus="1" class=""></div><div class="">We have a user that want to use our shared Ebeam evaporator to deposit Ge2Sb2Se5 material.<br class="">As the tool is used by all of our user, I do not want to contaminate the chamber with something potentially toxic.<br class="">Does any of you can share expericence with such material? Cleaning method, prefered deposition way: Ebeam or sputtering ?</div><div class=""><br class="">Thank you for your help</div><div class=""><br data-mce-bogus="1" class=""></div><div data-marker="__SIG_PRE__" class="">
<div class="WordSection1"><p class="MsoNormal"><b class=""><i class=""><span style="font-size:12.0pt;font-family:"Arial",sans-serif;
color:#1F497D" class="">Christophe Clément</span></i></b></p><p class="MsoNormal"><b class=""><span style="font-size:10.0pt;font-family:"Arial",sans-serif;
color:gray" class="">Technicien laboratoire</span></b></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">Laboratoire de microfabrication (LMF)</span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">Groupe des Couches Minces (GCM) <u class=""><a href="https://urldefense.com/v3/__http://www.gcmlab.ca/__;!!BuQPrrmRaQ!iNrMecdNdexJ_V7_bDC3K-pUJRKLya-WkrjHZyJRhhqXJ5_6G5IDyJGUM2aqcy2lt2E5KSccMOkobgwnuLApwCagdMCJABY1BmtZdYJzbQ$" target="_blank" class="">www.gcmlab.ca</a></u></span><br data-mce-bogus="1" class=""></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">Ecole Polytechnique de Montréal </span><a href="https://urldefense.com/v3/__http://www.polymtl.ca/__;!!BuQPrrmRaQ!iNrMecdNdexJ_V7_bDC3K-pUJRKLya-WkrjHZyJRhhqXJ5_6G5IDyJGUM2aqcy2lt2E5KSccMOkobgwnuLApwCagdMCJABY1BmsGUTKhnQ$" target="_blank" class=""><span style="font-size:8.0pt;
font-family:"Arial",sans-serif;color:gray" class="">www.polymtl.ca</span></a><br data-mce-bogus="1" class=""></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">Département de génie physique </span></p><p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D" class="">*</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:#333333" class=""> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">2900 Boulevard Edouard Monpetit</span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">Pavillon JAB<br class="">
Campus de l'Université de Montréal<br class="">
Montréal (Québec) H3T 1J4</span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class=""><br class="">
</span><span style="font-size:10.0pt;font-family:Wingdings;color:#1F497D" class="">8</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#333333" class=""> </span><a href="mailto:christophe.clement@polymtl.ca" target="_blank" class=""><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:blue" class="">christophe.clement@polymtl.ca</span></a><br data-mce-bogus="1" class=""></p><p class="MsoNormal"><span style="font-size:10.0pt;font-family:Wingdings;
color:#1F497D" class="">(</span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:#333333" class=""> </span><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">514 340 4711 #2417</span></p><p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;
color:gray" class="">Fax : 514 340 5195</span></p><div class=""> <br class="webkit-block-placeholder"></div><div class=""> <br class="webkit-block-placeholder"></div>
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