<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal">Hi Long<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">By jamming does the handler just stall?<o:p></o:p></p>
<p class="MsoNormal">I don’t think adding more time or removing PR from your wafer edge will help.<o:p></o:p></p>
<p class="MsoNormal">I suspect one of the handling sensors isn’t made, you have a mechanical bind (ff feedthrough, gearbox, linear bearing) or you have a failing drive transistor.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Looking at your image- Slit valve is open, clamp is up, lift is up, arm is extended<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Is your “arm out”sensor made? If no you should adjust the arm out sensor.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">If the arm out sensor is made. Check for a mechanical bind- Remove the mounting plate that holds the motor and gearbox assy. You can then try and rotate the ferrofluid feedthrough shaft by hand.
<o:p></o:p></p>
<p class="MsoNormal">If you can rotate, you don’t have a bind.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">This looks like a Blue PLC control system so it would likely be the Q4 transistor on the LL control card that’s the problem. Its mounted just below the LL chamber. It can overheat and intermittently work. Q4 controls the drive back into
the LL.<o:p></o:p></p>
<p class="MsoNormal">It will also discolor so it should be easy to spot. You can replace it with a ZTX450 NPN.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hope this helps<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="600" style="width:6.25in;border-collapse:collapse">
<tbody>
<tr>
<td width="70" valign="top" style="width:52.5pt;padding:0in 0in 0in 0in">
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black"><img width="70" height="60" style="width:.7291in;height:.625in" id="Picture_x0020_1" src="cid:image001.png@01D8860D.DD6E9BA0" alt="University of Massachusetts Lowell"><o:p></o:p></span></p>
</td>
<td valign="top" style="padding:0in 0in 0in 0in">
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="530" style="width:397.5pt;border-collapse:collapse">
<tbody>
<tr>
<td valign="top" style="border:none;border-bottom:solid #CCCCCC 1.0pt;padding:8.25pt 0in 12.75pt 0in">
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black">Justin Moreau<o:p></o:p></span></b></p>
<p class="MsoNormal"><i><span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black">Sr. Lab Manager, Nanofabrication Core<o:p></o:p></span></i></p>
</td>
<td valign="top" style="border:none;border-bottom:solid #CCCCCC 1.0pt;padding:8.25pt 0in 12.75pt 0in">
<p class="MsoNormal" align="right" style="text-align:right"><span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black;text-transform:uppercase">CORE RESEARCH FACILITIES<o:p></o:p></span></p>
<p class="MsoNormal" align="right" style="text-align:right"><span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black">ETIC<o:p></o:p></span></p>
</td>
</tr>
<tr>
<td colspan="2" valign="top" style="padding:12.75pt 0in 0in 0in">
<p class="MsoNormal" style="line-height:18.0pt"><b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">E:</span></b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"> <a href="mailto:Justin_Moreau@uml.edu"><span style="color:black;text-decoration:none">Justin_Moreau@uml.edu</span></a>
<o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:18.0pt"><b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">T:</span></b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"> 978-934-3615 <o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Chang, Long<br>
<b>Sent:</b> Tuesday, June 21, 2022 2:51 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Oxford Wafer Jam/Break<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b><span style="color:red">This e-mail originated from outside the UMass Lowell network.</span></b>
<o:p></o:p></p>
<div class="MsoNormal" align="center" style="text-align:center">
<hr size="2" width="100%" align="center">
</div>
<p class="MsoNormal">Hi Guys, <o:p></o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">After etching through 380um of Silicon, the loading arm would get jammed during unloading, see photo. The problem was fixed by adding a 15min step to do nothing step to allow the clamp to cool down before unloading. Now the problem is back
and the plan is to increase the cool down time until it stops jamming. Is there a better way to avoid this problem? Should the PR on the wafer edge be removed?<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<div>
<div>
<p class="MsoNormal"><span style="color:black">Long<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><img border="0" width="1280" height="960" style="width:13.3333in;height:10.0in" id="_x0031_E2FD795-9308-4A58-8C3A-D01696E77CC6" src="cid:image002.jpg@01D8860D.DD6E9BA0"><o:p></o:p></p>
</div>
</div>
</body>
</html>