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We have been using Strem for many years and the cylinder refill
program has been great. <br>
<br>
The one thing you may want to be aware of is the additional shipping
charges for TMA cylinders (pyrophoric hazard). For us, the
additional shipping charge for TMA plus the price of the cylinder
cleaning is more than just purchasing a new cylinder of TMA. The
cylinder cleaning is cost effective for many other precursors that
are not pyrophoric.<br>
<br>
As budgets get tight, these little things can add up.<br>
<br>
Best Regards,<br>
Brent<br>
-- <br>
Brent P. Gila, PhD.<br>
Associate Director, Research Service Centers<br>
University of Florida<br>
1041 Center Drive<br>
Gainesville, Florida 32611<br>
<a class="moz-txt-link-freetext" href="Tel:352-273-2245">Tel:352-273-2245</a>, Fax:352-846-2877<br>
email: <a class="moz-txt-link-abbreviated" href="mailto:bgila@ufl.edu">bgila@ufl.edu</a><br>
<br>
<br>
<br>
<div class="moz-cite-prefix">On 4/22/2022 7:48 AM, Bruce Tolleson
wrote:<br>
</div>
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<p class="MsoNormal"><span style="color:#1F497D">Hi Tony,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> We use
Strem Chemical to clean and refill all of our precursors.
They are easy to work with and turn them around in short
order.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Strem has a
Cylinder Refill form on their web site with the
instructions and phone numbers.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> I hope this
helps,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="color:#1F497D">Bruce E.
Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester
Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb
Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester,
NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(315)
573-6263<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:navy"><img style="width:.9375in;height:.625in" id="Picture_x0020_1" src="cid:part1.pQB9Aaww.C8LTHhpw@ufl.edu" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg" class="" width="90" height="60"></span><span style="color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1
1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a> <b>
On Behalf Of </b>Eric Deguns<br>
<b>Sent:</b> Thursday, April 21, 2022 4:12 PM<br>
<b>To:</b> Tony L Olsen <a class="moz-txt-link-rfc2396E" href="mailto:tony.olsen@utah.edu"><tony.olsen@utah.edu></a><br>
<b>Cc:</b> Lab Network (<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>)
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork@mtl.mit.edu"><labnetwork@mtl.mit.edu></a><br>
<b>Subject:</b> Re: [labnetwork] Refill ALD Cylinders<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi Tony,<span style="font-size:12.0pt"><o:p></o:p></span></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Most of the standard ALD precursors
vendors will "clean and refill" cylinders for you - but
they will charge you a cleaning fee. By this, I mean -
Strem, Air Liquide, Gelest, etc. Sometimes this cleaning
fee can be quite expensive which makes it more cost
effective to purchase new ones.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">If you have personnel in the Chemistry
department who can refill these cylinders in an
appropriate glovebox, refilling on top of the same
material is also possible. For example, filling TMA into
a empty cylinder which previously held TMA. Proper
training and equipment is key here.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">For some applications, you many not
want to do a refill depending on the precursor
"stickiness" or it's purity requirements.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Hope that helps.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Best,<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Eric<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">P.S. My work contact is <a href="mailto:Edeguns@veeco.com" moz-do-not-send="true" class="moz-txt-link-freetext">Edeguns@veeco.com</a><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt"><o:p> </o:p></p>
<div>
<p class="MsoNormal">Sent from my iPhone<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><br>
<br>
<o:p></o:p></p>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal" style="margin-bottom:12.0pt">On Apr
21, 2022, at 4:02 PM, Tony L Olsen <<a href="mailto:tony.olsen@utah.edu" moz-do-not-send="true" class="moz-txt-link-freetext">tony.olsen@utah.edu</a>>
wrote:<o:p></o:p></p>
</blockquote>
</div>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<div>
<p class="MsoNormal"> <span style="font-size:12.0pt;font-family:"Times New
Roman",serif">
<o:p></o:p></span></p>
<p class="MsoNormal">Does anybody have a source to
re-use/refill ALD cylinders? We have a number of
spent cylinders (TMA, 3DMAS, TDMAHf, etc.). It seems
a waste to dispose of them, if they can be re-used.
I’ve found a couple companies that supposedly provide
this service, but they have not responded to my
inquiries. Hoping there is a good track record with
someone out there.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">tonyO<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Tony Olsen<o:p></o:p></p>
<p class="MsoNormal">Nanofab Cleanroom
Supervisor/Process Engineer<o:p></o:p></p>
<p class="MsoNormal">University of Utah<o:p></o:p></p>
<p class="MsoNormal">36 S Wasatch Drive, Suite 2500<o:p></o:p></p>
<p class="MsoNormal">Salt Lake City, UT 84112<o:p></o:p></p>
<p class="MsoNormal">801-587-0651<o:p></o:p></p>
<p class="MsoNormal"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.utah.edu&d=DwMGaQ&c=sJ6xIWYx-zLMB3EPkvcnVg&r=gl_2fLZA_-_JfH_dOmx7ug&m=PxtSg_vKsudG04NMtRL0a1394ecB_uipPM5cTkgOUE-GwS2YKEKlHPFNH5j5nsE8&s=sSECLI_hFYL9z4MswaIMG_2g6iDLUzknoIQh6ZgkEJI&e=" moz-do-not-send="true">www.nanofab.utah.edu</a><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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