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Hi Tony, <br>
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One caveat to the refilling. They will not put a different chemical in the cylinders that are DOT certified, i.e. those that have a welded lid as opposed to a Conflat lid. So you can't say use an empty TMA and change to BDMS, instead you have to buy a
new $6k cylinder. Also, they will not fill the Conflat style as these are not DOT certified.
<br>
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<br>
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Regards, <br>
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Michael <br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Tony L Olsen <tony.olsen@utah.edu><br>
<b>Sent:</b> Thursday, April 21, 2022 4:54 PM<br>
<b>To:</b> Lab Network (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Refill ALD Cylinders</font>
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<p class="x_MsoNormal">Thanks everyone for the quick response. Curiously, when I asked Strem a few years ago, they told me they don’t refill. I guess I’ll have another discussion with them.</p>
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<p class="x_MsoNormal">tonyO</p>
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<p class="x_MsoNormal"><b>From:</b> Tony L Olsen <tony.olsen@utah.edu> <br>
<b>Sent:</b> Thursday, April 21, 2022 10:51<br>
<b>To:</b> Lab Network (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Refill ALD Cylinders</p>
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<p class="x_MsoNormal">Does anybody have a source to re-use/refill ALD cylinders? We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.). It seems a waste to dispose of them, if they can be re-used. I’ve found a couple companies that supposedly provide
this service, but they have not responded to my inquiries. Hoping there is a good track record with someone out there.</p>
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<p class="x_MsoNormal">tonyO</p>
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<p class="x_MsoNormal">Tony Olsen</p>
<p class="x_MsoNormal">Nanofab Cleanroom Supervisor/Process Engineer</p>
<p class="x_MsoNormal">University of Utah</p>
<p class="x_MsoNormal">36 S Wasatch Drive, Suite 2500</p>
<p class="x_MsoNormal">Salt Lake City, UT 84112</p>
<p class="x_MsoNormal">801-587-0651</p>
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