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Our SAMCO 10NR RIE has a vacuum leak. Changed all the easy O-rings. Anyone have an exploded diagram of the Turbo Gate Valve (TGV) or instructions for the replacement of the TGV O-rings.</div>
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Thanks</div>
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Howard Northfield
<div>Research Associate</div>
<div>Center for Research in Photonics</div>
<div>University of Ottawa</div>
<div>25 Templeton Street,</div>
<div>Ottawa, Ontario</div>
<div>Canada, K1N 6N5</div>
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