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<p class="MsoNormal">Thanks everyone for the quick response. Curiously, when I asked Strem a few years ago, they told me they don’t refill. I guess I’ll have another discussion with them.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">tonyO<o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> Tony L Olsen <tony.olsen@utah.edu> <br>
<b>Sent:</b> Thursday, April 21, 2022 10:51<br>
<b>To:</b> Lab Network (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Refill ALD Cylinders<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anybody have a source to re-use/refill ALD cylinders? We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.). It seems a waste to dispose of them, if they can be re-used. I’ve found a couple companies that supposedly provide
this service, but they have not responded to my inquiries. Hoping there is a good track record with someone out there.<o:p></o:p></p>
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<p class="MsoNormal">tonyO<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Tony Olsen<o:p></o:p></p>
<p class="MsoNormal">Nanofab Cleanroom Supervisor/Process Engineer<o:p></o:p></p>
<p class="MsoNormal">University of Utah<o:p></o:p></p>
<p class="MsoNormal">36 S Wasatch Drive, Suite 2500<o:p></o:p></p>
<p class="MsoNormal">Salt Lake City, UT 84112<o:p></o:p></p>
<p class="MsoNormal">801-587-0651<o:p></o:p></p>
<p class="MsoNormal"><a href="www.nanofab.utah.edu"><span style="color:blue">www.nanofab.utah.edu</span></a><o:p></o:p></p>
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