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<p class="MsoNormal">Long,<o:p></o:p></p>
<p class="MsoNormal"> You should have an at least 3mm exclusion ring of no PR around the circumference of the wafer. It is also helpful to run the wafer through an EBR step before processing it.<o:p></o:p></p>
<p class="MsoNormal">Equipment dood<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:14.0pt">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Chang, Long<br>
<b>Sent:</b> Tuesday, June 21, 2022 2:51 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Oxford Wafer Jam/Break<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi Guys, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">After etching through 380um of Silicon, the loading arm would get jammed during unloading, see photo. The problem was fixed by adding a 15min step to do nothing step to allow the clamp to cool down before unloading. Now the problem is back
and the plan is to increase the cool down time until it stops jamming. Is there a better way to avoid this problem? Should the PR on the wafer edge be removed?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal"><span style="color:black">Long<o:p></o:p></span></p>
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<p class="MsoNormal"><img width="1280" height="960" style="width:13.3333in;height:10.0in" id="_x0031_E2FD795-9308-4A58-8C3A-D01696E77CC6" src="cid:image001.jpg@01D88589.0D3B3F30"><o:p></o:p></p>
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