<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"><meta name="Generator" content="Microsoft Word 15 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
span.EmailStyle16
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style></head><body lang="EN-US" link="blue" vlink="purple"><div class="WordSection1"><p class="MsoNormal"><span style="color:#1f497d">Hi Tony,</span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d">We have had good experience refilling cylinders with Strem. As Eric mentioned, there is a cleaning fee that can make the cost of a new cylinder either similar or cheaper. However, we were asked by our EHS Office to pursue the refill route because as it turned out, it was more expensive to properly dispose of used cylinders with a hazardous waste vendor than it is to clean and refill. </span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><p class="MsoNormal"><span style="color:#1f497d">Best Regards,</span></p><p class="MsoNormal"><span style="color:#1f497d"><br>Matt</span></p><p class="MsoNormal"><span style="color:#1f497d"> </span></p><div><p class="MsoNormal"><span style="color:#1f497d">--</span></p><p class="MsoNormal"><b><span style="color:#1f497d">Matthew T. Moneck, Ph.D</span></b></p><p class="MsoNormal"><span style="color:#1f497d">Executive Director, Claire & John Bertucci Nanotechnology Laboratory</span></p><p class="MsoNormal"><span style="color:#1f497d">Electrical & Computer Engineering | Carnegie Mellon University</span></p><p class="MsoNormal"><span style="color:#1f497d">5000 Forbes Avenue, Pittsburgh, PA 15213-3890</span></p><p class="MsoNormal"><span style="color:#1f497d">Phone: 412-268-5430</span></p><p class="MsoNormal"><span style="color:#1f497d"><a href="http://www.ece.cmu.edu/"><span style="color:#0563c1">ece.cmu.edu</span></a> </span></p><p class="MsoNormal"><span style="color:#1f497d"><a href="http://www.nanofab.ece.cmu.edu/"><span style="color:#0563c1">nanofab.ece.cmu.edu</span></a> </span></p></div><p class="MsoNormal"><span style="color:#1f497d"> </span></p><div><div style="border:none;border-top:solid #e1e1e1 1.0pt;padding:3.0pt 0in 0in 0in"><p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> <b>On Behalf Of </b>Eric Deguns<br><b>Sent:</b> Thursday, April 21, 2022 4:12 PM<br><b>To:</b> Tony L Olsen <<a href="mailto:tony.olsen@utah.edu">tony.olsen@utah.edu</a>><br><b>Cc:</b> Lab Network (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>) <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br><b>Subject:</b> Re: [labnetwork] Refill ALD Cylinders</p></div></div><p class="MsoNormal"> </p><p class="MsoNormal">Hi Tony,<span style="font-size:12.0pt"></span></p><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal">Most of the standard ALD precursors vendors will "clean and refill" cylinders for you - but they will charge you a cleaning fee. By this, I mean - Strem, Air Liquide, Gelest, etc. Sometimes this cleaning fee can be quite expensive which makes it more cost effective to purchase new ones.</p></div><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal">If you have personnel in the Chemistry department who can refill these cylinders in an appropriate glovebox, refilling on top of the same material is also possible. For example, filling TMA into a empty cylinder which previously held TMA. Proper training and equipment is key here.</p></div><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal">For some applications, you many not want to do a refill depending on the precursor "stickiness" or it's purity requirements.</p></div><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal">Hope that helps.</p></div><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal">Best,</p></div><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal">Eric</p></div><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal">P.S. My work contact is <a href="mailto:Edeguns@veeco.com">Edeguns@veeco.com</a></p></div><div><p class="MsoNormal"> </p></div><div><p class="MsoNormal" style="margin-bottom:12.0pt"> </p><div><p class="MsoNormal">Sent from my iPhone</p></div><div><p class="MsoNormal"><br><br></p><blockquote style="margin-top:5.0pt;margin-bottom:5.0pt"><p class="MsoNormal" style="margin-bottom:12.0pt">On Apr 21, 2022, at 4:02 PM, Tony L Olsen <<a href="mailto:tony.olsen@utah.edu">tony.olsen@utah.edu</a>> wrote:</p></blockquote></div><blockquote style="margin-top:5.0pt;margin-bottom:5.0pt"><div><p class="MsoNormal"> <span style="font-size:12.0pt;font-family:"Times New Roman",serif"></span></p><p class="MsoNormal">Does anybody have a source to re-use/refill ALD cylinders? We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.). It seems a waste to dispose of them, if they can be re-used. I’ve found a couple companies that supposedly provide this service, but they have not responded to my inquiries. Hoping there is a good track record with someone out there.</p><p class="MsoNormal"> </p><p class="MsoNormal">tonyO</p><p class="MsoNormal"> </p><p class="MsoNormal"> </p><p class="MsoNormal">Tony Olsen</p><p class="MsoNormal">Nanofab Cleanroom Supervisor/Process Engineer</p><p class="MsoNormal">University of Utah</p><p class="MsoNormal">36 S Wasatch Drive, Suite 2500</p><p class="MsoNormal">Salt Lake City, UT 84112</p><p class="MsoNormal">801-587-0651</p><p class="MsoNormal"><a href="www.nanofab.utah.edu">www.nanofab.utah.edu</a></p><p class="MsoNormal"> </p><p class="MsoNormal"> </p><p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif">_______________________________________________<br>labnetwork mailing list<br><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a></span></p></div></blockquote></div></div></body></html>