<div dir="ltr"><div class="gmail_default" style="font-size:small"><p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Hi Long,</i></p><p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>We had a very similar issue on an Oxford PECVD tool some time back. And it was a ZTX 450 </i><i style="font-size:14.6667px">transistor </i><i style="font-size:11pt">on a board under the loadlock chamber that was burnt out. And as others have mentioned, it can be identified by the discolored place on the board. The service engineer from Oxford replaced the board though.</i></p><img src="cid:ii_l4r5vmvp2" alt="image.png" width="562" height="280"><p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><br></p><p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><br></i></p><p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><br></i></p><p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Fubo Rao, Ph.D.,</i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Nanofabrication
Cleanroom Manager,</span></i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Center for
Nanoscale Materials,</span></i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Argonne
National Laboratory</span></i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">9700 S. Cass Ave, Lemont, IL 60439</span></i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Phone: 630-252-5708</span></i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Email: <a href="frao@anl.gov"><span style="color:rgb(68,114,196)">frao@anl.gov</span></a></span></i></p></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Jun 23, 2022 at 8:50 AM Michael Perry <<a href="mailto:M.G.Perry@soton.ac.uk">M.G.Perry@soton.ac.uk</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
Hi Long, </div>
<div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">
<span style="color:rgb(0,0,0);font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt">Justin is likely to be right, as steve says, he knows his stuff. If its been failing for some time though it can also start to burn out one of the other
transistors. Any that are discolored replace. Its sometimes easier to just snip the legs off and solder a new one to the legs to minimise risk of damage to pcb. Or if you want to future proof it, stick some sockets in there. Really common problem on oipt LL's.
keep a batch on 450's and 550's as spares. They can fail as well.</span></div>
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<span style="color:rgb(0,0,0);font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt">mike</span></div>
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<span style="color:rgb(0,0,0);font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt"><br>
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<div id="gmail-m_-652772355395739512divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Paolini, Steven <<a href="mailto:spaolini@cns.fas.harvard.edu" target="_blank">spaolini@cns.fas.harvard.edu</a>><br>
<b>Sent:</b> 22 June 2022 17:06<br>
<b>To:</b> Moreau, Justin <<a href="mailto:Justin_Moreau@uml.edu" target="_blank">Justin_Moreau@uml.edu</a>>; Chang, Long <<a href="mailto:lvchang@Central.UH.EDU" target="_blank">lvchang@Central.UH.EDU</a>>; <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] Oxford Wafer Jam/Break</font>
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<p>Long,</p>
<p> I misinterpreted your message yesterday. It would be wise to take Justin’s advice, he is the top dog when it comes to Oxford equipment.</p>
<p>Steve</p>
<p> </p>
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<p><span style="font-size:14pt">Steve Paolini</span></p>
<p><span style="font-size:14pt">Principal Equipment Engineer</span></p>
<p><span style="font-size:14pt">Harvard University Center for Nanoscale Systems</span></p>
<p><span style="font-size:14pt">11 Oxford St.</span></p>
<p><span style="font-size:14pt">Cambridge, MA 02138</span></p>
<p><span style="font-size:14pt">617- 496- 9816</span></p>
<p><span style="font-size:14pt"><a href="mailto:spaolini@cns.fas.harvard.edu" target="_blank">spaolini@cns.fas.harvard.edu</a></span></p>
<p><span style="font-size:14pt"><a href="http://www.cns.fas.harvard.edu" target="_blank">www.cns.fas.harvard.edu</a></span><span style="font-size:14pt"></span></p>
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<p> </p>
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<p><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> <b>
On Behalf Of </b>Moreau, Justin<br>
<b>Sent:</b> Wednesday, June 22, 2022 7:59 AM<br>
<b>To:</b> Chang, Long <<a href="mailto:lvchang@Central.UH.EDU" target="_blank">lvchang@Central.UH.EDU</a>>; <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Oxford Wafer Jam/Break</p>
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<p> </p>
<p>Hi Long</p>
<p> </p>
<p>By jamming does the handler just stall?</p>
<p>I don’t think adding more time or removing PR from your wafer edge will help.</p>
<p>I suspect one of the handling sensors isn’t made, you have a mechanical bind (ff feedthrough, gearbox, linear bearing) or you have a failing drive transistor.</p>
<p> </p>
<p>Looking at your image- Slit valve is open, clamp is up, lift is up, arm is extended</p>
<p> </p>
<p>Is your “arm out”sensor made? If no you should adjust the arm out sensor.
</p>
<p> </p>
<p>If the arm out sensor is made. Check for a mechanical bind- Remove the mounting plate that holds the motor and gearbox assy. You can then try and rotate the ferrofluid feedthrough shaft by hand.
</p>
<p>If you can rotate, you don’t have a bind.</p>
<p> </p>
<p>This looks like a Blue PLC control system so it would likely be the Q4 transistor on the LL control card that’s the problem. Its mounted just below the LL chamber. It can overheat and intermittently work. Q4 controls the drive back into
the LL.</p>
<p>It will also discolor so it should be easy to spot. You can replace it with a ZTX450 NPN.</p>
<p> </p>
<p> </p>
<p> </p>
<p>Hope this helps</p>
<p> </p>
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<p><b><span style="font-size:10.5pt;font-family:Helvetica,sans-serif;color:black">Justin Moreau</span></b></p>
<p><i><span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black">Sr. Lab Manager, Nanofabrication Core</span></i></p>
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<p style="line-height:18pt"><b><span style="font-size:9pt;font-family:Helvetica,sans-serif;color:black">E:</span></b><span style="font-size:9pt;font-family:Helvetica,sans-serif;color:black"> <a href="mailto:Justin_Moreau@uml.edu" target="_blank"><span style="color:black;text-decoration:none">Justin_Moreau@uml.edu</span></a>
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<p style="line-height:18pt"><b><span style="font-size:9pt;font-family:Helvetica,sans-serif;color:black">T:</span></b><span style="font-size:9pt;font-family:Helvetica,sans-serif;color:black"> 978-934-3615 </span></p>
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<p><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Chang, Long<br>
<b>Sent:</b> Tuesday, June 21, 2022 2:51 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Oxford Wafer Jam/Break</p>
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<p><b><span style="color:red">This e-mail originated from outside the UMass Lowell network.</span></b>
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<p>Hi Guys, </p>
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<p> </p>
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<div>
<p>After etching through 380um of Silicon, the loading arm would get jammed during unloading, see photo. The problem was fixed by adding a 15min step to do nothing step to allow the clamp to cool down before unloading. Now the problem is
back and the plan is to increase the cool down time until it stops jamming. Is there a better way to avoid this problem? Should the PR on the wafer edge be removed?</p>
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<p>Thanks,</p>
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<p><span style="color:black">Long</span></p>
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