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Howdy All,</div>

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We have an Oxford Plasmalab 100 ICP RIE in AggieFab, and a user is attempting to develop a Ta etch recipe with straight sidewalls. If anyone has experience developing such a process and can share pointers, we would be very appreciative!</div>

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Thanks for your help.</div>

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<b>Sandra G. Malhotra, Ph.D.</b>  |  Technical Lab Manager

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<div>AggieFab Nanofabrication Facility</div>

<div>Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</div>

<div>3253 TAMU | College Station, TX 77843</div>

<div>ph: 979.845.3199  |  sandra.malhotra@tamu.edu</div>

<div>- - - - - - - - - - - - - - - - - - - - - - - - </div>

TEXAS A&M UNIVERSITY | FEARLESS on Every Front<br>

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